The property of a thin silicon membrane with periodic air slits of definite depth and width to exhibit under normal incidence a close to 100% ultra-narrow band reflection peak is demonstrated experimentally in the terahertz frequency range on a single-crystal silicon grid fabricated by submillimeter microsystem technology. An analysis based on the true modes supported by the grid reveals the nature of such resonances and permits to sort out those exhibiting ultra-narrow band.

© 2012 OSA

1. T. F. Krauss and R. M. De La Rue, “Photonic crystals in the optical regime - past, present, future,” Prog. Quantum Electron.23(2), 51–96 (1999). [CrossRef]
2. T. C. Kleckner, D. Modotto, A. Locatelli, J. P. Mondia, S. Linden, R. Morandotti, C. De Angelis, C. R. Stanley, H. M. van Driel, and J. S. Aitchison, “Design, fabrication, and characterization of deep-etched waveguide gratings,” J. Lightwave Technol.23(11), 3832–3842 (2005). [CrossRef]
3. P. Viktorovitch, B. Ben Bakir, S. Boutami, J. L. Leclercq, X. Letartre, P. Rojo-Romeo, C. Seassal, M. Zussy, L. Di Cioccio, and J. M. Fedeli, “3D harnessing of light with 2.5D photonic crystals,” Laser Photon. Rev.4(3), 401–413 (2010). [CrossRef]
4. T. Tamir and S. T. Peng, “Analysis and design of grating couplers,” Appl. Phys. (Berl.)14(3), 235–254 (1977). [CrossRef]
5. I. A. Avrutsky, A. S. Svakhin, V. A. Sychugov, and O. Parriaux, “High-efficiency single-order waveguide grating coupler,” Opt. Lett.15(24), 1446–1448 (1990). [CrossRef] [PubMed]
6. G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985). [CrossRef]
7. S. Tibuleac and R. Magnusson, “Reflection and transmission guided-mode resonance filters,” J. Opt. Soc. Am. A14(7), 1617–1626 (1997). [CrossRef]
8. D. K. Jacob, S. C. Dunn, and M. G. Moharam, “Normally incident resonant grating reflection filters for efficient narrow-band spectral filtering of finite beams,” J. Opt. Soc. Am. A18(9), 2109–2120 (2001). [CrossRef] [PubMed]
9. E. Bonnet, X. Letartre, A. Cachard, A. V. Tishchenko, and O. Parriaux, “High resonant reflection of a confined free space beam by a high contrast segmented waveguide,” Opt. Quantum Electron.35(11), 1025–1036 (2003). [CrossRef]
10. C. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol.26(1), 014043 (2011). [CrossRef]
11. P. Lalanne, J. Hugonin, and P. Chavel, “Optical properties of deep lamellar gratings: a coupled Bloch-mode insight,” J. Lightwave Technol.24(6), 2442–2449 (2006). [CrossRef]
12. E. Bonnet, A. Cachard, A. V. Tishchenko, and O. Parriaux, “Scaling rules for the design of a narrow grating filter at the focus of a free space beam,” Proc. SPIE5450, 217–222 (2004). [CrossRef]
13. E. Bonnet, A. Cachard, A. V. Tishchenko, O. Parriaux, F. Garet, J.-L. Coutaz, and G. A. Racine, “Resonant grating effects at terahertz frequencies,” Proc. SPIE5466, 80–89 (2004). [CrossRef]
14. V. Karagodsky, C. Chase, and C. J. Chang-Hasnain, “Matrix Fabry-Perot resonance mechanism in high-contrast gratings,” Opt. Lett.36(9), 1704–1706 (2011). [CrossRef] [PubMed]
15. L. C. Botten, T. P. White, A. A. Asatryan, T. N. Langtry, C. M. de Sterke, and R. C. McPhedran, “Bloch mode scattering matrix methods for modeling extended photonic crystal structures. I. Theory,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys.70(5), 056606 (2004). [CrossRef] [PubMed]
16. T. Kämpfe, A. Tishchenko, and O. Parriaux, “Modal representation and normalized scaling rules for ultra narrow-band reflection from a 1D binary corrugation,” 8th EOS Topical Meeting on Diffractive Optics, paper 4861, (2012).
17. D. Gallagher, Photon Design, private communication.
18. J. Inoue, T. Majima, K. Hatanaka, K. Kintaka, K. Nishio, Y. Awatsuji, and S. Ura, “Aperture miniaturization of guided-mode resonance filter by cavity resonator integration,” Appl. Phys. Express5(2), 022201 (2012). [CrossRef]
19. MCGrating by Nikolay Lyndin, http://www.mcgrating.com
20. C. Chang, Y.-F. Wang, Y. Kanamori, J.-J. Shih, Y. Kawai, C.-K. Lee, K.-C. Wu, and M. Esashi, “Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures,” J. Micromech. Microeng.15(3), 580–585 (2005). [CrossRef]
21. L. Duvillaret, F. Garet, and J. Coutaz, “A reliable method for extraction of material parameters in terahertz time-domain spectroscopy,” IEEE J. Sel. Top. Quantum Electron.2(3), 739–746 (1996). [CrossRef]
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23. S. Wang, F. Garet, K. Blary, C. Croenne, E. Lheurette, J.-L. Coutaz, and D. Lippens, “Composite left/right-handed stacked hole arrays at sub-millimeter wavelengths,” J. Appl. Phys.107, 0745101–0745106 (2010).
24. A. V. Tishchenko, “Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method,” Opt. Quantum Electron.37(1-3), 309–330 (2005). [CrossRef]

