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GeSn/Ge heterostructure short-wave infrared photodetectors on siliconA. Gassenq, F. Gencarelli, J. Van Campenhout, Y. Shimura, R. Loo, G. Narcy, B. Vincent, and G. Roelkens »View Author Affiliations
A. Gassenq,1,2,*
F. Gencarelli,3
J. Van Campenhout,3
Y. Shimura,3
R. Loo,3
G. Narcy,4
B. Vincent,3
and G. Roelkens1,2
1Photonics Research Group, INTEC Department, Ghent University-IMEC, Sint-Pietersnieuwstraat 41, 9000 Ghent, Belgium 2Center for Nano- and Biophotonics (NB-Photonics), Ghent University, Belgium 3imec, Kapeldreef 75, 3001 Leuven, Belgium 4Institut d’Electronique du Sud (IES), UMR 5214, Université Montpellier 2 - CNRS, F-34095 Montpellier cedex 5, France *Corresponding author: alban.gassenq@intec.ugent.be |
Optics Express, Vol. 20, Issue 25, pp. 27297-27303 (2012)
http://dx.doi.org/10.1364/OE.20.027297
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Abstract
A surface-illuminated photoconductive detector based on Ge0.91Sn0.09 quantum wells with Ge barriers grown on a silicon substrate is demonstrated. Photodetection up to 2.2µm is achieved with a responsivity of 0.1 A/W for 5V bias. The spectral absorption characteristics are analyzed as a function of the GeSn/Ge heterostructure parameters. This work demonstrates that GeSn/Ge heterostructures can be used to developed SOI waveguide integrated photodetectors for short-wave infrared applications.
© 2012 OSA
OCIS Codes
(040.0040) Detectors : Detectors
(040.3060) Detectors : Infrared
(130.0130) Integrated optics : Integrated optics
ToC Category:
Detectors
History
Original Manuscript: August 28, 2012
Revised Manuscript: October 10, 2012
Manuscript Accepted: November 9, 2012
Published: November 20, 2012
Citation
A. Gassenq, F. Gencarelli, J. Van Campenhout, Y. Shimura, R. Loo, G. Narcy, B. Vincent, and G. Roelkens, "GeSn/Ge heterostructure short-wave infrared photodetectors on silicon," Opt. Express 20, 27297-27303 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-25-27297
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References
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- G. E. Chang, S. W. Chang, and S. L. Chuang, “Strain-Balanced GezSn1−z–SixGeySn1−x−y Multiple-Quantum-Well Lasers,” IEEE J. Quantum Electron.46(12), 1813–1820 (2010). [CrossRef]
- G. E. Chang, S. W. Chang, and S. L. Chuang, “Strain-Balanced GezSn1−z–SixGeySn1−x−y Multiple-Quantum-Well Lasers,” IEEE J. Quantum Electron.46(12), 1813–1820 (2010). [CrossRef]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
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- G. E. Chang, S. W. Chang, and S. L. Chuang, “Strain-Balanced GezSn1−z–SixGeySn1−x−y Multiple-Quantum-Well Lasers,” IEEE J. Quantum Electron.46(12), 1813–1820 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
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- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- J. Zeng and L. Hanssen, “Calibration of the spectral radiant power responsivity of windowed pyroelectric radiometers from 785 nm to 14 μm,” Proc. SPIE7082, 70820Y (2008). [CrossRef]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- G. He and H. A. Atwater, “Interband Transitions in SnxGe1-x Alloys,” Phys. Rev. Lett.79(10), 1937–1940 (1997). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer heterostructures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer hetero-structures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- M. Krijn, “Heterojunction band offsets and effective masses in III-V quaternary alloys,” Semicond. Sci. Technol.6(1), 27–31 (1991). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer heterostructures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer hetero-structures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, G. Roelkens, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express20(11), 11665–11672 (2012). [CrossRef] [PubMed]
- A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, G. Roelkens, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express20(11), 11665–11672 (2012). [CrossRef] [PubMed]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- C. G. Van de Walle, “Band lineups and deformation in the model-solid theory,” Phys. Rev. B39(3), 1871–1883 (1989). [CrossRef]
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- J. Zeng and L. Hanssen, “Calibration of the spectral radiant power responsivity of windowed pyroelectric radiometers from 785 nm to 14 μm,” Proc. SPIE7082, 70820Y (2008). [CrossRef]
AIP Conf. Proc.
