OSA's Digital Library

Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 26 — Dec. 10, 2012
  • pp: B238–B243

Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus  »View Author Affiliations

Optics Express, Vol. 20, Issue 26, pp. B238-B243 (2012)

View Full Text Article

Enhanced HTML    Acrobat PDF (936 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A highly efficient grating structure for the coupling between standard optical fibers and single-mode waveguides in the silicon-on-insulator platform realized in a CMOS fabrication process is presented. The cost-effective method introduces a backside metal mirror to the grating coupler without need of an extensive wafer-to-wafer bonding. A coupling efficiency of −1.6 dB (around 69%) near the telecommunication wavelength 1550 nm and a large 1dB-bandwidth of 48 nm are achieved.

© 2012 OSA

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(130.0130) Integrated optics : Integrated optics

ToC Category:
Waveguide and Optoelectronic Devices

Original Manuscript: September 5, 2012
Revised Manuscript: October 9, 2012
Manuscript Accepted: October 9, 2012
Published: November 29, 2012

Virtual Issues
European Conference on Optical Communication 2012 (2012) Optics Express

Wissem Sfar Zaoui, María Félix Rosa, Wolfgang Vogel, Manfred Berroth, Jörg Butschke, and Florian Letzkus, "Cost-effective CMOS-compatible grating couplers with backside metal mirror and 69% coupling efficiency," Opt. Express 20, B238-B243 (2012)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. Taillaert, P. Bienstman, and R. Baets, “Compact efficient broadband grating coupler for silicon-on-insulator waveguides,” Opt. Lett.29(23), 2749–2751 (2004). [CrossRef] [PubMed]
  2. D. Taillaert, H. Chong, P. I. Borel, L. H. Frandsen, R. M. De La Rue, and R. Baets, “A compact two-dimensional grating coupler used as a polarization splitter,” IEEE Photon. Technol. Lett.15(9), 1249–1251 (2003). [CrossRef]
  3. Z. Wang, Y. Tang, L. Wosinski, and S. He, “Experimental demonstration of a high efficiency polarization splitter based on a one-dimensional grating with a Bragg reflector underneath,” IEEE Photon. Technol. Lett.22(21), 1568–1570 (2010). [CrossRef]
  4. D. Taillaert, F. Van Laere, M. Ayre, W. Bogaets, D. Van Thourhout, P. Bienstman, and R. Baets, “Grating couplers for coupling between optical fibers and nanophotonic waveguides,” Jpn. J. Appl. Phys.45(8A), 6071–6077 (2006). [CrossRef]
  5. S. K. Selvaraja, D. Vermeulen, M. Schaekers, E. Sleeckx, W. Bogaerts, G. Roelkens, P. Dumon, D. Van Thourhout, and R. Baets, “Highly efficient grating coupler between optical fiber and silicon photonic circuit,” in Conference on Lasers and Electro-Optics, Baltimore, Maryland, CTuC6 (2009).
  6. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Kraus, and R. Baets, “Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides,” J. Lightwave Technol.25(1), 151–156 (2007). [CrossRef]
  7. C. Kopp, E. Augendre, R. Orobtchouk, O. Lemonnier, and J. M. Fedeli, “Enhanced fiber grating coupler integrated by wafer-to-wafer bonding,” J. Lightwave Technol.29(12), 1847–1851 (2011). [CrossRef]
  8. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, and G. Roelkens, “High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform,” Opt. Express18(17), 18278–18283 (2010). [CrossRef] [PubMed]
  9. http://www.rsoftdesign.com/
  10. Patent pending.
  11. http://www.soitec.com/
  12. J. Butschke, A. Ehrmann, B. Höfflinger, M. Irmscher, R. Käsmaier, F. Letzkus, H. Löschner, J. Mathuni, C. Reuter, C. Schomburg, and R. Springer, “SOI wafer flow process for stencil mask fabrication,” Micr. Eng.46(1-4), 473–476 (1999). [CrossRef]
  13. http://www.cargille.com/

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited