Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

doi:10.1364/OE.20.027661

Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition

Johann Riemensberger, Klaus Hartinger, Tobias Herr, Victor Brasch, Ronald Holzwarth, and Tobias J. Kippenberg »View Author Affiliations

Optics Express, Vol. 20, Issue 25, pp. 27661-27669 (2012)
http://dx.doi.org/10.1364/OE.20.027661

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Abstract

We demonstrate dispersion engineering of integrated silicon nitride based ring resonators through conformal coating with hafnium dioxide deposited on top of the structures via atomic layer deposition. Both, magnitude and bandwidth of anomalous dispersion can be significantly increased. The results are confirmed by high resolution frequency-comb-assisted-diode-laser spectroscopy and are in very good agreement with the simulated modification of the mode spectrum.

OCIS Codes
(300.6320) Spectroscopy : Spectroscopy, high-resolution
(310.2790) Thin films : Guided waves
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Integrated Optics

History
Original Manuscript: July 26, 2012
Revised Manuscript: November 8, 2012
Manuscript Accepted: November 12, 2012
Published: November 29, 2012

Citation
Johann Riemensberger, Klaus Hartinger, Tobias Herr, Victor Brasch, Ronald Holzwarth, and Tobias J. Kippenberg, "Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition," Opt. Express 20, 27661-27669 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-25-27661

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References

C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt.26, 2621–2624 (1987). [CrossRef] [PubMed]
J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4, 37–40 (2010). [CrossRef]
J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express19, 24090–24101 (2011). [CrossRef] [PubMed]
M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature441, 960–963 (2006). [CrossRef] [PubMed]
C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express15, 5976–5990 (2007). [CrossRef] [PubMed]
T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science332, 555–559 (2011). [CrossRef] [PubMed]
M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express19, 14233–14239 (2011). [CrossRef] [PubMed]
P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett.101, 053903 (2008). [CrossRef]
T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science321, 1335–1337 (2008). [CrossRef] [PubMed]
J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.
F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics5, 770–776 (2011). [CrossRef]
A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics5, 293–296 (2011). [CrossRef]
C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).
P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett.107, 063901 (2011). [CrossRef]
Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett.36, 3398–3400 (2011). [CrossRef] [PubMed]
A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett.36, 2845–2847 (2011). [CrossRef] [PubMed]
T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics6, 480–487 (2012). [CrossRef]
A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express14, 4357–4362 (2006). [CrossRef] [PubMed]
P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics3, 529–533 (2009). [CrossRef]
X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett.33, 2889–2891 (2008). [CrossRef] [PubMed]
T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express19, 11529–11538 (2011). [CrossRef] [PubMed]
A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express17, 11366–11370 (2009). [CrossRef] [PubMed]
V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett.28, 1302–1304 (2003). [CrossRef] [PubMed]
T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett.27, 1669–1671 (2002). [CrossRef]
T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett.100, 103905 (2008). [CrossRef] [PubMed]
A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett.86, 261106 (2005). [CrossRef]
T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express12, 4742–4750 (2004). [CrossRef] [PubMed]
M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech.55, 1209–1218 (2007). [CrossRef]
D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96, 061101 (2010). [CrossRef]
L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express19, 8102–8107 (2011). [CrossRef] [PubMed]

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[1] C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky, and L. E. Katz, “Low loss Si3N4-SiO2 optical waveguides on Si,” Appl. Opt.26, 2621–2624 (1987). [CrossRef] [PubMed]

[2] J. S. Levy, A. Gondarenko, M. A. Foster, A. C. Turner-Foster, A. L. Gaeta, and M. Lipson, “CMOS-compatible multiple-wavelength oscillator for on-chip optical interconnects,” Nat. Photonics4, 37–40 (2010). [CrossRef]

[3] J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express19, 24090–24101 (2011). [CrossRef] [PubMed]

[4] M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, and A. L. Gaeta, “Broad-band optical parametric gain on a silicon photonic chip,” Nature441, 960–963 (2006). [CrossRef] [PubMed]

[5] C. Koos, L. Jacome, C. Poulton, J. Leuthold, and W. Freude, “Nonlinear silicon-on-insulator waveguides for all-optical signal processing,” Opt. Express15, 5976–5990 (2007). [CrossRef] [PubMed]

[6] T. J. Kippenberg, R. Holzwarth, and S. A. Diddams, “Microresonator-based optical frequency combs,” Science332, 555–559 (2011). [CrossRef] [PubMed]

[7] M. A. Foster, J. S. Levy, O. Kuzucu, K. Saha, M. Lipson, and A. L. Gaeta, “Silicon-based monolithic optical frequency comb source,” Opt. Express19, 14233–14239 (2011). [CrossRef] [PubMed]

[8] P. Del‘Haye, O. Arcizet, A. Schliesser, R. Holzwarth, and T. J. Kippenberg, “Full stabilization of a microresonator-based optical frequency comb,” Phys. Rev. Lett.101, 053903 (2008). [CrossRef]

[9] T. Steinmetz, T. Wilken, C. Araujo-Hauck, R. Holzwarth, T. W. Hänsch, L. Pasquini, A. Manescau, S. D’Odorico, M. T. Murphy, T. Kentischer, W. Schmidt, and T. Udem, “Laser frequency combs for astronomical observations,” Science321, 1335–1337 (2008). [CrossRef] [PubMed]

[10] J. Pfeifle, C. Weimann, F. Bach, J. Riemensberger, K. Hartinger, D. Hillerkuss, M. Jordan, R. Holtzwarth, T. J. Kippenberg, J. Leuthold, W. Freude, and C. Koos, “Microresonator-based optical frequency combs for high-bitrate WDM data transmission,” in Optical Fiber Communication Conference (OFC) (Optical Society of America, 2012), paper OW1C.4.

