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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 24 — Nov. 19, 2012
  • pp: 27003–27017

A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Chung-De Chen, Yu-Jen Wang, and Pin Chang  »View Author Affiliations

Optics Express, Vol. 20, Issue 24, pp. 27003-27017 (2012)

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This study presents a novel design for a two-axis scanning device driven by lead-zirconate-titanate (PZT) ceramic. The proposed device consists of a scanning mirror and a Y-shaped piezoelectric actuator. The scanning mirror was fabricated using an MEMS process involving three masks. Experimental results show that the fast and slow frequencies at resonance are 25.0 kHz and 0.56 kHz, respectively. The optical scanning angles are 27.6° and 39.9°. The power consumption of the device is 13.4 mW at a driving voltage of 10 V. This study also develops a laser projection module integrated with the scanning device. The module can project a 2-D image at a resolution of 640 x 480.

© 2012 OSA

OCIS Codes
(120.5800) Instrumentation, measurement, and metrology : Scanners
(230.4000) Optical devices : Microstructure fabrication
(230.4040) Optical devices : Mirrors
(230.4685) Optical devices : Optical microelectromechanical devices

ToC Category:
Optical Devices

Original Manuscript: August 14, 2012
Revised Manuscript: October 27, 2012
Manuscript Accepted: October 28, 2012
Published: November 15, 2012

Chung-De Chen, Yu-Jen Wang, and Pin Chang, "A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection," Opt. Express 20, 27003-27017 (2012)

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