Improvement on laser-induced damage threshold of sol-gel ZrO<sub>2</sub> coatings by crystal structure tuning

doi:10.1364/OE.20.024482

Improvement on laser-induced damage threshold of sol-gel ZrO₂ coatings by crystal structure tuning

Xiaodong Wang, Guangming Wu, Bin Zhou, and Jun Shen »View Author Affiliations

Optics Express, Vol. 20, Issue 22, pp. 24482-24487 (2012)
http://dx.doi.org/10.1364/OE.20.024482

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Abstract

With the development and construction of high peak power lasers it has become more and more important to improve the laser-induced damage threshold (LIDT) of optical coatings. In this paper, ZrO₂ coatings were deposited by sol-gel dip-coating method and further treated by conventional furnace annealing (CFA) and rapid thermal annealing (RTA) at different temperatures. By measuring the Raman spectra, optical constants and LIDT, the influence of annealing on the crystal structures, refractive indices, laser-induced damage characters of ZrO₂ coatings were analyzed. The results show that RTA is effective in tuning the crystal structures of ZrO₂ coatings. Lattice mismatch between monoclinic and tetragonal phases happened on CFA treated film reduces its refractive index, hence the film annealed by RTA at 800 °C realizes a higher refractive index. Compared with CFA annealed films, RTA annealed films were no more susceptible to laser damage due to their crystal structure difference caused lager band gap.

OCIS Codes
(160.4670) Materials : Optical materials
(160.6060) Materials : Solgel
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

History
Original Manuscript: July 24, 2012
Revised Manuscript: September 28, 2012
Manuscript Accepted: September 30, 2012
Published: October 11, 2012

Citation
Xiaodong Wang, Guangming Wu, Bin Zhou, and Jun Shen, "Improvement on laser-induced damage threshold of sol-gel ZrO₂ coatings by crystal structure tuning," Opt. Express 20, 24482-24487 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-22-24482

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References

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012). [CrossRef]
Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000). [CrossRef]
H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).
H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010). [CrossRef]
X. Dieudonné, K. Vallé, and P. Belleville, “Towards new levels for stacking of sol-gel functional coatings,” Opt. Express19(17), 16356–16364 (2011). [CrossRef] [PubMed]
L. Liang, Y. Xu, L. Zhang, Y. Sheng, D. Wu, and Y. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B24(5), 1066–1074 (2007). [CrossRef]
ISO 11254–1.2, “Lasers and laser-related equipment: Determination of laser-induced damage threshold of optical surfaces-Part 1: 1-on-1 test” (2000).
J. Hu, J. Yang, W. Chen, and C. Zhou, “Experimental investigation of enhancing the subsurface damage threshold of Nd-doped phosphate glass,” Chin. Opt. Lett.6(9), 681–684 (2008). [CrossRef]
A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005). [CrossRef]
X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011). [CrossRef]
M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009). [CrossRef]
Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008). [CrossRef]
L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005). [CrossRef]
W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002). [CrossRef]
H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010). [CrossRef]
H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol and Philadelphia, 2001).
D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009). [CrossRef]
Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007). [CrossRef]

Appl. Surf. Sci.

W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002). [CrossRef]

Chin. Opt. Lett.

Chin. Phys. Lett.

Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007). [CrossRef]

J. Opt. Soc. Am. B

L. Liang, Y. Xu, L. Zhang, Y. Sheng, D. Wu, and Y. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B24(5), 1066–1074 (2007). [CrossRef]

J. Raman Spectrosc.

X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011). [CrossRef]

J. Sol-Gel Sci. Technol.

X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012). [CrossRef]

Mater. Charact.

L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005). [CrossRef]

Mater. Lett.

Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000). [CrossRef]

Opt. Express

X. Dieudonné, K. Vallé, and P. Belleville, “Towards new levels for stacking of sol-gel functional coatings,” Opt. Express19(17), 16356–16364 (2011). [CrossRef] [PubMed]

Opt. Laser Technol.

Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008). [CrossRef]

Phys. Rev. B

H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010). [CrossRef]
A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005). [CrossRef]

Rare Metal Mat. Eng.

H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

Thin Solid Films

D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009). [CrossRef]
M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009). [CrossRef]

Other

H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol and Philadelphia, 2001).
ISO 11254–1.2, “Lasers and laser-related equipment: Determination of laser-induced damage threshold of optical surfaces-Part 1: 1-on-1 test” (2000).

