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Real space soft x-ray imaging at 10 nm spatial resolutionW. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau »View Author Affiliations
W. Chao,1,*
P. Fischer,1
T. Tyliszczak,2
S. Rekawa,1
E. Anderson,1
and P. Naulleau1
1Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720 USA 2Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, California 94720, 20036, USA *Corresponding author: wlchao@lbl.gov |
Optics Express, Vol. 20, Issue 9, pp. 9777-9783 (2012)
http://dx.doi.org/10.1364/OE.20.009777
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Abstract
Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
© 2012 OSA
OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(340.7440) X-ray optics : X-ray imaging
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
X-ray Optics
History
Original Manuscript: March 2, 2012
Revised Manuscript: March 26, 2012
Manuscript Accepted: March 29, 2012
Published: April 13, 2012
Virtual Issues
Vol. 7, Iss. 6 Virtual Journal for Biomedical Optics
Citation
W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau, "Real space soft x-ray imaging at 10 nm spatial resolution," Opt. Express 20, 9777-9783 (2012)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-20-9-9777
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References
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Bostedt, C.
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Brachmann, A.
Brown, J. G. E.
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Chao, W.
Chao, W. L.
Chembrolu, V.
Coffee, R.
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- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
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- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution fresnel zone plate lens based soft x-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]
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- J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, “Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J. X-Ray Sci. Tech. (Paris)8, 95–104 (1998).
- M. E. Barnett, “Reciprocity theorem and equivalence of conventional and scanning transmission microscopes,” Optik (Stuttg.)38, 585–588 (1973).
- J. Reinspach, M. Lindblom, M. Bertilson, O. von Hofsten, H. M. Hertz, and A. Holmberg, “13 nm high-efficiency nickel-germanium soft x-ray zone plates,” J. Vac. Sci. Technol. B29(1), 011012 (2011). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution fresnel zone plate lens based soft x-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. Anderson, “Hydrogen silsesquioxane double patterning process for 12 nm resolution x-ray zone plates,” J. Vac. Sci. Technol. B27(6), 2606–2611 (2009). [CrossRef]
- W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
- E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B18(6), 2970–2975 (2000). [CrossRef]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
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- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
- E. V. Shevchenko, D. V. Talapin, N. A. Kotov, S. O’Brien, and C. B. Murray, “Structural diversity in binary nanoparticle superlattices,” Nature439(7072), 55–59 (2006). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- E. V. Shevchenko, D. V. Talapin, N. A. Kotov, S. O’Brien, and C. B. Murray, “Structural diversity in binary nanoparticle superlattices,” Nature439(7072), 55–59 (2006). [CrossRef] [PubMed]
- E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B18(6), 2970–2975 (2000). [CrossRef]
- A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
- S. Park, D. H. Lee, J. Xu, B. Kim, S. W. Hong, U. Jeong, T. Xu, and T. P. Russell, “Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order,” Science323(5917), 1030–1033 (2009). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-x-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]
- J. Reinspach, M. Lindblom, M. Bertilson, O. von Hofsten, H. M. Hertz, and A. Holmberg, “13 nm high-efficiency nickel-germanium soft x-ray zone plates,” J. Vac. Sci. Technol. B29(1), 011012 (2011). [CrossRef]
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution fresnel zone plate lens based soft x-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. Anderson, “Hydrogen silsesquioxane double patterning process for 12 nm resolution x-ray zone plates,” J. Vac. Sci. Technol. B27(6), 2606–2611 (2009). [CrossRef]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
- A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
- S. Park, D. H. Lee, J. Xu, B. Kim, S. W. Hong, U. Jeong, T. Xu, and T. P. Russell, “Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order,” Science323(5917), 1030–1033 (2009). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-x-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]
- G. Schneider, “Zone plates with high efficiency in high orders of diffraction described by dynamical theory,” Appl. Phys. Lett.71(16), 2242–2244 (1997). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- E. V. Shevchenko, D. V. Talapin, N. A. Kotov, S. O’Brien, and C. B. Murray, “Structural diversity in binary nanoparticle superlattices,” Nature439(7072), 55–59 (2006). [CrossRef] [PubMed]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc.226(2), 175–181 (2007). [CrossRef] [PubMed]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
- A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
- P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc.226(2), 175–181 (2007). [CrossRef] [PubMed]
- E. V. Shevchenko, D. V. Talapin, N. A. Kotov, S. O’Brien, and C. B. Murray, “Structural diversity in binary nanoparticle superlattices,” Nature439(7072), 55–59 (2006). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B18(6), 2970–2975 (2000). [CrossRef]
- J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
- K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
- J. Reinspach, M. Lindblom, M. Bertilson, O. von Hofsten, H. M. Hertz, and A. Holmberg, “13 nm high-efficiency nickel-germanium soft x-ray zone plates,” J. Vac. Sci. Technol. B29(1), 011012 (2011). [CrossRef]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-x-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- S. Park, D. H. Lee, J. Xu, B. Kim, S. W. Hong, U. Jeong, T. Xu, and T. P. Russell, “Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order,” Science323(5917), 1030–1033 (2009). [CrossRef] [PubMed]
- S. Park, D. H. Lee, J. Xu, B. Kim, S. W. Hong, U. Jeong, T. Xu, and T. P. Russell, “Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order,” Science323(5917), 1030–1033 (2009). [CrossRef] [PubMed]
- P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
- E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
AIP Conf. Proc.
- T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
Appl. Phys. Lett.
- G. Schneider, “Zone plates with high efficiency in high orders of diffraction described by dynamical theory,” Appl. Phys. Lett.71(16), 2242–2244 (1997). [CrossRef]
J. Microsc.
- P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc.226(2), 175–181 (2007). [CrossRef] [PubMed]
J. Vac. Sci. Technol. B
- J. Reinspach, M. Lindblom, M. Bertilson, O. von Hofsten, H. M. Hertz, and A. Holmberg, “13 nm high-efficiency nickel-germanium soft x-ray zone plates,” J. Vac. Sci. Technol. B29(1), 011012 (2011). [CrossRef]
- E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B18(6), 2970–2975 (2000). [CrossRef]
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