25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions

doi:10.1364/OE.20.002507

25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions

Xi Xiao, Hao Xu, Xianyao Li, Yingtao Hu, Kang Xiong, Zhiyong Li, Tao Chu, Yude Yu, and Jinzhong Yu »View Author Affiliations

Optics Express, Vol. 20, Issue 3, pp. 2507-2515 (2012)
http://dx.doi.org/10.1364/OE.20.002507

View Full Text Article

Enhanced HTML Acrobat PDF (2054 KB)

Journal Search
Article Lookup

Article Tools

Citations

Alert me when this article is cited
Export Citation/Save

Abstract
Article Info
References (37)
Cited By
Figures (8)
Metrics
Related Content

Abstract

A high-speed depletion-mode silicon-based microring modulator with interleaved PN junctions optimized for high modulation efficiency and large alignment tolerance is demonstrated. It is fabricated using standard 0.18 μm complementary metal–oxide–semiconductor processes and provides low V_πL_πs of 0.68 V·cm to 1.64 V·cm with a moderate doping concentration of 2 × 10¹⁷ cm⁻³. The measured modulation efficiency decreases by only 12.4% under ± 150 nm alignment errors. 25 Gbit/s non-return-zero modulation with a 4.5 dB extinction ratio is experimentally realized at a peak-to-peak driving voltage of 2 V, demonstrating the excellent performance of the novel doping profile.

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.0250) Integrated optics : Optoelectronics
(130.4110) Integrated optics : Modulators

ToC Category:
Integrated Optics

History
Original Manuscript: November 22, 2011
Revised Manuscript: January 5, 2012
Manuscript Accepted: January 5, 2012
Published: January 19, 2012

Citation
Xi Xiao, Hao Xu, Xianyao Li, Yingtao Hu, Kang Xiong, Zhiyong Li, Tao Chu, Yude Yu, and Jinzhong Yu, "25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions," Opt. Express 20, 2507-2515 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-3-2507

Sort: Author | Year | Journal | Reset

References

R. A. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006). [CrossRef]
G. T. Reed, Silicon Photonics: The State of the Art (Wiley, 2008).
D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000). [CrossRef]
A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]
Y. Vlasov, “Silicon photonics for next generation computing systems”, in Proceedings of IEEE Conference on European Conference of Optical Communications (Brussels, Belgium, 2008).
S. Assefa, W. M. Green, A. Rylyakov, C. Schow, F. Horst, and Y. Vlasov, “CMOS Integrated Nanophotonics: Enabling Technology for Exascale Computing Systems,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2011), paper OMM6.
D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]
X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express18(3), 3059–3070 (2010). [CrossRef] [PubMed]
D. Van Thourhout, T. Spuesens, S. K. Selvaraja, L. Liu, G. Roelkens, R. Kumar, G. Morthier, P. Rojo-Romeo, F. Mandorlo, P. Regreny, O. Raz, C. Kopp, and L. Grenouillet, “Nanophotonic devices for optical interconnect,” IEEE J. Sel. Top. Quantum Electron.16(5), 1363–1375 (2010). [CrossRef]
Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express15(2), 430–436 (2007). [CrossRef] [PubMed]
J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express16(22), 18340–18344 (2008). [CrossRef] [PubMed]
M. Watts, D. Trotter, R. Young, and A. Lentine, “Maximally confined silicon microphotonic modulators and switches,” in Proceedings of the 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, 457–458 (2008).
P. Dong, S. Liao, H. Liang, W. Qian, X. Wang, R. Shafiiha, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “High-speed and compact silicon modulator based on a racetrack resonator with a 1 V drive voltage,” Opt. Lett.35(19), 3246–3248 (2010). [CrossRef] [PubMed]
Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature435(7040), 325–327 (2005). [CrossRef] [PubMed]
S. Manipatruni, K. Preston, L. Chen, and M. Lipson, “Ultra-low voltage, ultra-small mode volume silicon microring modulator,” Opt. Express18(17), 18235–18242 (2010). [CrossRef] [PubMed]
W. A. Zortman, M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-Power High-Speed Silicon Microdisk Modulators,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CThJ4.
P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express18(11), 10941–10946 (2010). [CrossRef] [PubMed]
G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]
P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express17(25), 22484–22490 (2009). [CrossRef] [PubMed]
W. A. Zortman, A. L. Lentine, D. C. Trotter, and M. R. Watts, “Low-voltage differentially-signaled modulators,” Opt. Express19(27), 26017–26026 (2011). [CrossRef]
A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]
D. J. Thomson, F. Y. Gardes, G. T. Reed, F. Milesi, and J.-M. Fedeli, “High speed silicon optical modulator with self aligned fabrication process,” Opt. Express18(18), 19064–19069 (2010). [CrossRef] [PubMed]
F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fedeli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express17(24), 21986–21991 (2009). [CrossRef] [PubMed]
B. Analui, D. Guckenberger, D. Kucharski, and A. Narasimha, “A fully integrated 20-Gb/s optoelectronic transceiver implemented in a standard 0.13-μm CMOS SOI technology,” IEEE J. Solid-state Circuits41, 2945–2955 (2006). [CrossRef]
X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express18(3), 3059–3070 (2010). [CrossRef] [PubMed]
F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]
D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]
Z.-Y. Li, D.-X. Xu, W. R. McKinnon, S. Janz, J. H. Schmid, P. Cheben, and J.-Z. Yu, “Silicon waveguide modulator based on carrier depletion in periodically interleaved PN junctions,” Opt. Express17(18), 15947–15958 (2009). [CrossRef] [PubMed]
M. Ziebell, D. Marris-Morini, G. Rasigade, P. Crozat, J.-M. Fédéli, P. Grosse, E. Cassan, and L. Vivien, “Ten Gbit/s ring resonator silicon modulator based on interdigitated PN junctions,” Opt. Express19(15), 14690–14695 (2011). [CrossRef] [PubMed]
X. Xiao, Z. Li, Y. Hu, Y. Yu, and J. Yu, “Misalignment-tolerant high-speed silicon microring modulator with interleaved p-n junctions,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (GFP 2011), pp. 359–361.
H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng.50(4), 044001 (2011). [CrossRef]
S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express15(22), 14467–14475 (2007). [CrossRef] [PubMed]
N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25μm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]
M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]
A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength Division Multiplexing Based Photonic Integrated Circuits on Silicon-on-Insulator Platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010). [CrossRef]
G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, P. Dong, S. Liao, D. Feng, M. Asghari, J. Yao, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power, high-performance Si photonic transmitter,” in Optical Fiber Communication Conference (OFC 2010) (2010), paper OMI2.
H. Yu, W. Bogaerts, and A. De Keersgieter, “Optimization of ion implantation condition for depletion-type silicon optical modulators,” IEEE J. Quantum Electron.46(12), 1763–1768 (2010). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Click here to see a list of articles that cite this paper

Figures


Fig. 1	Fig. 2	Fig. 3


Fig. 4	Fig. 5	Fig. 6


Fig. 7	Fig. 8

« Previous Article | Next Article »

OSA is a member of CrossRef.

[1] R. A. Soref, “The Past, Present, and Future of Silicon Photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006). [CrossRef]

[2] G. T. Reed, Silicon Photonics: The State of the Art (Wiley, 2008).

[3] D. A. B. Miller, “Optical interconnects to silicon,” IEEE J. Sel. Top. Quantum Electron.6(6), 1312–1317 (2000). [CrossRef]

[4] A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, “Computer systems based on silicon photonic interconnects,” Proc. IEEE97(7), 1337–1361 (2009). [CrossRef]

[5] Y. Vlasov, “Silicon photonics for next generation computing systems”, in Proceedings of IEEE Conference on European Conference of Optical Communications (Brussels, Belgium, 2008).

