A nano-opto-mechanical pressure sensor via ring resonator

doi:10.1364/OE.20.008535

A nano-opto-mechanical pressure sensor via ring resonator

X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwong, and A. Q. Liu »View Author Affiliations

Optics Express, Vol. 20, Issue 8, pp. 8535-8542 (2012)
http://dx.doi.org/10.1364/OE.20.008535

View Full Text Article

Enhanced HTML Acrobat PDF (1126 KB)

Journal Search
Article Lookup

Article Tools

Citations

Alert me when this article is cited
Export Citation/Save

Abstract
Article Info
References (22)
Cited By
Figures (6)
Metrics
Related Content

Abstract

This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.

OCIS Codes
(230.5750) Optical devices : Resonators
(080.1238) Geometric optics : Array waveguide devices
(230.4685) Optical devices : Optical microelectromechanical devices
(120.5475) Instrumentation, measurement, and metrology : Pressure measurement

ToC Category:
Sensors

History
Original Manuscript: January 10, 2012
Revised Manuscript: February 9, 2012
Manuscript Accepted: February 9, 2012
Published: March 28, 2012

Citation
X. Zhao, J. M. Tsai, H. Cai, X. M. Ji, J. Zhou, M. H. Bao, Y. P. Huang, D. L. Kwong, and A. Q. Liu, "A nano-opto-mechanical pressure sensor via ring resonator," Opt. Express 20, 8535-8542 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-8-8535

Sort: Author | Year | Journal | Reset

References

Y. C. Chao, W. J. Lai, C. Y. Chen, H. F. Meng, H. W. Zan, and S.-F. Horng, “Low voltage active pressure sensor based on polymer space-change-limited transisitor,” Appl. Phys. Lett.95(25), 253306 (2009). [CrossRef]
M. Esashi, H. Komatsu, and T. Matsuo, “Biomedical pressure sensor using buried piezoresistors,” Sens. Actuators A Phys.4, 537–544 (1983). [CrossRef]
C. S. Sander, J. W. Knutti, and J. D. Meindl, “A monolithic capacitive pressure sensor with pulse-period output,” IEEE Trans. Electron. Dev.27(5), 927–930 (1980). [CrossRef]
D. D. Bruyker and R. Puers, “Thermostatic control for temperature compensation of a silicon pressure sensor,” Sens. Actuators A Phys.82(1-3), 120–127 (2000). [CrossRef]
M. C. Oh, J. W. Kim, K. J. Kim, and S. S. Lee, “Optical pressure sensors based on vertical directional coupling with flexible polymer waveguides,” IEEE Photon. Technol. Lett.21(8), 501–503 (2009). [CrossRef]
D. Donlagic and E. Cibula, “All-fiber high-sensitivity pressure sensor with SiO2 diaphragm,” Opt. Lett.30(16), 2071–2073 (2005). [CrossRef] [PubMed]
Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett.17(2), 447–449 (2005). [CrossRef]
Y. F. Chau, H. H. Yeh, and D. P. Tsai, “Significantly enhanced birefringence of photonic crystal fiber using rotational binary unit cell in fiber cladding,” Jpn. J. Appl. Phys.46(43), L1048–L1051 (2007). [CrossRef]
B. J. Luff, J. S. Wilkinson, J. Piehler, U. Hollenbach, J. Ingenhoff, and N. Fabricius, “Integrated optical Mach–Zehnder biosensor,” J. Lightwave Technol.16(4), 583–592 (1998). [CrossRef]
M. Ohkawa, M. Izutsu, and T. Sueta, “Integrated optic pressure sensor on silicon substrate,” Appl. Opt.28(23), 5153–5157 (1989). [CrossRef] [PubMed]
N. Pelletier, B. Bêche, N. Tahani, J. Zyss, L. Camberlein, and E. Gaviot, “SU-8 waveguiding interferometric micro-sensor for gage pressure measurement,” Sens. Actuators A Phys.135(1), 179–184 (2007). [CrossRef]
A. Méndez, “Fiber bragg grating sensors: a market overview,” Proc. SPIE6619, 661905 (2007). [CrossRef]
E. Udd and B. W. Spillman, Fiber Optic Sensors: An Introduction for Engineers and Scientists (John Wiley & Sons, 2011).
W. P. Eaton and J. H. Smith, “Micromachined pressure sensors: review and recent developments,” Smart Mater. Struct.6(5), 530–539 (1997). [CrossRef]
C. T. Peng, J. C. Lin, C. T. Lin, and K. N. Chiang, “Performance and package effect of a novel piezoresisitive pressure sensor fabricated by front-side etching technology,” Sens. Actuators A Phys.119(1), 28–37 (2005). [CrossRef]
I. Kiyat, C. Kocabas, and A. Aydinli, “Integrated micro ring resonator displacement sensor for scanning probe microscopies,” J. Micromech. Microeng.14(3), 374–381 (2004). [CrossRef]
G. N. De Brabender, J. T. Boyd, and G. Beheim, “Integrated optical ring resonator with micromechanical diaphragm for pressure sensing,” IEEE Photon. Technol. Lett.6(5), 671–673 (1994). [CrossRef]
M. H. Bao, Analysis and Design Principles of MEMS Devices (Elsevier, 2005).
S. U. Pillai, Array Signal Processing (Springer-Verlag, 1989).
H. M. Berger, “A new approach to the analysis of large deflections of plates,” J. Appl. Mech.22, 465–472 (1955).
K. Okamoto, Fundamentals of Optical Waveguides (Elsevier, 2006).
K. Ohtani and M. Baba, “Shape Recognition for Transparent Objects Using Ultrasonic Sensor Array,” SICE, 2007 Annual Conf. 1813–1818 (2007).