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
Appl. Phys. Lett.
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer hetero-structures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer heterostructures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
ECS Trans.
- F. Gencarelli, B. Vincent, J. Demeulemeester, A. Vantomme, A. Moussa, A. Franquet, A. Kumara, J. Meersschaut, W. Vandervorst, R. Loo, M. Caymax, K. Temst, and M. Heyns, “Crystalline Properties and Strain Relaxation Mechanism of CVD Grown GeSn,” ECS Trans. (to be published).
IEEE J. Quantum Electron.
- G. E. Chang, S. W. Chang, and S. L. Chuang, “Strain-Balanced GezSn1−z–SixGeySn1−x−y Multiple-Quantum-Well Lasers,” IEEE J. Quantum Electron.46(12), 1813–1820 (2010). [CrossRef]
J. Appl. Phys.
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
J. Cryst. Growth
- E. Monroy, F. Calle, J. L. Pau, E. Munoz, F. Omnes, B. Beaumont, and P. Gibart, “AlGaN-based UV photodetectors,” J. Cryst. Growth230(3–4), 537–543 (2001). [CrossRef]
J. Vac. Sci. Technol. B
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
Nano Lett.
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
Opt. Express
- A. Gassenq, N. Hattasan, L. Cerutti, J. B. Rodriguez, E. Tournié, G. Roelkens, and G. Roelkens, “Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip,” Opt. Express20(11), 11665–11672 (2012). [CrossRef] [PubMed]
- L. Vivien, A. Polzer, D. Marris-Morini, J. Osmond, J. M. Hartmann, P. Crozat, E. Cassan, C. Kopp, H. Zimmermann, and J. M. Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express20(2), 1096–1101 (2012). [CrossRef] [PubMed]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- S. Su, B. Cheng, C. Xue, W. Wang, Q. Cao, H. Xue, W. Hu, G. Zhang, Y. Zuo, and Q. Wang, “GeSn p-i-n photodetector for all telecommunication bands detection,” Opt. Express19(7), 6400–6405 (2011). [CrossRef] [PubMed]
- G. Sun, R. A. Soref, and H. H. Cheng, “Design of a Si-based lattice-matched room-temperature GeSn/GeSiSn multi-quantum-well mid-infrared laser diode,” Opt. Express18(19), 19957–19965 (2010). [CrossRef] [PubMed]
- R. Soref, J. Hendrickson, and J. W. Cleary, “Mid- to long-wavelength infrared plasmonic-photonics using heavily doped n-Ge/Ge and n-GeSn/GeSn heterostructures,” Opt. Express20(4), 3814–3824 (2012). [CrossRef] [PubMed]
Phys. Rev. B
- C. G. Van de Walle, “Band lineups and deformation in the model-solid theory,” Phys. Rev. B39(3), 1871–1883 (1989). [CrossRef]
Phys. Rev. Lett.
- G. He and H. A. Atwater, “Interband Transitions in SnxGe1-x Alloys,” Phys. Rev. Lett.79(10), 1937–1940 (1997). [CrossRef]
Proc. SPIE
- J. Zeng and L. Hanssen, “Calibration of the spectral radiant power responsivity of windowed pyroelectric radiometers from 785 nm to 14 μm,” Proc. SPIE7082, 70820Y (2008). [CrossRef]
Semicond. Sci. Technol.
- M. Krijn, “Heterojunction band offsets and effective masses in III-V quaternary alloys,” Semicond. Sci. Technol.6(1), 27–31 (1991). [CrossRef]
Thin Solid Films
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
Other
- J. G. Crowder, S. D. Smith, A. Vass, and J. Keddie, “Infrared methods for gas detection,” in Mid-Infrared Semiconductor Optoelectronics (Springer, 2006).