[6] S. Assefa, W. M. Green, A. Rylyakov, C. Schow, F. Horst, and Y. Vlasov, “CMOS Integrated Nanophotonics: Enabling Technology for Exascale Computing Systems,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2011), paper OMM6.

[7] D. A. B. Miller, “Device Requirements for Optical Interconnects to Silicon Chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]

[8] X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express18(3), 3059–3070 (2010). [CrossRef] [PubMed]

[9] D. Van Thourhout, T. Spuesens, S. K. Selvaraja, L. Liu, G. Roelkens, R. Kumar, G. Morthier, P. Rojo-Romeo, F. Mandorlo, P. Regreny, O. Raz, C. Kopp, and L. Grenouillet, “Nanophotonic devices for optical interconnect,” IEEE J. Sel. Top. Quantum Electron.16(5), 1363–1375 (2010). [CrossRef]

[10] Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, “12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators,” Opt. Express15(2), 430–436 (2007). [CrossRef] [PubMed]

[11] J. B. You, M. Park, J. W. Park, and G. Kim, “12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode,” Opt. Express16(22), 18340–18344 (2008). [CrossRef] [PubMed]

[12] M. Watts, D. Trotter, R. Young, and A. Lentine, “Maximally confined silicon microphotonic modulators and switches,” in Proceedings of the 21st Annual Meeting of the IEEE Lasers and Electro-Optics Society, 457–458 (2008).

[13] P. Dong, S. Liao, H. Liang, W. Qian, X. Wang, R. Shafiiha, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “High-speed and compact silicon modulator based on a racetrack resonator with a 1 V drive voltage,” Opt. Lett.35(19), 3246–3248 (2010). [CrossRef] [PubMed]

[14] Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, “Micrometre-scale silicon electro-optic modulator,” Nature435(7040), 325–327 (2005). [CrossRef] [PubMed]

[15] S. Manipatruni, K. Preston, L. Chen, and M. Lipson, “Ultra-low voltage, ultra-small mode volume silicon microring modulator,” Opt. Express18(17), 18235–18242 (2010). [CrossRef] [PubMed]

[16] W. A. Zortman, M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-Power High-Speed Silicon Microdisk Modulators,” in Conference on Lasers and Electro-Optics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CThJ4.

[17] P. Dong, R. Shafiiha, S. Liao, H. Liang, N.-N. Feng, D. Feng, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Wavelength-tunable silicon microring modulator,” Opt. Express18(11), 10941–10946 (2010). [CrossRef] [PubMed]

[18] G. Li, X. Zheng, J. Yao, H. Thacker, I. Shubin, Y. Luo, K. Raj, J. E. Cunningham, and A. V. Krishnamoorthy, “25Gb/s 1V-driving CMOS ring modulator with integrated thermal tuning,” Opt. Express19(21), 20435–20443 (2011). [CrossRef] [PubMed]

[19] P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, “Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator,” Opt. Express17(25), 22484–22490 (2009). [CrossRef] [PubMed]

[20] W. A. Zortman, A. L. Lentine, D. C. Trotter, and M. R. Watts, “Low-voltage differentially-signaled modulators,” Opt. Express19(27), 26017–26026 (2011). [CrossRef]

[21] A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, “High-speed optical modulation based on carrier depletion in a silicon waveguide,” Opt. Express15(2), 660–668 (2007). [CrossRef] [PubMed]

[22] D. J. Thomson, F. Y. Gardes, G. T. Reed, F. Milesi, and J.-M. Fedeli, “High speed silicon optical modulator with self aligned fabrication process,” Opt. Express18(18), 19064–19069 (2010). [CrossRef] [PubMed]

[23] F. Y. Gardes, A. Brimont, P. Sanchis, G. Rasigade, D. Marris-Morini, L. O’Faolain, F. Dong, J. M. Fedeli, P. Dumon, L. Vivien, T. F. Krauss, G. T. Reed, and J. Martí, “High-speed modulation of a compact silicon ring resonator based on a reverse-biased pn diode,” Opt. Express17(24), 21986–21991 (2009). [CrossRef] [PubMed]

