High-quality LiNbO<sub>3</sub> microdisk resonators by undercut etching and surface tension reshaping

doi:10.1364/OE.20.028119

High-quality LiNbO₃ microdisk resonators by undercut etching and surface tension reshaping

Tzyy-Jiann Wang, Jheng-Yu He, Cheng-An Lee, and Huan Niu »View Author Affiliations

Optics Express, Vol. 20, Issue 27, pp. 28119-28124 (2012)
http://dx.doi.org/10.1364/OE.20.028119

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Abstract

We report ultra-smooth LiNbO₃ microdisk resonators fabricated by selective ion implantation, chemical etching, and thermal treatment. The undercut microdisk structure is produced by chemically etching the buried lattice damage layer formed by selective ion implantation. By thermal treatment, surface tension smoothes and reshapes microdisk surface topography. The resonant characteristics of microdisk resonators are simulated by finite element method and are well consistent with the experimental results. The 20μm-diameter microdisk resonator has the FSR of 16.43nm and the Q factor of 2.60 × 10⁴. The produced LiNbO₃ microdisk resonators can be utilized in new microdisk applications with electro-optic and nonlinear-optic effects.

OCIS Codes
(130.3730) Integrated optics : Lithium niobate
(230.3120) Optical devices : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

History
Original Manuscript: October 10, 2012
Revised Manuscript: November 21, 2012
Manuscript Accepted: November 23, 2012
Published: December 4, 2012

Citation
Tzyy-Jiann Wang, Jheng-Yu He, Cheng-An Lee, and Huan Niu, "High-quality LiNbO₃ microdisk resonators by undercut etching and surface tension reshaping," Opt. Express 20, 28119-28124 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-27-28119

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References

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