[11] F. Ferdous, H. Miao, D. E. Leaird, K. Srinivasan, J. Wang, L. Chen, L. T. Varghese, and A. M. Weiner, “Spectral line-by-line pulse shaping of on-chip microresonator frequency combs,” Nat. Photonics5, 770–776 (2011). [CrossRef]

[12] A. A. Savchenkov, A. B. Matsko, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Kerr combs with selectable central frequency,” Nat. Photonics5, 293–296 (2011). [CrossRef]

[13] C. Y. Wang, T. Herr, P. Del’Haye, A. Schliesser, J. Hofer, R. Holzwarth, T. W. Hänsch, N. Picque, and T. J. Kippenberg, “Mid-infrared optical frequency combs based on crystalline microresonators,” arXiv:1109.2716 (2011).

[14] P. Del’Haye, T. Herr, E. Gavartin, M. L. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Octave spanning tunable frequency comb from a microresonator,” Phys. Rev. Lett.107, 063901 (2011). [CrossRef]

[15] Y. Okawachi, K. Saha, J. S. Levy, Y. H. Wen, M. Lipson, and A. L. Gaeta, “Octave-spanning frequency comb generation in a silicon nitride chip,” Opt. Lett.36, 3398–3400 (2011). [CrossRef] [PubMed]

[16] A. B. Matsko, A. A. Savchenkov, W. Liang, V. S. Ilchenko, D. Seidel, and L. Maleki, “Mode-locked Kerr frequency combs,” Opt. Lett.36, 2845–2847 (2011). [CrossRef] [PubMed]

[17] T. Herr, K. Hartinger, J. Riemensberger, C. Wang, E. Gavartin, R. Holzwarth, M. L. Gorodetsky, and T. J. Kippenberg, “Universal formation dynamics and noise of Kerr-frequency combs in microresonators,” Nat. Photonics6, 480–487 (2012). [CrossRef]

[18] A. C. Turner, C. Manolatou, B. S. Schmidt, and M. Lipson, “Tailored anomalous group-velocity dispersion in silicon channel waveguides,” Opt. Express14, 4357–4362 (2006). [CrossRef] [PubMed]

[19] P. Del’Haye, O. Arcizet, M. Gorodetsky, R. Holzwarth, and T. J. Kippenberg, “Frequency comb assisted diode laser spectroscopy for measurement of microcavity dispersion,” Nat. Photonics3, 529–533 (2009). [CrossRef]

[20] X. Liu, W. M. J. Green, X. Chen, I.-W. Hsieh, J. I. Dadap, Y. A. Vlasov, and R. M. Osgood, “Conformal dielectric overlayers for engineering dispersion and effective nonlinearity of silicon nanophotonic wires,” Opt. Lett.33, 2889–2891 (2008). [CrossRef] [PubMed]

[21] T. Alasaarela, D. Korn, L. Alloatti, A. Säynätjoki, A. Tervonen, R. Palmer, J. Leuthold, W. Freude, and S. Honkanen, “Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition,” Opt. Express19, 11529–11538 (2011). [CrossRef] [PubMed]

[22] A. Gondarenko, J. S. Levy, and M. Lipson, “High confinement micron-scale silicon nitride high-Q ring resonator,” Opt. Express17, 11366–11370 (2009). [CrossRef] [PubMed]

[23] V. R. Almeida, R. R. Panepucci, and M. Lipson, “Nanotaper for compact mode conversion,” Opt. Lett.28, 1302–1304 (2003). [CrossRef] [PubMed]

[24] T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, “Modal coupling in traveling-wave resonators,” Opt. Lett.27, 1669–1671 (2002). [CrossRef]

[25] T. Carmon, H. G. L. Schwefel, L. Yang, M. Oxborrow, A. D. Stone, and K. J. Vahala, “Static envelope patterns in composite resonances generated by level crossing in optical toroidal microcavities,” Phys. Rev. Lett.100, 103905 (2008). [CrossRef] [PubMed]

[26] A. Chiba, H. Fujiwara, J. I. Hotta, S. Takeuchi, and K. Sasaki, “Fano resonance in a multimode tapered fiber coupled with a microspherical cavity,” Appl. Phys. Lett.86, 261106 (2005). [CrossRef]

[27] T. Carmon, L. Yang, and K. Vahala, “Dynamical thermal behavior and thermal self-stability of microcavities,” Opt. Express12, 4742–4750 (2004). [CrossRef] [PubMed]

[28] M. Oxborrow, “Traceable 2-D finite-element simulation of the whispering-gallery modes of axisymmetric electromagnetic resonators,” IEEE Trans. Microwave Theory Tech.55, 1209–1218 (2007). [CrossRef]

[29] D. T. H. Tan, K. Ikeda, P. C. Sun, and Y. Fainman, “Group velocity dispersion and self phase modulation in silicon nitride waveguides,” Appl. Phys. Lett.96, 061101 (2010). [CrossRef]

[30] L. Zhang, Y. Yue, R G. Beausoleil, and A E. Willner, “Analysis and engineering of chromatic dispersion in silicon waveguide bends and ring resonators,” Opt. Express19, 8102–8107 (2011). [CrossRef] [PubMed]

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Dispersion engineering of thick high-Q silicon nitride ring-resonators via atomic layer deposition