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Extreme ultraviolet multilayer for the FERMI@Elettra free electron laser beam transport systemAlain Jody Corso, Paola Zuppella, David L. Windt, Marco Zangrando, and Maria Guglielmina Pelizzo »View Author Affiliations
Alain Jody Corso,1,2
Paola Zuppella,1
David L. Windt,3
Marco Zangrando,4
and Maria Guglielmina Pelizzo1,2,*
1Consiglio Nazionale delle Ricerche-Institute for Photonics and Nanotechnologies, Laboratory for Ultraviolet and X-rays Optical Research, via Trasea 7, 35131 Padova, Italy 2University of Padova, Department of Information Engineering, via Gradenigo 6B, 35131 Padova, Italy 3Reflective X-Ray Optics LLC, 1361 Amsterdam Avenue, Suite 3B, New York, New York 10027, USA 4Sincrotrone Trieste ScpA, Strada Statale 14 - km 163,5 in Area Science Park 34149, Trieste Italy *Corresponding author: pelizzo@dei.unipd.it |
Optics Express, Vol. 20, Issue 7, pp. 8006-8014 (2012)
http://dx.doi.org/10.1364/OE.20.008006
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Abstract
In this work we present the design of a Pd/B4C multilayer structure optimized for high reflectance at 6.67 nm. The structure has been deposited and also characterized along one year in order to investigate its temporal stability. This coating has been developed for the beam transport system of FERMI@Elettra Free Electron Laser: the use of an additional aperiodic capping layer on top of the structure combines the high reflectance with filter properties useful in rejecting the fundamental harmonic when the goal is to select the third FEL harmonic.
© 2012 OSA
OCIS Codes
(140.2600) Lasers and laser optics : Free-electron lasers (FELs)
(230.4170) Optical devices : Multilayers
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(310.4165) Thin films : Multilayer design
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: December 13, 2011
Revised Manuscript: January 30, 2012
Manuscript Accepted: March 7, 2012
Published: March 22, 2012
Citation
Alain Jody Corso, Paola Zuppella, David L. Windt, Marco Zangrando, and Maria Guglielmina Pelizzo, "Extreme ultraviolet multilayer for the FERMI@Elettra free electron laser beam transport system," Opt. Express 20, 8006-8014 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-7-8006
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References
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Abrami, A.
Allaria, E.
Andreev, S. S.
Bacescu, D. M.
Bajt, S.
Barthelmess, M.
Barty, A.
Barysheva, M. M.
Baumbach, T.
Bencivenga, F.
Bianco, A.
Bijkerk, F.
Bogan, M. J.
Bormann, R.
Bruijn, S.
Burian, T.
Callegari, C.
Capotondi, F.
Chalupsky, J.
Chapman, H. N.
Chkhalo, N. I.
Cihelka, J.
Cloetens, P.
Cocco, D.
Corso, A. J.
Cucini, R.
Cudin, I.
Dieker, C.
Dietsch, R.
Falco, C. M.
Fava, C.
Fawley, W. M.
Frank, M.
Giuressi, D.
Gleeson, A.
Godnig, R.
Grigoriev, D.
Grzonka, J.
Gullikson, E. M.
Gumprecht, L.
Gusev, S. A.
Hajdu, J.
Hajkova, V.
Hau-Riege, S.
Helfen, L.
Hollensteiner, S.
Holz, T.
Jäger, W.
Juha, L.
Jurek, M.
Kaulich, B.
Khorsand, A. R.
Kiskinova, M.
Klinger, D.
Kopylets, I.
Krämer, M.
Krzywinski, J.
Locatelli, A.
London, R.
Louis, E.
Lucatorto, T. B.
Masciovecchio, C.
Meduna, M.
Menk, R. H.
Mentes, T. O.
Michaelsen, C.
Monaco, G.
Nelson, A. J.
Nicolosi, P.
Nowak, C.
Parmigiani, F.
Pedersoli, E.
Pelizzo, M. G.
Pelka, J. B.
Pestov, A. E.
Pivovaroff, M. J.
Plocinski, T.
Polkovnikov, V. N.
Rack, A.
Rack, T.
Rasinski, M.
Riotte, M.
Rosen, R. S.
Rumiz, L.
Salshchenko, N. N.
Sandrin, G.
Schulz, J.
Sergo, R.
Shmaenok, L. A.
Siewert, F.
Slaughter, J. M.
Sobierajski, R.
Spezzani, C.
Stearns, D. G.
Suman, M.
Svetina, C.
Tarrio, C.
Tiedtke, K.
Toleikis, S.
Tsarfati, T.
Vainer, Y. A.
van de Kruijs, R. W. E.
Vernon, S. P.
Vysin, L.
Wabnitz, H.
Watts, R. N.
Weitkamp, T.
Wiesmann, J.
Windt, D. L.
Woods, B. W.
Zangrando, M.
Ziegler, E.
Zoerthout, E.
Zoethout, E.
Zuev, S. Y.
Zuppella, P.
