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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 22 — Oct. 22, 2012
  • pp: 24977–24986

Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry

Satoshi Matsuyama, Hikaru Yokoyama, Ryosuke Fukui, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Wataru Yashiro, Atsushi Momose, Tetsuya Ishikawa, and Kazuto Yamauchi  »View Author Affiliations

Optics Express, Vol. 20, Issue 22, pp. 24977-24986 (2012)

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Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry based on the Talbot effect and the Fourier transform method was demonstrated in the 1-km-long beamline of SPring-8. 10 keV X-rays were one-dimensionally focused down to 32 nm using a total-reflection elliptical mirror. An intentionally distorted wavefront was generated using a deformable mirror placed just upstream of the focusing mirror. The wavefront measured by interferometry was cross-checked with the phase retrieval method using intensity profiles around the beam waist. Comparison of the obtained wavefront errors revealed that they are in good agreement with each other and with the wavefront error estimated from the shape of the deformable mirror at a ~0.5 rad level.

© 2012 OSA

OCIS Codes
(340.7450) X-ray optics : X-ray interferometry
(340.7470) X-ray optics : X-ray mirrors

ToC Category:
X-ray Optics

Original Manuscript: July 25, 2012
Revised Manuscript: October 11, 2012
Manuscript Accepted: October 11, 2012
Published: October 17, 2012

Satoshi Matsuyama, Hikaru Yokoyama, Ryosuke Fukui, Yoshiki Kohmura, Kenji Tamasaku, Makina Yabashi, Wataru Yashiro, Atsushi Momose, Tetsuya Ishikawa, and Kazuto Yamauchi, "Wavefront measurement for a hard-X-ray nanobeam using single-grating interferometry," Opt. Express 20, 24977-24986 (2012)

