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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 7 — Mar. 26, 2012
  • pp: 7994–8005

High numerical aperture hybrid optics for two-photon polymerization

Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, and Andreas Tünnermann  »View Author Affiliations

Optics Express, Vol. 20, Issue 7, pp. 7994-8005 (2012)

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We report on an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics allows for well-corrected focusing over a large working distance range of 577 μm with a numerical aperture (NA) of 1.33 and low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with a diffractive optical element (DOE) for correction of aberrations. To demonstrate the improvements for volume structuring of the polymer, we compare the achievable structure sizes of our optics with a commercially available oil-immersion objective (100x, NA=1.4).

© 2012 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3620) Optical design and fabrication : Lens system design
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.5540) Ultrafast optics : Pulse shaping

ToC Category:
Optical Design and Fabrication

Original Manuscript: December 2, 2011
Revised Manuscript: January 19, 2012
Manuscript Accepted: February 29, 2012
Published: March 22, 2012

Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, and Andreas Tünnermann, "High numerical aperture hybrid optics for two-photon polymerization," Opt. Express 20, 7994-8005 (2012)

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