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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 23 — Nov. 5, 2012
  • pp: 25267–25274

Optical characterization of fully programmable MEMS diffraction gratings

F. Zamkotsian, B. Timotijevic, R. Lockhart, R. P. Stanley, P. Lanzoni, M. Luetzelschwab, M. Canonica, W. Noell, and M. Tormen  »View Author Affiliations

Optics Express, Vol. 20, Issue 23, pp. 25267-25274 (2012)

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We have fabricated and characterized fully programmable diffraction gratings consisting of 64 silicon micro-mirrors. The mirrors are 700µm long and 50µm wide with a fill factor of 90%. They are actuated electrostatically and move down by 1.25μm while showing negligible cross-talk and bowing as small as 0.14μm over 700μm. Extinction ratio up to 100 has been achieved by adjusting only 3 adjacent micro-mirrors. The gratings could operate either as light modulators up to 5μm or spectra generators up to 2.5μm.

© 2012 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(230.3990) Optical devices : Micro-optical devices

ToC Category:
Optical Devices

Original Manuscript: August 7, 2012
Revised Manuscript: October 5, 2012
Manuscript Accepted: October 5, 2012
Published: October 22, 2012

F. Zamkotsian, B. Timotijevic, R. Lockhart, R. P. Stanley, P. Lanzoni, M. Luetzelschwab, M. Canonica, W. Noell, and M. Tormen, "Optical characterization of fully programmable MEMS diffraction gratings," Opt. Express 20, 25267-25274 (2012)

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