- D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE7361, 736106 (2009). [CrossRef]
- E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys.12(7), 075002 (2010). [CrossRef]
- S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A603(1-2), 80–82 (2009). [CrossRef]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt.50(11), 1610–1619 (2011). [CrossRef] [PubMed]
- M. Barthelmess and S. Bajt, “Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength,” Appl. Opt.50(11), 1610–1619 (2011). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A603(1-2), 80–82 (2009). [CrossRef]
- A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat.17(4), 496–510 (2010). [CrossRef] [PubMed]
- R. Cucini, F. Bencivenga, M. Zangrando, and C. Masciovecchio, “Technical advances of the TIMER project,” Nucl. Instrum. Meth. A635(1), S69–S74 (2011). [CrossRef]
- F. Bencivenga and C. Masciovecchio, “FEL-based transient grating spectroscopy to investigate nanoscale dynamics,” Nucl. Instrum. and Meth. A606(3), 785–789 (2009). [CrossRef]
- D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE7361, 736106 (2009). [CrossRef]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010). [CrossRef]
- T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films518(5), 1365–1368 (2009). [CrossRef]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- E. Allaria, C. Callegari, D. Cocco, W. M. Fawley, M. Kiskinova, C. Masciovecchio, and F. Parmigiani, “The FERMI@Elettra free-electron-laser source for coherent x-ray physics: photon properties, beam transport system and applications,” New J. Phys.12(7), 075002 (2010). [CrossRef]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A603(1-2), 80–82 (2009). [CrossRef]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat.17(4), 496–510 (2010). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- M. G. Pelizzo, A. J. Corso, G. Monaco, P. Nicolosi, M. Suman, P. Zuppella, and D. Cocco, “Multilayer optics to be used as FEL fundamental suppressors for harmonics selection,” Nucl. Instrum. Meth. A635(1), S24–S29 (2011). [CrossRef]
- A. J. Corso, P. Zuppella, P. Nicolosi, D. Cocco, and M. G. Pelizzo, “Multilayer mirrors for FERMI@ELETTRA beam transport system,” Proc. SPIE8078, 80780F (2011). [CrossRef]
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- A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat.17(4), 496–510 (2010). [CrossRef] [PubMed]
- A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat.17(4), 496–510 (2010). [CrossRef] [PubMed]
- R. Sobierajski, S. Bruijn, A. R. Khorsand, E. Louis, R. W. E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, A. Gleeson, J. Grzonka, E. M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J. B. Pelka, T. Płociński, M. Rasiński, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, and F. Bijkerk, “Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources,” Opt. Express19(1), 193–205 (2011). [CrossRef] [PubMed]
- A. Rack, T. Weitkamp, M. Riotte, D. Grigoriev, T. Rack, L. Helfen, T. Baumbach, R. Dietsch, T. Holz, M. Krämer, F. Siewert, M. Meduna, P. Cloetens, and E. Ziegler, “Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging,” J. Synchrotron Radiat.17(4), 496–510 (2010). [CrossRef] [PubMed]
- D. Cocco, A. Abrami, A. Bianco, I. Cudin, C. Fava, D. Giuressi, R. Godnig, F. Parmigiani, L. Rumiz, R. Sergo, C. Svetina, and M. Zangrando, “The FERMI@Elettra FEL photon transport system,” Proc. SPIE7361, 736106 (2009). [CrossRef]
- S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A603(1-2), 80–82 (2009). [CrossRef]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
- E. Pedersoli, F. Capotondi, D. Cocco, M. Zangrando, B. Kaulich, R. H. Menk, A. Locatelli, T. O. Mentes, C. Spezzani, G. Sandrin, D. M. Bacescu, M. Kiskinova, S. Bajt, M. Barthelmess, A. Barty, J. Schulz, L. Gumprecht, H. N. Chapman, A. J. Nelson, M. Frank, M. J. Pivovaroff, B. W. Woods, M. J. Bogan, and J. Hajdu, “Multipurpose modular experimental station for the DiProI beamline of Fermi@Elettra free electron laser,” Rev. Sci. Instrum.82(4), 043711 (2011). [CrossRef] [PubMed]
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- S. S. Andreev, M. M. Barysheva, N. I. Chkhalo, S. A. Gusev, A. E. Pestov, V. N. Polkovnikov, N. N. Salshchenko, L. A. Shmaenok, Y. A. Vainer, and S. Y. Zuev, “Multilayered mirrors based on La/B4C(B9C) for x-ray range near anomalous dispersion of boron (λ ≈ 6.7 nm),” Nucl. Instrum. Meth. A603(1-2), 80–82 (2009). [CrossRef]
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- T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films518(5), 1365–1368 (2009). [CrossRef]
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- T. Tsarfati, R. W. E. Van de Kruijs, E. Zoerthout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and x-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010). [CrossRef]
- T. Tsarfati, R. W. E. Van De Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography,” Thin Solid Films518(5), 1365–1368 (2009). [CrossRef]
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J. Synchrotron Radiat.
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New J. Phys.
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Opt. Express
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Proc. SPIE
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Thin Solid Films
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