[24] B. Analui, D. Guckenberger, D. Kucharski, and A. Narasimha, “A fully integrated 20-Gb/s optoelectronic transceiver implemented in a standard 0.13-μm CMOS SOI technology,” IEEE J. Solid-state Circuits41, 2945–2955 (2006). [CrossRef]

[25] X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultra-low-energy all-CMOS modulator integrated with driver,” Opt. Express18(3), 3059–3070 (2010). [CrossRef] [PubMed]

[26] F. Y. Gardes, D. J. Thomson, N. G. Emerson, and G. T. Reed, “40 Gb/s silicon photonics modulator for TE and TM polarisations,” Opt. Express19(12), 11804–11814 (2011). [CrossRef] [PubMed]

[27] D. J. Thomson, F. Y. Gardes, Y. Hu, G. Mashanovich, M. Fournier, P. Grosse, J.-M. Fedeli, and G. T. Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express19(12), 11507–11516 (2011). [CrossRef] [PubMed]

[28] Z.-Y. Li, D.-X. Xu, W. R. McKinnon, S. Janz, J. H. Schmid, P. Cheben, and J.-Z. Yu, “Silicon waveguide modulator based on carrier depletion in periodically interleaved PN junctions,” Opt. Express17(18), 15947–15958 (2009). [CrossRef] [PubMed]

[29] M. Ziebell, D. Marris-Morini, G. Rasigade, P. Crozat, J.-M. Fédéli, P. Grosse, E. Cassan, and L. Vivien, “Ten Gbit/s ring resonator silicon modulator based on interdigitated PN junctions,” Opt. Express19(15), 14690–14695 (2011). [CrossRef] [PubMed]

[30] X. Xiao, Z. Li, Y. Hu, Y. Yu, and J. Yu, “Misalignment-tolerant high-speed silicon microring modulator with interleaved p-n junctions,” in Proceedings of 8th IEEE International Conference on Group IV Photonics (GFP 2011), pp. 359–361.

[31] H. Xu, Z. Li, Y. Zhu, Y. Li, Y. Yu, and J. Yu, “Silicon optical modulator with integrated grating couplers based on 0.18-μm complementary metal oxide semiconductor technology,” Opt. Eng.50(4), 044001 (2011). [CrossRef]

[32] S. Xiao, M. H. Khan, H. Shen, and M. Qi, “Compact silicon microring resonators with ultra-low propagation loss in the C band,” Opt. Express15(22), 14467–14475 (2007). [CrossRef] [PubMed]

[33] N.-N. Feng, S. Liao, D. Feng, P. Dong, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, “High speed carrier-depletion modulators with 1.4V-cm VπL integrated on 0.25μm silicon-on-insulator waveguides,” Opt. Express18(8), 7994–7999 (2010). [CrossRef] [PubMed]

[34] M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Low-voltage, compact, depletion-mode, silicon Mach Zehnder modulator,” IEEE J. Sel. Top. Quantum Electron.16(1), 159–164 (2010). [CrossRef]

[35] A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, “Wavelength Division Multiplexing Based Photonic Integrated Circuits on Silicon-on-Insulator Platform,” IEEE J. Sel. Top. Quantum Electron.16(1), 23–32 (2010). [CrossRef]

[36] G. Li, X. Zheng, J. Lexau, Y. Luo, H. Thacker, P. Dong, S. Liao, D. Feng, M. Asghari, J. Yao, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, “Ultralow-power, high-performance Si photonic transmitter,” in Optical Fiber Communication Conference (OFC 2010) (2010), paper OMI2.

[37] H. Yu, W. Bogaerts, and A. De Keersgieter, “Optimization of ion implantation condition for depletion-type silicon optical modulators,” IEEE J. Quantum Electron.46(12), 1763–1768 (2010). [CrossRef]

OpticsInfoBase

Optics Express

25 Gbit/s silicon microring modulator based on misalignment-tolerant interleaved PN junctions