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Energy Express

  • Editor: Bernard Kippelen
  • Vol. 20, Iss. S5 — Sep. 10, 2012
  • pp: A713–A721

Conformally direct imprinted inorganic surface corrugation for light extraction enhancement of light emitting diodes

Sarah Kim, Sang-Mook Kim, Hyeong-Ho Park, Dae-Geun Choi, Jae-Woo Jung, Jun Ho Jeong, and Jong-Ryul Jeong  »View Author Affiliations

Optics Express, Vol. 20, Issue S5, pp. A713-A721 (2012)

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We describe the fabrication of corrugated inorganic oxide surface via direct single step conformal nanoimprinting to achieve enhanced light extraction in light emitting diodes (LEDs). Nanoscale zinc oxide (ZnO) and indium tin oxide (ITO) corrugated layer were created on a nonplanar GaN LED surface including metal electrode using ultraviolet (UV) assisted conformal nanoimprinting and subsequent inductively coupled plasma reactive ion etching (ICP-RIE) treatment. The total output powers of the surface corrugated LEDs increased by 45.6% for the patterned sapphire substrate LED and 41.9% for the flat c-plane substrate LED without any degradation of the electrical characteristics. The role of the nanoscale corrugations on the light extraction efficiency enhancement was examined using 3-dimensional finite-difference time-domain (FDTD) analysis. It was found that light scattering by subwavelength scale surface corrugation plays important role to redirect the trapped light into radiative modes. This straightforward inorganic oxide imprint method with inherent flexibility provides an efficient way to generate nanoscale surface textures for the production of high power LEDs and optoelectronic devices.

© 2012 OSA

OCIS Codes
(230.3670) Optical devices : Light-emitting diodes
(160.4236) Materials : Nanomaterials

ToC Category:
Light-Emitting Diodes

Original Manuscript: May 30, 2012
Revised Manuscript: August 5, 2012
Manuscript Accepted: August 15, 2012
Published: August 21, 2012

Sarah Kim, Sang-Mook Kim, Hyeong-Ho Park, Dae-Geun Choi, Jae-Woo Jung, Jun Ho Jeong, and Jong-Ryul Jeong, "Conformally direct imprinted inorganic surface corrugation for light extraction enhancement of light emitting diodes," Opt. Express 20, A713-A721 (2012)

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