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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 8 — Apr. 9, 2012
  • pp: 8535–8542

A nano-opto-mechanical pressure sensor via ring resonator

X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwong, and A. Q. Liu  »View Author Affiliations

Optics Express, Vol. 20, Issue 8, pp. 8535-8542 (2012)

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This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.

© 2012 OSA

OCIS Codes
(230.5750) Optical devices : Resonators
(080.1238) Geometric optics : Array waveguide devices
(230.4685) Optical devices : Optical microelectromechanical devices
(120.5475) Instrumentation, measurement, and metrology : Pressure measurement

ToC Category:

Original Manuscript: January 10, 2012
Revised Manuscript: February 9, 2012
Manuscript Accepted: February 9, 2012
Published: March 28, 2012

X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwong, and A. Q. Liu, "A nano-opto-mechanical pressure sensor via ring resonator," Opt. Express 20, 8535-8542 (2012)

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