- http://www.ioffe.rssi.ru/SVA/NSM/Semicond/Ge/
2012, Gencarelli, Thin Solid Films
- F. Gencarelli, B. Vincent, L. Souriau, O. Richard, W. Vandervorst, R. Loo, M. Caymax, and M. Heyns, “Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6,” Thin Solid Films520(8), 3211–3215 (2012). [CrossRef]
- J. Werner, M. Oehme, A. Schirmer, E. Kasper, and J. Schulze, “Molecular beam epitaxy grown GeSn p-i-n photodetectors integrated on Si,” Thin Solid Films520(8), 3361–3364 (2012). [CrossRef]
- H. Lin, R. Chen, W. Lu, Y. Huo, T. I. Kamins, and J. S. Harris, “Investigation of the direct band gaps in Ge1−xSnx alloys with strain control by photoreflectance spectroscopy,” Appl. Phys. Lett.100(10), 102109 (2012). [CrossRef]
- R. Roucka, J. Mathews, R. T. Beeler, J. Tolle, J. Kouvetakis, and J. Menéndez, “Direct gap electroluminescence from Si/Ge1−ySny p-i-n heterostructure diodes,” Appl. Phys. Lett.98(6), 061109 (2011). [CrossRef]
- B. Vincent, F. Gencarelli, H. Bender, C. Merckling, B. Douhard, D. H. Petersen, O. Hansen, H. H. Henrichsen, J. Meersschaut, W. Vandervorst, M. Heyns, R. Loo, and M. Caymax, “Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition,” Appl. Phys. Lett.99(15), 152103 (2011). [CrossRef]
- R. Roucka, R. Beeler, J. Mathews, M. Y. Ryu, Y. Kee Yeo, J. Menendez, and J. Kouvetakis, “Complementary metal-oxide semiconductor-compatible detector materials with enhanced 1550 nm responsivity via Sn-doping of Ge/Si(100),” J. Appl. Phys.109(10), 103115 (2011). [CrossRef]
- G. E. Chang, S. W. Chang, and S. L. Chuang, “Strain-Balanced GezSn1−z–SixGeySn1−x−y Multiple-Quantum-Well Lasers,” IEEE J. Quantum Electron.46(12), 1813–1820 (2010). [CrossRef]
- J. Mathews, R. T. Beeler, J. Tolle, C. Xu, R. Roucka, J. Kouvetakis, and J. Menéndez, “Direct-gap photoluminescence with tunable emission wavelength in Ge1−ySny alloys on silicon,” Appl. Phys. Lett.97(22), 221912 (2010). [CrossRef]
- C. J. Kim, H. S. Lee, Y. J. Cho, K. Kang, and M. H. Jo, “Diameter-dependent internal gain in ohmic Ge nanowire photodetectors,” Nano Lett.10(6), 2043–2048 (2010). [CrossRef] [PubMed]
- V. R. D’Costa, J. Tolle, J. Xie, J. Menéndez, and J. Kouvetakis, “Transport properties of doped GeSn alloys,” AIP Conf. Proc.1199, 57–58 (2008).
- J. Zeng and L. Hanssen, “Calibration of the spectral radiant power responsivity of windowed pyroelectric radiometers from 785 nm to 14 μm,” Proc. SPIE7082, 70820Y (2008). [CrossRef]
- R. Roucka, J. Xie, J. Kouvetakis, J. Mathews, V. D’Costa, J. Menéndez, J. Tolle, and S.-Q. Yu, “Ge1−ySny photoconductor structures at 1.55 m: From advanced materials to prototype devices,” J. Vac. Sci. Technol. B26(6), 1952–1960 (2008). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer heterostructures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
- J. Menéndez and J. Kouvetakis, “Type-I Ge/Ge1−x−ySixSny strained-layer hetero-structures with a direct Ge Bandgap,” Appl. Phys. Lett.85(7), 1175–1177 (2004). [CrossRef]
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