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  1. T.-Y. Chen, Y.-T. Chen, C.-L. Wang, I. M. Kempson, W.-K. Lee, Y. S. Chu, Y. Hwu, and G. Margaritondo, “Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm,” Opt. Express19(21), 19919–19924 (2011). [CrossRef] [PubMed]
  2. H. C. Kang, H. Yan, R. P. Winarski, M. V. Holt, J. Maser, C. Liu, R. Conley, S. Vogt, A. T. Macrander, and G. B. Stephenson, “Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens,” Appl. Phys. Lett.92(22), 221114 (2008). [CrossRef]
  3. C. G. Schroer, O. Kurapova, J. Patommel, P. Boye, J. Feldkamp, B. Lengeler, M. Burghammer, C. Riekel, L. Vincze, A. van der Hart, and M. Küchler, “Hard x-ray nanoprobe based on refractive x-ray lenses,” Appl. Phys. Lett.87(12), 124103 (2005). [CrossRef]
  4. H. Mimura, H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Efficient focusing of hard x rays to 25 nm by a total reflection mirror,” Appl. Phys. Lett.90(5), 051903 (2007). [CrossRef]
  5. H. Mimura, S. Handa, T. Kimura, H. Yumoto, D. Yamakawa, H. Yokoyama, S. Matsuyama, K. Inagaki, K. Yamamura, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Breaking the 10 nm barrier in hard-X-ray focusing,” Nat. Phys.6(2), 122–125 (2010). [CrossRef]
  6. T. Kimura, S. Handa, H. Mimura, H. Yumoto, D. Yamakawa, S. Matsuyama, K. Inagaki, Y. Sano, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Wavefront Control System for Phase Compensation in Hard X-ray Optics,” Jpn. J. Appl. Phys.48(7), 072503 (2009). [CrossRef]
  7. M. Idir, P. Mercere, M. H. Modi, G. Dovillaire, X. Levecq, S. Bucourt, L. Escolano, and P. Sauvageot, “X-ray active mirror coupled with a Hartmann wavefront sensor,” Nucl. Instrum. Methods Phys. Res. A616(2-3), 162–171 (2010). [CrossRef]
  8. T. Kimura, H. Mimura, S. Handa, H. Yumoto, H. Yokoyama, S. Imai, S. Matsuyama, Y. Sano, K. Tamasaku, Y. Komura, Y. Nishino, M. Yabashi, T. Ishikawa, and K. Yamauchi, “Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm,” Rev. Sci. Instrum.81(12), 123704 (2010). [CrossRef] [PubMed]
  9. A. Schropp, P. Boye, J. M. Feldkamp, R. Hoppe, J. Patommel, D. Samberg, S. Stephan, K. Giewekemeyer, R. N. Wilke, T. Salditt, J. Gulden, P. Mancuso, I. Vartanyants, E. Weckert, S. Schoder, M. Burghammer, and C. G. Schroer, “Hard x-ray nanobeam characterization by coherent diffraction microscopy,” Appl. Phys. Lett.96(9), 091102 (2010). [CrossRef]
  10. C. M. Kewish, M. Guizar-Sicairos, C. Liu, J. Qian, B. Shi, C. Benson, A. M. Khounsary, J. Vila-Comamala, O. Bunk, J. R. Fienup, A. T. Macrander, and L. Assoufid, “Reconstruction of an astigmatic hard X-ray beam and alignment of K-B mirrors from ptychographic coherent diffraction data,” Opt. Express18(22), 23420–23427 (2010). [CrossRef] [PubMed]
  11. A. Momose, S. Kawamoto, I. Koyama, Y. Hamaishi, K. Takai, and Y. Suzuki, “Demonstration of X-ray Talbot interferometry,” Jpn. J. Appl. Phys.42(Part 2, No. 7B), L866–L868 (2003). [CrossRef]
  12. Y. Takeda, W. Yashiro, Y. Suzuki, S. Aoki, T. Hattori, and A. Momose, “X-ray phase imaging with single phase grating,” Jpn. J. Appl. Phys.46(3), L89–L91 (2007). [CrossRef]
  13. H. F. Talbot, “Facts relating to optical science,” Philos. Mag.9, 401–407 (1836).
  14. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am.72(1), 156–160 (1982). [CrossRef]
  15. M. Takeda and S. Kobayashi, “Lateral aberration measurements with a digital Talbot interferometer,” Appl. Opt.23(11), 1760–1764 (1984). [CrossRef] [PubMed]
  16. T. Weitkamp, B. Nohammer, A. Diaz, C. David, and E. Ziegler, “X-ray wavefront analysis and optics characterization with a grating interferometer,” Appl. Phys. Lett.86(5), 054101 (2005). [CrossRef]
  17. A. Diaz, C. Mocuta, J. Stangl, M. Keplinger, T. Weitkamp, F. Pfeiffer, C. David, T. H. Metzger, and G. Bauer, “Coherence and wavefront characterization of Si-111 monochromators using double-grating interferometry,” J. Synchrotron Radiat.17(3), 299–307 (2010). [CrossRef] [PubMed]
  18. H. Wang, K. Sawhney, S. Berujon, E. Ziegler, S. Rutishauser, and C. David, “X-ray wavefront characterization using a rotating shearing interferometer technique,” Opt. Express19(17), 16550–16559 (2011). [CrossRef] [PubMed]
  19. S. Rutishauser, I. Zanette, T. Weitkamp, T. Donath, and C. David, “At-wavelength characterization of refractive x-ray lenses using a two-dimensional grating interferometer,” Appl. Phys. Lett.99(22), 221104 (2011). [CrossRef]
