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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 8 — Apr. 9, 2012
  • pp: 8575–8583

Planar InAs photodiodes fabricated using He ion implantation

Ian Sandall, Chee Hing Tan, Andrew Smith, and Russell Gwilliam  »View Author Affiliations

Optics Express, Vol. 20, Issue 8, pp. 8575-8583 (2012)

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We have performed Helium (He) ion implantation on InAs and performed post implant annealing to investigate the effect on the sheet resistance. Using the transmission line model (TLM) we have shown that the sheet resistance of a p+ InAs layer, with a nominal doping concentration of 1x1018 cm−3, can increase by over 5 orders of magnitude upon implantation. We achieved a sheet resistance of 1x105 Ω/Square in an ‘as-implanted’ sample and with subsequent annealing this can be further increased to 1x107 Ω/Square. By also performing implantation on p-i-n structures we have shown that it is possible to produce planar photodiodes with comparable dark currents and quantum efficiencies to chemically etched reference mesa InAs photodiodes.

© 2012 OSA

OCIS Codes
(040.3060) Detectors : Infrared
(040.5160) Detectors : Photodetectors
(160.6000) Materials : Semiconductor materials
(230.5170) Optical devices : Photodiodes
(040.1345) Detectors : Avalanche photodiodes (APDs)

ToC Category:

Original Manuscript: January 26, 2012
Revised Manuscript: March 4, 2012
Manuscript Accepted: March 23, 2012
Published: March 28, 2012

Ian Sandall, Chee Hing Tan, Andrew Smith, and Russell Gwilliam, "Planar InAs photodiodes fabricated using He ion implantation," Opt. Express 20, 8575-8583 (2012)

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