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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 22 — Oct. 22, 2012
  • pp: 24094–24102

Etching of subwavelength periodic stripes by using a nanosecond laser pulse

Zhilin Xia, Yuan’an Zhao, Dawei Li, and Yuting Wu  »View Author Affiliations

Optics Express, Vol. 20, Issue 22, pp. 24094-24102 (2012)

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In this study, porous silica films, which have particle accumulation microstructure, were prepared using the sol–gel method. For comparison, compact silica films were deposited using the electron-beam-heating method. These films were then irradiated using nanosecond-pulsed laser beams with wavelengths of 1064 and 532 nm. Laser-induced damage thresholds were recorded and the film microstructures, as well as damage photographs, were observed using scanning electron microscopy. The experimental results show that different kinds of stripes formed on the surface of the silica films with particle accumulation structure. A kind of subwavelength periodic straight stripe was observed in the case of the 1064 nm wavelength, whereas another kind of annular stripe around the small damage pits was observed in the case of the 532 nm wavelength.

© 2012 OSA

OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(310.0310) Thin films : Thin films

ToC Category:
Laser Microfabrication

Original Manuscript: September 25, 2012
Manuscript Accepted: October 1, 2012
Published: October 8, 2012

Zhilin Xia, Yuan’an Zhao, Dawei Li, and Yuting Wu, "Etching of subwavelength periodic stripes by using a nanosecond laser pulse," Opt. Express 20, 24094-24102 (2012)

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