  20. S. Yuan, K. Goldberg, V. V. Yashchuk, R. Celestre, W. R. McKinney, G. Morrison, J. Macdougall, I. Mochi, and T. Warwick, “Cross-check of ex-situ and in-situ metrology of a bendable temperature stabilized KB mirror,” Nucl. Instrum. Methods Phys. Res. A635(1), S58–S63 (2011). [CrossRef]
  21. S. Rutishauser, L. Samoylova, J. Krzywinski, O. Bunk, J. Grünert, H. Sinn, M. Cammarata, D. M. Fritz, and C. David, “Exploring the wavefront of hard X-ray free-electron laser radiation,” Nat Commun3, 947 (2012). [CrossRef] [PubMed]
  22. C. David, B. Nohammer, H. H. Solak, and E. Ziegler, “Differential x-ray phase contrast imaging using a shearing interferometer,” Appl. Phys. Lett.81(17), 3287–3289 (2002). [CrossRef]
  23. T. Weitkamp, A. Diaz, C. David, F. Pfeiffer, M. Stampanoni, P. Cloetens, and E. Ziegler, “X-ray phase imaging with a grating interferometer,” Opt. Express13(16), 6296–6304 (2005). [CrossRef] [PubMed]
  24. A. Momose, W. Yashiro, Y. Takeda, Y. Suzuki, and T. Hattori, “Phase tomography by X-ray Talbot interferometry for biological imaging,” Jpn. J. Appl. Phys.45(6A), 5254–5262 (2006). [CrossRef]
  25. M. Engelhardt, J. Baumann, M. Schuster, C. Kottler, F. Pfeiffer, O. Bunk, and C. David, “High-resolution differential phase contrast imaging using a magnifying projection geometry with a microfocus x-ray source,” Appl. Phys. Lett.90(22), 224101 (2007). [CrossRef]
  26. W. Yashiro, Y. Takeda, A. Takeuchi, Y. Suzuki, and A. Momose, “Hard-X-ray phase-difference microscopy using a Fresnel zone plate and a transmission grating,” Phys. Rev. Lett.103(18), 180801 (2009). [CrossRef]
  27. T. Ishikawa, H. Aoyagi, T. Asaka, Y. Asano, N. Azumi, T. Bizen, H. Ego, K. Fukami, T. Fukui, Y. Furukawa, S. Goto, H. Hanaki, T. Hara, T. Hasegawa, T. Hatsui, A. Higashiya, T. Hirono, N. Hosoda, M. Ishii, T. Inagaki, Y. Inubushi, T. Itoga, Y. Joti, M. Kago, T. Kameshima, H. Kimura, Y. Kirihara, A. Kiyomichi, T. Kobayashi, C. Kondo, T. Kudo, H. Maesaka, X. M. Maréchal, T. Masuda, S. Matsubara, T. Matsumoto, T. Matsushita, S. Matsui, M. Nagasono, N. Nariyama, H. Ohashi, T. Ohata, T. Ohshima, S. Ono, Y. Otake, C. Saji, T. Sakurai, T. Sato, K. Sawada, T. Seike, K. Shirasawa, T. Sugimoto, S. Suzuki, S. Takahashi, H. Takebe, K. Takeshita, K. Tamasaku, H. Tanaka, R. Tanaka, T. Tanaka, T. Togashi, K. Togawa, A. Tokuhisa, H. Tomizawa, K. Tono, S. Wu, M. Yabashi, M. Yamaga, A. Yamashita, K. Yanagida, C. Zhang, T. Shintake, H. Kitamura, and N. Kumagai, “A compact X-ray free-electron laser emitting in the sub-ångström region,” Nat. Photonics6(8), 540–544 (2012). [CrossRef]
  28. P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F.-J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H.-D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an ångstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
  29. K. Tamasaku, Y. Tanaka, M. Yabashi, H. Yamazaki, N. Kawamura, M. Suzuki, and T. Ishikawa, “SPring-8 RIKEN beamline III for coherent X-ray optics,” Nucl. Instrum. Methods Phys. Res. A467–468, 686–689 (2001). [CrossRef]
  30. W. Yashiro, Y. Takeda, and A. Momose, “Efficiency of capturing a phase image using cone-beam x-ray Talbot interferometry,” J. Opt. Soc. Am. A25(8), 2025–2039 (2008). [CrossRef] [PubMed]
  31. G. R. Brady and J. R. Fienup, “Nonlinear optimization algorithm for retrieving the full complex pupil function,” Opt. Express14(2), 474–486 (2006). [CrossRef] [PubMed]
  32. H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi, “Direct determination of the wave field of an x-ray nanobeam,” Phys. Rev. A77(1), 015812 (2008). [CrossRef]
  33. K. Yamauchi, H. Mimura, K. Inagaki, and Y. Mori, “Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining,” Rev. Sci. Instrum.73(11), 4028–4033 (2002). [CrossRef]
  34. K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, and Y. Mori, “Microstitching interferometry for x-ray reflective optics,” Rev. Sci. Instrum.74(5), 2894–2898 (2003). [CrossRef]
  35. H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa, and K. Yamauchi, “Relative angle determinable stitching interferometry for hard x-ray reflective optics,” Rev. Sci. Instrum.76(4), 045102 (2005). [CrossRef]
  36. K. Sugisaki, M. Okada, K. Otaki, Y. Zhu, Y. Ichikawa, K. Murakami, C. Ouchi, K. Naoki, K. Seima, M. Hasegawa, and T. Honda, “Wavefront evaluation for 6-mirror projection optics with EUV wavefront metrology system,” http://www.sematech.org/meetings/archives/litho/8939/pres/ML-P02.pdf

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