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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 7 — Mar. 26, 2012
  • pp: 7994–8005

High numerical aperture hybrid optics for two-photon polymerization

Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, and Andreas Tünnermann  »View Author Affiliations


Optics Express, Vol. 20, Issue 7, pp. 7994-8005 (2012)
http://dx.doi.org/10.1364/OE.20.007994


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Abstract

We report on an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics allows for well-corrected focusing over a large working distance range of 577 μm with a numerical aperture (NA) of 1.33 and low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with a diffractive optical element (DOE) for correction of aberrations. To demonstrate the improvements for volume structuring of the polymer, we compare the achievable structure sizes of our optics with a commercially available oil-immersion objective (100x, NA=1.4).

© 2012 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.3620) Optical design and fabrication : Lens system design
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.5540) Ultrafast optics : Pulse shaping

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: December 2, 2011
Revised Manuscript: January 19, 2012
Manuscript Accepted: February 29, 2012
Published: March 22, 2012

Citation
Frank Burmeister, Uwe D. Zeitner, Stefan Nolte, and Andreas Tünnermann, "High numerical aperture hybrid optics for two-photon polymerization," Opt. Express 20, 7994-8005 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-7-7994


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References

  1. S. Maruo, O. Nakamura, and S. Kawata, “Three-dimensional microfabrication with two-photon-absorbed photopolymerization,” Opt. Lett.22, 132–134 (1997). [CrossRef] [PubMed]
  2. S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, “Finer features for functional microdevices,” Nature412, 697–698 (2001). [CrossRef] [PubMed]
  3. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater.3, 444–447 (2004). [CrossRef] [PubMed]
  4. A. Ovsianikov, A. Ostendorf, and B. N. Chichkov, “Three-dimensional photofabrication with femtosecond lasers for applications in photonics and biomedicine,” Appl. Surf. Sci.253, 6599–6602 (2007). [CrossRef]
  5. I. Staude, M. Thiel, S. Essig, C. Wolff, K. Busch, G. von Freymann, and M. Wegener, “Fabrication and characterization of silicon woodpile photonic crystals with a complete bandgap at telecom wavelengths,” Opt. Lett.35, 1094–1096 (2010). [CrossRef] [PubMed]
  6. I. Staude, G. von Freymann, S. Essig, K. Busch, and M. Wegener, “Waveguides in three-dimensional photonic-bandgap materials by direct laser writing and silicon double inversion,” Opt. Lett.36, 67–69 (2011). [CrossRef] [PubMed]
  7. M. J. Booth and T. Wilson, “Refractive-index-mismatch induced aberrations in single-photon and two-photon microscopy and the use of aberration correction,” J. Biomed. Opt.6, 266–272 (2001). [CrossRef] [PubMed]
  8. M. J. Nasse and J. C. Woehl, “Realistic modeling of the illumination point spread function in confocal scanning optical microscopy,” J. Opt. Soc. Am. A27, 295–302 (2010). [CrossRef]
  9. U. Fuchs, U. D. Zeitner, and A. Tünnermann, “Hybrid optics for focusing ultrashort laser pulses,” Opt. Lett.31, 1516–1518 (2006). [CrossRef] [PubMed]
  10. S. M. Mansfield and G. S. Kino, “Solid immersion microscope,” Appl. Phys. Lett.57, 2615–2616 (1990). [CrossRef]
  11. I. Ichimura, S. Hayashi, and G. S. Kino, “High-density optical recording using a solid immersion lens,” Appl. Opt.36, 4339–4348 (1997). [CrossRef] [PubMed]
  12. S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, “High spatial resolution subsurface microscopy,” Appl. Phys. Lett.78, 4071–4073 (2001). [CrossRef]
  13. M. Lang, E. Aspnes, and T. D. Milster, “Geometrical analysis of third-order aberrations for a solid immersion lens,” Opt. Express16, 20008–20028 (2008). [CrossRef] [PubMed]
  14. S. B. Ippolito, B. B. Goldberg, and M. S. Ünlü, “Theoretical analysis of numerical aperture increasing lens microscopy,” J. Appl. Phys.97, 053105 (2005). [CrossRef]
  15. “Zemax optical design programm,” ZEMAX Development Center Corporation USA.
  16. ”PSF Lab” available at onemolecule.chem.uwm.edu/index.php/software.
  17. J.-C. Diels and W. Rudolph, Ultrashort Laser Pulse Phenomena (Academic, San Diego, 2006).

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