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Etching of subwavelength periodic stripes by using a nanosecond laser pulse |
Optics Express, Vol. 20, Issue 22, pp. 24094-24102 (2012)
http://dx.doi.org/10.1364/OE.20.024094
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Abstract
In this study, porous silica films, which have particle accumulation microstructure, were prepared using the sol–gel method. For comparison, compact silica films were deposited using the electron-beam-heating method. These films were then irradiated using nanosecond-pulsed laser beams with wavelengths of 1064 and 532 nm. Laser-induced damage thresholds were recorded and the film microstructures, as well as damage photographs, were observed using scanning electron microscopy. The experimental results show that different kinds of stripes formed on the surface of the silica films with particle accumulation structure. A kind of subwavelength periodic straight stripe was observed in the case of the 1064 nm wavelength, whereas another kind of annular stripe around the small damage pits was observed in the case of the 532 nm wavelength.
© 2012 OSA
OCIS Codes
(140.3330) Lasers and laser optics : Laser damage
(310.0310) Thin films : Thin films
ToC Category:
Laser Microfabrication
History
Original Manuscript: September 25, 2012
Manuscript Accepted: October 1, 2012
Published: October 8, 2012
Citation
Zhilin Xia, Yuan’an Zhao, Dawei Li, and Yuting Wu, "Etching of subwavelength periodic stripes by using a nanosecond laser pulse," Opt. Express 20, 24094-24102 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-22-24094
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References
- J. Perrière, É. Millon, and É. Fogarassy, Recent Advances in Laser Processing of Materials (Elsevier, 2006).
- G. S. Zhou, P. M. Fauchet, and A. E. Siegman, “Growth of spontaneous periodic surface structures on solids during laser illumination,” Phys. Rev. B26(10), 5366–5381 (1982). [CrossRef]
- H. M. van Driel, J. E. Sipe, and J. F. Young, “Laser-induced periodic surface structure on solids: a universal phenomenon,” Phys. Rev. Lett.49(26), 1955–1958 (1982). [CrossRef]
- M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Large area uniform nanostructures fabricated by direct femtosecond laser ablation,” Opt. Express16(23), 19354–19365 (2008). [CrossRef] [PubMed]
- M. Huang, A Study on Formation of Subwavelength Periodic Structures Induced by Ultrashort Laser Pulses (Doctoral Dissertation, Sun Yat-sen University, 2009).
- E. M. Hsua, T. H. R. Crawford, H. F. Tiedje, and H. K. Haugen, “Periodic surface structures on gallium phosphide after irradiation with 150fs-7ns laser pulses at 800nm,” Appl. Phys. Lett. 91, 111102–1~3 (2007).
- P. Mora, “Plasma expansion into a vacuum,” Phys. Rev. Lett. 90, 185002–1~4 (2003).
- Z. L. Xia, “New damage behavior induced by nanosecond laser pulses on the surface of silica films,” Opt. Laser Technol.submitted., doi:. [CrossRef]
- S. Theppakuttai and S. Chen, “Submicron ripple formation on glass surface upon laser-nanosphere interaction,” J. Appl. Phys.95, 5049–5052 (2004). [CrossRef]
- J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, “Laser-induced periodic surface structure. I. Theory,” Phys. Rev. B27(2), 1141–1154 (1983). [CrossRef]
- L. L. Ran, Z. Y. Guo, and S. L. Qu, “Self-organized periodic surface structures on ZnO induced by femtosecond laser,” Appl. Phys., A Mater. Sci. Process.100(2), 517–521 (2010). [CrossRef]
- T. Q. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, and H. Kuroda, “Nanogratings formation on the surface of ZnSe crystal irradiated by femtosecond laser pulses,” Phys. Rev. B72(12), 125429 (2005). [CrossRef]
- M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B 79, 125436–1~9 (2009).
- Y. A. Zhao, T. Wang, D. W. Zhang, J. D. Shao, and Z. X. Fan, “Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 anti-reflective films,” Appl. Surf. Sci.245(1-4), 335–339 (2005). [CrossRef]
- M. S. W. Vong and N. J. Bazin, “Chemical modification of silica gels,” Sol-Gel Sci. Technol.8, 499–505 (1997).
- L. P. Liang, L. Zhang, and Y. G. Sheng, “Studies on the laser-induced damage resistance of sol-gel derived ZrO2-TiO2 composite high refractive index films,” Acta Phys. Sin.56, 3596–3601 (2007).
- D. Grosso and P. A. Sermon, “Scandia optical coatings for application at 351 nm,” Thin Solid Films368(1), 116–124 (2000). [CrossRef]
- Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultrashort light pulses,” Phys. Rev. Lett.91(24), 247405 (2003). [CrossRef] [PubMed]
- Z. L. Xia, Z. X. Fan, and J. D. Shao, “Statistical approach to bulk inclusion initialized damage in films,” Opt. Commun.265(2), 620–627 (2006). [CrossRef]
- Z. L. Xia, H. Wang, and Q. Xu, “The stress relief mechanism in laser irradiating on porous films,” Opt. Commun.285(1), 70–76 (2012). [CrossRef]
- D. Du, X. Liu, G. Korn, J. Squier, and G. Mourou, “Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs,” Appl. Phys. Lett.64(23), 3071–3073 (1994). [CrossRef]
- H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer, 1988).
- M. Huang, F. L. Zhao, Y. Cheng, N. S. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3(12), 4062–4070 (2009). [CrossRef] [PubMed]
- J. Y. Natoli, L. Gallais, B. Bertussi, A. During, M. Commandré, J. L. Rullier, F. Bonneau, and P. Combis, “Localized pulsed laser interaction with submicronic gold particles embedded in silica: a method for investigating laser damage initiation,” Opt. Express11(7), 824–829 (2003). [CrossRef] [PubMed]
- M. Jupé, L. Jensen, A. Melninkaitis, V. Sirutkaitis, and D. Ristau, “Calculations and experimental demonstration of multi-photon absorption governing fs laser-induced damage in titania,” Opt. Express17(15), 12269–12278 (2009). [CrossRef] [PubMed]
- X. Z. Zeng, X. L. Mao, S.-B. Wen, R. Greif, and R. E. Russo, “Energy deposition and shock wave propagation during pulsed laser ablation in fused silica cavities,” J. Phys. D Appl. Phys.37(7), 1132–1136 (2004). [CrossRef]
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