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[1] X. Wang and J. Shen, “A review of contamination-resistant antireflective sol-gel coatings,” J. Sol-Gel Sci. Technol.61(1), 206–212 (2012). [CrossRef]

[2] Q. Zhang, X. Li, J. Shen, G. Wu, J. Wang, and L. Chen, “ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol-gel method,” Mater. Lett.45(6), 311–314 (2000). [CrossRef]

[3] H. Li, H. Xiong, Y. Tang, and L. Hu, “ZrO2/SiO2 Two-Layer Antireflective Coatings by Sol-Gel Process,” Rare Metal Mat. Eng.39, 145–148 (2010).

[4] H. Li, H. Xiong, and Y. Tang, “Study on the laser-induced damage threshold of sol-gel ZrO2-PVP coatings,” Chin. Opt. Lett.8(2), 241–243 (2010). [CrossRef]

[5] X. Dieudonné, K. Vallé, and P. Belleville, “Towards new levels for stacking of sol-gel functional coatings,” Opt. Express19(17), 16356–16364 (2011). [CrossRef] [PubMed]

[6] L. Liang, Y. Xu, L. Zhang, Y. Sheng, D. Wu, and Y. Sun, “Annealing effect on the optical properties and laser-induced damage resistance of solgel-derived ZrO2 films,” J. Opt. Soc. Am. B24(5), 1066–1074 (2007). [CrossRef]

[7] ISO 11254–1.2, “Lasers and laser-related equipment: Determination of laser-induced damage threshold of optical surfaces-Part 1: 1-on-1 test” (2000).

[8] J. Hu, J. Yang, W. Chen, and C. Zhou, “Experimental investigation of enhancing the subsurface damage threshold of Nd-doped phosphate glass,” Chin. Opt. Lett.6(9), 681–684 (2008). [CrossRef]

[9] A. Kuwabara, T. Tohei, T. Yamamoto, and I. Tanaka, “Ab initio lattice dynamics and phase transformations of ZrO2,” Phys. Rev. B71(6), 064301 (2005). [CrossRef]

[10] X. Wang, J. Shen, and Q. Pan, “Raman spectroscopy of sol-gel derived titanium oxide thin films,” J. Raman Spectrosc.42(7), 1578–1582 (2011). [CrossRef]

[11] M. G. Sandoval-Paz and R. Ramírez-Bon, “Analysis of the early growth mechanisms during the chemical deposition of CdS thin films by spectroscopic ellipsometry,” Thin Solid Films517(24), 6747–6752 (2009). [CrossRef]

[12] Y. J. Guo, X. T. Zu, X. D. Jiang, X. D. Yuan, S. Z. Xu, B. Y. Wang, and D. B. Tian, “Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol-gel films,” Opt. Laser Technol.40(5), 677–681 (2008). [CrossRef]

[13] L. F. Cueto, E. Sánchez, L. M. Torres-Martínez, and G. A. Hirata, “On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates,” Mater. Charact.55(4-5), 263–271 (2005). [CrossRef]

[14] W.-C. Liu, D. Wu, A.-D. Li, H.-Q. Ling, Y.-F. Tang, and N.-B. Ming, “Annealing and doping effects on structure and optical properties of sol-gel derived ZrO2 thin films,” Appl. Surf. Sci.191(1-4), 181–187 (2002). [CrossRef]

[15] H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, “Electronic band structure of zirconia and hafnia polymorphs from the GW perspective,” Phys. Rev. B81(8), 085119 (2010). [CrossRef]

[16] H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics Publishing, Bristol and Philadelphia, 2001).

[17] D. Ristau, M. Jupé, and K. Starke, “Laser damage thresholds of optical coatings,” Thin Solid Films518(5), 1607–1613 (2009). [CrossRef]

[18] Y. Jian-Ke, L. Hai-Yuan, F. Zheng-Xiu, T. Yong-Xing, J. Yun-Xia, Z. Yuan-An, H. Hong-Bo, and S. Jian-Da, “Comparison of TiO2 and ZrO2 films deposited by electron-beam evaporation and by sol-gel process,” Chin. Phys. Lett.24(7), 1964–1966 (2007). [CrossRef]

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Improvement on laser-induced damage threshold of sol-gel ZrO2 coatings by crystal structure tuning