Appl. Opt.

M. Ohkawa, M. Izutsu, and T. Sueta, “Integrated optic pressure sensor on silicon substrate,” Appl. Opt.28(23), 5153–5157 (1989). [CrossRef] [PubMed]

Appl. Phys. Lett.

Y. C. Chao, W. J. Lai, C. Y. Chen, H. F. Meng, H. W. Zan, and S.-F. Horng, “Low voltage active pressure sensor based on polymer space-change-limited transisitor,” Appl. Phys. Lett.95(25), 253306 (2009). [CrossRef]

IEEE Photon. Technol. Lett.

M. C. Oh, J. W. Kim, K. J. Kim, and S. S. Lee, “Optical pressure sensors based on vertical directional coupling with flexible polymer waveguides,” IEEE Photon. Technol. Lett.21(8), 501–503 (2009). [CrossRef]
Y. Zhu and A. Wang, “Miniature fiber-optic pressure sensor,” IEEE Photon. Technol. Lett.17(2), 447–449 (2005). [CrossRef]
G. N. De Brabender, J. T. Boyd, and G. Beheim, “Integrated optical ring resonator with micromechanical diaphragm for pressure sensing,” IEEE Photon. Technol. Lett.6(5), 671–673 (1994). [CrossRef]

IEEE Trans. Electron. Dev.

C. S. Sander, J. W. Knutti, and J. D. Meindl, “A monolithic capacitive pressure sensor with pulse-period output,” IEEE Trans. Electron. Dev.27(5), 927–930 (1980). [CrossRef]

J. Appl. Mech.

H. M. Berger, “A new approach to the analysis of large deflections of plates,” J. Appl. Mech.22, 465–472 (1955).

J. Lightwave Technol.

B. J. Luff, J. S. Wilkinson, J. Piehler, U. Hollenbach, J. Ingenhoff, and N. Fabricius, “Integrated optical Mach–Zehnder biosensor,” J. Lightwave Technol.16(4), 583–592 (1998). [CrossRef]

J. Micromech. Microeng.

I. Kiyat, C. Kocabas, and A. Aydinli, “Integrated micro ring resonator displacement sensor for scanning probe microscopies,” J. Micromech. Microeng.14(3), 374–381 (2004). [CrossRef]

Jpn. J. Appl. Phys.

Y. F. Chau, H. H. Yeh, and D. P. Tsai, “Significantly enhanced birefringence of photonic crystal fiber using rotational binary unit cell in fiber cladding,” Jpn. J. Appl. Phys.46(43), L1048–L1051 (2007). [CrossRef]

Opt. Lett.

D. Donlagic and E. Cibula, “All-fiber high-sensitivity pressure sensor with SiO2 diaphragm,” Opt. Lett.30(16), 2071–2073 (2005). [CrossRef] [PubMed]

Proc. SPIE

A. Méndez, “Fiber bragg grating sensors: a market overview,” Proc. SPIE6619, 661905 (2007). [CrossRef]

Sens. Actuators A Phys.

N. Pelletier, B. Bêche, N. Tahani, J. Zyss, L. Camberlein, and E. Gaviot, “SU-8 waveguiding interferometric micro-sensor for gage pressure measurement,” Sens. Actuators A Phys.135(1), 179–184 (2007). [CrossRef]
C. T. Peng, J. C. Lin, C. T. Lin, and K. N. Chiang, “Performance and package effect of a novel piezoresisitive pressure sensor fabricated by front-side etching technology,” Sens. Actuators A Phys.119(1), 28–37 (2005). [CrossRef]
D. D. Bruyker and R. Puers, “Thermostatic control for temperature compensation of a silicon pressure sensor,” Sens. Actuators A Phys.82(1-3), 120–127 (2000). [CrossRef]
M. Esashi, H. Komatsu, and T. Matsuo, “Biomedical pressure sensor using buried piezoresistors,” Sens. Actuators A Phys.4, 537–544 (1983). [CrossRef]

Smart Mater. Struct.

W. P. Eaton and J. H. Smith, “Micromachined pressure sensors: review and recent developments,” Smart Mater. Struct.6(5), 530–539 (1997). [CrossRef]

Other

E. Udd and B. W. Spillman, Fiber Optic Sensors: An Introduction for Engineers and Scientists (John Wiley & Sons, 2011).
K. Okamoto, Fundamentals of Optical Waveguides (Elsevier, 2006).
K. Ohtani and M. Baba, “Shape Recognition for Transparent Objects Using Ultrasonic Sensor Array,” SICE, 2007 Annual Conf. 1813–1818 (2007).
M. H. Bao, Analysis and Design Principles of MEMS Devices (Elsevier, 2005).
S. U. Pillai, Array Signal Processing (Springer-Verlag, 1989).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Click here to see a list of articles that cite this paper