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Optics Express

Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 20, Iss. 9 — Apr. 23, 2012
  • pp: 9777–9783

Real space soft x-ray imaging at 10 nm spatial resolution

W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau  »View Author Affiliations

Optics Express, Vol. 20, Issue 9, pp. 9777-9783 (2012)

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Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.

© 2012 OSA

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(340.7440) X-ray optics : X-ray imaging
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
X-ray Optics

Original Manuscript: March 2, 2012
Revised Manuscript: March 26, 2012
Manuscript Accepted: March 29, 2012
Published: April 13, 2012

Virtual Issues
Vol. 7, Iss. 6 Virtual Journal for Biomedical Optics

W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau, "Real space soft x-ray imaging at 10 nm spatial resolution," Opt. Express 20, 9777-9783 (2012)

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  1. I. McNulty, C. Eyberger, and B. Lai, eds., The 10th International Conference on X-ray Microscopy, Vol. 1365 of AIP Conference Proceedings (American Institute of Physics, 2011).
  2. A. B. Butenko, A. A. Leonov, A. N. Bogdanov, U. Rößler, ouml, szlig, and U. K. ler, “Theory of vortex states in magnetic nanodisks with induced Dzyaloshinskii-Moriya interactions,” Phys. Rev. B80(13), 134410 (2009). [CrossRef]
  3. E. V. Shevchenko, D. V. Talapin, N. A. Kotov, S. O’Brien, and C. B. Murray, “Structural diversity in binary nanoparticle superlattices,” Nature439(7072), 55–59 (2006). [CrossRef] [PubMed]
  4. S. Park, D. H. Lee, J. Xu, B. Kim, S. W. Hong, U. Jeong, T. Xu, and T. P. Russell, “Macroscopic 10-terabit-per-square-inch arrays from block copolymers with lateral order,” Science323(5917), 1030–1033 (2009). [CrossRef] [PubMed]
  5. H. Ade and A. P. Hitchcock, “NEXAFS microscopy and resonant scattering: Composition and orientation probed in real and reciprocal space,” Polymer (Guildf.)49(3), 643–675 (2008). [CrossRef]
  6. E. de Smit, I. Swart, J. F. Creemer, G. H. Hoveling, M. K. Gilles, T. Tyliszczak, P. J. Kooyman, H. W. Zandbergen, C. Morin, B. M. Weckhuysen, and F. M. F. de Groot, “Nanoscale chemical imaging of a working catalyst by scanning transmission X-ray microscopy,” Nature456(7219), 222–225 (2008). [CrossRef] [PubMed]
  7. J. Vila-Comamala, K. Jefimovs, J. Raabe, T. Pilvi, R. H. Fink, M. Senoner, A. Maaßdorf, M. Ritala, and C. David, “Advanced thin film technology for ultrahigh resolution X-ray microscopy,” Ultramicroscopy109(11), 1360–1364 (2009). [CrossRef] [PubMed]
  8. D. T. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, Cambridge, U.K., 2000), pp. 361–363, 365–368.
  9. M. Howells, C. Jacobsen, T. Warwick, and A. Bos, “Principles and applications of zone plate x-ray microscopes,” in Science of Microscopy, P. W. Hawkes and J. C. H. Spence, eds. (Springer, New York, 2007), pp 867–868, 870–873.
  10. P. Fischer, “Viewing spin structures with soft x-ray microscopy,” Mater. Today13(9), 14–22 (2010). [CrossRef]
  11. T. Tyliszczak, T. Warwick, A. L. D. Kilcoyne, S. Fakra, D. K. Shuh, T. H. Yoon, J. G. E. Brown, S. Andrews, V. Chembrolu, J. Strachan, and Y. Acremann, “Soft x-ray scanning transmission microscope working in an extended energy range at the advanced light source,” AIP Conf. Proc.705, 1356–1359 (2004). [CrossRef]
  12. G. Schneider, “Zone plates with high efficiency in high orders of diffraction described by dynamical theory,” Appl. Phys. Lett.71(16), 2242–2244 (1997). [CrossRef]
  13. S. Rehbein, S. Heim, P. Guttmann, S. Werner, and G. Schneider, “Ultrahigh-resolution soft-x-ray microscopy with zone plates in high orders of diffraction,” Phys. Rev. Lett.103(11), 110801 (2009). [CrossRef] [PubMed]
  14. W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft X-ray microscopy at a spatial resolution better than 15 nm,” Nature435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
  15. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B18(6), 2970–2975 (2000). [CrossRef]
  16. W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. Anderson, “Hydrogen silsesquioxane double patterning process for 12 nm resolution x-ray zone plates,” J. Vac. Sci. Technol. B27(6), 2606–2611 (2009). [CrossRef]
  17. M. Born and E. Wolf, Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (Cambridge University Press, New York, 1999), pp. 595–597.
  18. W. Chao, Resolution Characterization and Nanofabrication for Soft X-Ray Zone Plate Microscopy (University of California, Berkeley, Berkeley, 2005).
  19. J. M. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, “Resolution determination in X-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J. X-Ray Sci. Tech. (Paris)8, 95–104 (1998).
  20. W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution fresnel zone plate lens based soft x-ray microscopy,” Opt. Express17(20), 17669–17677 (2009). [CrossRef] [PubMed]
  21. M. E. Barnett, “Reciprocity theorem and equivalence of conventional and scanning transmission microscopes,” Optik (Stuttg.)38, 585–588 (1973).
  22. S. Rehbein and G. Schneider, “Volume zone plate development at BESSY,” in Proceedings of the 8th International Conference on X-ray Microscopy (Institute of Pure and Applied Physics, 2006), pp. 103–106.
  23. K. Jefimovs, J. Vila-Comamala, T. Pilvi, J. Raabe, M. Ritala, and C. David, “Zone-doubling technique to produce ultrahigh-resolution x-ray optics,” Phys. Rev. Lett.99(26), 264801 (2007). [CrossRef] [PubMed]
  24. J. Reinspach, M. Lindblom, M. Bertilson, O. von Hofsten, H. M. Hertz, and A. Holmberg, “13 nm high-efficiency nickel-germanium soft x-ray zone plates,” J. Vac. Sci. Technol. B29(1), 011012 (2011). [CrossRef]
  25. P. Emma, R. Akre, J. Arthur, R. Bionta, C. Bostedt, J. Bozek, A. Brachmann, P. Bucksbaum, R. Coffee, F. J. Decker, Y. Ding, D. Dowell, S. Edstrom, A. Fisher, J. Frisch, S. Gilevich, J. Hastings, G. Hays, P. Hering, Z. Huang, R. Iverson, H. Loos, M. Messerschmidt, A. Miahnahri, S. Moeller, H. D. Nuhn, G. Pile, D. Ratner, J. Rzepiela, D. Schultz, T. Smith, P. Stefan, H. Tompkins, J. Turner, J. Welch, W. White, J. Wu, G. Yocky, and J. Galayda, “First lasing and operation of an angstrom-wavelength free-electron laser,” Nat. Photonics4(9), 641–647 (2010). [CrossRef]
  26. P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc.226(2), 175–181 (2007). [CrossRef] [PubMed]

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