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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 4 — Feb. 13, 2012
  • pp: 4389–4396

Mechanism of nanograting formation on the surface of fused silica

Feng Liang, Réal Vallée, and See Leang Chin  »View Author Affiliations

Optics Express, Vol. 20, Issue 4, pp. 4389-4396 (2012)

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Nanograting inscription with a tightly focused femtosecond beam on the surface of fused silica was studied. The width and spacing of grooves are shown to decrease with the increase of the number of overlapped shots in both stationary and scanning cases. We propose a model to explain this behavior, based on both the so-called nanoplasmonic model and the incubation effect.

© 2012 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.3440) Lasers and laser optics : Laser-induced breakdown
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Laser Microfabrication

Original Manuscript: November 23, 2011
Revised Manuscript: December 21, 2011
Manuscript Accepted: December 23, 2011
Published: February 8, 2012

Feng Liang, Réal Vallée, and See Leang Chin, "Mechanism of nanograting formation on the surface of fused silica," Opt. Express 20, 4389-4396 (2012)

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