Appl. Opt.

• J.-F. Roux, F. Aquistapace, F. Garet, L. Duvillaret, and J.-L. Coutaz, “Grating-assisted coupling of terahertz waves into a dielectric waveguide studied by terahertz time-domain spectroscopy,” Appl. Opt.41(30), 6507–6513 (2002). [CrossRef] [PubMed]

Appl. Phys. (Berl.)

• T. Tamir and S. T. Peng, “Analysis and design of grating couplers,” Appl. Phys. (Berl.)14(3), 235–254 (1977). [CrossRef]

Appl. Phys. Express

• J. Inoue, T. Majima, K. Hatanaka, K. Kintaka, K. Nishio, Y. Awatsuji, and S. Ura, “Aperture miniaturization of guided-mode resonance filter by cavity resonator integration,” Appl. Phys. Express5(2), 022201 (2012). [CrossRef]

IEEE J. Sel. Top. Quantum Electron.

• L. Duvillaret, F. Garet, and J. Coutaz, “A reliable method for extraction of material parameters in terahertz time-domain spectroscopy,” IEEE J. Sel. Top. Quantum Electron.2(3), 739–746 (1996). [CrossRef]

J. Appl. Phys.

• S. Wang, F. Garet, K. Blary, C. Croenne, E. Lheurette, J.-L. Coutaz, and D. Lippens, “Composite left/right-handed stacked hole arrays at sub-millimeter wavelengths,” J. Appl. Phys.107, 0745101–0745106 (2010).

J. Lightwave Technol.

• P. Lalanne, J. Hugonin, and P. Chavel, “Optical properties of deep lamellar gratings: a coupled Bloch-mode insight,” J. Lightwave Technol.24(6), 2442–2449 (2006). [CrossRef]
• T. C. Kleckner, D. Modotto, A. Locatelli, J. P. Mondia, S. Linden, R. Morandotti, C. De Angelis, C. R. Stanley, H. M. van Driel, and J. S. Aitchison, “Design, fabrication, and characterization of deep-etched waveguide gratings,” J. Lightwave Technol.23(11), 3832–3842 (2005). [CrossRef]

J. Micromech. Microeng.

• C. Chang, Y.-F. Wang, Y. Kanamori, J.-J. Shih, Y. Kawai, C.-K. Lee, K.-C. Wu, and M. Esashi, “Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures,” J. Micromech. Microeng.15(3), 580–585 (2005). [CrossRef]

