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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 9 — Apr. 23, 2012
  • pp: 10212–10217

On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing

Jintian Lin, Shangjie Yu, Yaoguang Ma, Wei Fang, Fei He, Lingling Qiao, Limin Tong, Ya Cheng, and Zhizhan Xu  »View Author Affiliations


Optics Express, Vol. 20, Issue 9, pp. 10212-10217 (2012)
http://dx.doi.org/10.1364/OE.20.010212


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Abstract

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly consists of formation of freestanding microdisks by femtosecond laser direct writing and subsequent wet chemical etching. CO2 laser annealing is followed to smooth the microcavity surface. Microcavities with arbitrary tilting angle, lateral and vertical positioning are demonstrated, and the quality (Q)-factor of a typical microcavity is measured to be up to 1.07 × 106, which is currently limited by the low spatial resolution of the motion stage used during the laser patterning and can be improved with motion stages of higher resolutions.

© 2012 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.7090) Lasers and laser optics : Ultrafast lasers
(160.2750) Materials : Glass and other amorphous materials

ToC Category:
Laser Microfabrication

History
Original Manuscript: March 2, 2012
Revised Manuscript: April 11, 2012
Manuscript Accepted: April 11, 2012
Published: April 19, 2012

Citation
Jintian Lin, Shangjie Yu, Yaoguang Ma, Wei Fang, Fei He, Lingling Qiao, Limin Tong, Ya Cheng, and Zhizhan Xu, "On-chip three-dimensional high-Q microcavities fabricated by femtosecond laser direct writing," Opt. Express 20, 10212-10217 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-9-10212


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