J. Opt. Soc. Am. A

• S. Tibuleac and R. Magnusson, “Reflection and transmission guided-mode resonance filters,” J. Opt. Soc. Am. A14(7), 1617–1626 (1997). [CrossRef]
• D. K. Jacob, S. C. Dunn, and M. G. Moharam, “Normally incident resonant grating reflection filters for efficient narrow-band spectral filtering of finite beams,” J. Opt. Soc. Am. A18(9), 2109–2120 (2001). [CrossRef] [PubMed]

Laser Photon. Rev.

• P. Viktorovitch, B. Ben Bakir, S. Boutami, J. L. Leclercq, X. Letartre, P. Rojo-Romeo, C. Seassal, M. Zussy, L. Di Cioccio, and J. M. Fedeli, “3D harnessing of light with 2.5D photonic crystals,” Laser Photon. Rev.4(3), 401–413 (2010). [CrossRef]

Opt. Lett.

• I. A. Avrutsky, A. S. Svakhin, V. A. Sychugov, and O. Parriaux, “High-efficiency single-order waveguide grating coupler,” Opt. Lett.15(24), 1446–1448 (1990). [CrossRef] [PubMed]
• V. Karagodsky, C. Chase, and C. J. Chang-Hasnain, “Matrix Fabry-Perot resonance mechanism in high-contrast gratings,” Opt. Lett.36(9), 1704–1706 (2011). [CrossRef] [PubMed]

Opt. Quantum Electron.

• E. Bonnet, X. Letartre, A. Cachard, A. V. Tishchenko, and O. Parriaux, “High resonant reflection of a confined free space beam by a high contrast segmented waveguide,” Opt. Quantum Electron.35(11), 1025–1036 (2003). [CrossRef]
• A. V. Tishchenko, “Phenomenological representation of deep and high contrast lamellar gratings by means of the modal method,” Opt. Quantum Electron.37(1-3), 309–330 (2005). [CrossRef]

Phys. Rev. E Stat. Nonlin. Soft Matter Phys.

• L. C. Botten, T. P. White, A. A. Asatryan, T. N. Langtry, C. M. de Sterke, and R. C. McPhedran, “Bloch mode scattering matrix methods for modeling extended photonic crystal structures. I. Theory,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys.70(5), 056606 (2004). [CrossRef] [PubMed]

Proc. SPIE

• E. Bonnet, A. Cachard, A. V. Tishchenko, and O. Parriaux, “Scaling rules for the design of a narrow grating filter at the focus of a free space beam,” Proc. SPIE5450, 217–222 (2004). [CrossRef]
• E. Bonnet, A. Cachard, A. V. Tishchenko, O. Parriaux, F. Garet, J.-L. Coutaz, and G. A. Racine, “Resonant grating effects at terahertz frequencies,” Proc. SPIE5466, 80–89 (2004). [CrossRef]

Prog. Quantum Electron.

• T. F. Krauss and R. M. De La Rue, “Photonic crystals in the optical regime - past, present, future,” Prog. Quantum Electron.23(2), 51–96 (1999). [CrossRef]

Semicond. Sci. Technol.

• C. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol.26(1), 014043 (2011). [CrossRef]

Sov. J. Quantum Electron.

• G. A. Golubenko, A. S. Svakhin, V. A. Sychugov, and A. V. Tishchenko, “Total reflection of light from a corrugated surface of a dielectric waveguide,” Sov. J. Quantum Electron.15(7), 886–887 (1985). [CrossRef]

Other

• MCGrating by Nikolay Lyndin, http://www.mcgrating.com
• T. Kämpfe, A. Tishchenko, and O. Parriaux, “Modal representation and normalized scaling rules for ultra narrow-band reflection from a 1D binary corrugation,” 8th EOS Topical Meeting on Diffractive Optics, paper 4861, (2012).
• D. Gallagher, Photon Design, private communication.

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