A compact and low loss Y-junction for submicron silicon waveguide

doi:10.1364/OE.21.001310

A compact and low loss Y-junction for submicron silicon waveguide

Yi Zhang, Shuyu Yang, Andy Eu-Jin Lim, Guo-Qiang Lo, Christophe Galland, Tom Baehr-Jones, and Michael Hochberg »View Author Affiliations

Optics Express, Vol. 21, Issue 1, pp. 1310-1316 (2013)
http://dx.doi.org/10.1364/OE.21.001310

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Abstract

We designed a compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguide using finite difference time-domain (FDTD) simulation and particle swarm optimization (PSO), and fabricated the device in a 248 nm complementary metal-oxide-semiconductor (CMOS) compatible process. Measured average insertion loss is 0.28 ± 0.02 dB, uniform across an 8-inch wafer. The device footprint is less than 1.2 μm x 2 μm, an order of magnitude smaller than typical multimode interferometers (MMIs) and directional couplers.

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.1360) Optical devices : Beam splitters
(230.7370) Optical devices : Waveguides

ToC Category:
Integrated Optics

History
Original Manuscript: November 8, 2012
Revised Manuscript: December 28, 2012
Manuscript Accepted: December 30, 2012
Published: January 11, 2013

Citation
Yi Zhang, Shuyu Yang, Andy Eu-Jin Lim, Guo-Qiang Lo, Christophe Galland, Tom Baehr-Jones, and Michael Hochberg, "A compact and low loss Y-junction for submicron silicon waveguide," Opt. Express 21, 1310-1316 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-1-1310

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References

R. E. Camacho-Aguilera, Y. Cai, N. Patel, J. T. Bessette, M. Romagnoli, L. C. Kimerling, and J. Michel, “An electrically pumped germanium laser,” Opt. Express20(10), 11316–11320 (2012). [CrossRef] [PubMed]
G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010). [CrossRef]
J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nat. Photonics4(8), 527–534 (2010). [CrossRef]
M. Hochberg and T. Baehr-Jones, “Towards fabless silicon photonics,” Nat. Photonics4(8), 492–494 (2010). [CrossRef]
http://www.opsisfoundry.org, http://www.epixfab.eu .
T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours in silicon photonics,” Nature6, 207–208 (2012).
T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. C. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. E. Lim, T. Y. Liow, S. H. Teo, G. Q. Lo, and M. Hochberg, “Ultralow drive voltage silicon traveling-wave modulator,” Opt. Express20(11), 12014–12020 (2012). [CrossRef] [PubMed]
A. Sakai, T. Fukazawa, and T. Baba, “Low loss ultra-small branches in a silicon photonic wire waveguide,” IEICE Trans. Electron.E85-C, 1033–1038 (2002).
D. Van Thourhout, W. Bogaerts, P. Dumon, G. Roelkens, J. Van Campenhout, and R. Baets, “Functional silicon wire waveguides,” Proc. Integrated Photonics Research and Applications (2006).
Z. Wang, Z. Fan, J. Xia, S. Chen, and J. Yu, “1 x 8 cascaded multimode interference splitter in silicon-on-insulator,” Jpn. J. Appl. Phys.43(8A), 5085–5087 (2004). [CrossRef]
S. H. Tao, Q. Fang, J. F. Song, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Cascade wide-angle Y-junction 1 x 16 optical power splitter based on silicon wire waveguides on silicon-on-insulator,” Opt. Express16(26), 21456–21461 (2008). [CrossRef] [PubMed]
L. H. Frandsen, P. I. Borel, Y. X. Zhuang, A. Harpøth, M. Thorhauge, M. Kristensen, W. Bogaerts, P. Dumon, R. Baets, V. Wiaux, J. Wouters, and S. Beckx, “Ultralow-loss 3-dB photonic crystal waveguide splitter,” Opt. Lett.29(14), 1623–1625 (2004). [CrossRef] [PubMed]
H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett.17(3), 585–587 (2005). [CrossRef]
H. C. Nguyen, S. Hashimoto, M. Shinkawa, and T. Baba, “Compact and fast photonic crystal silicon optical modulators,” Opt. Express20(20), 22465–22474 (2012). [CrossRef] [PubMed]
P. Sanchis, P. Villalba, F. Cuesta, A. Håkansson, A. Griol, J. V. Galán, A. Brimont, and J. Martí, “Highly efficient crossing structure for silicon-on-insulator waveguides,” Opt. Lett.34(18), 2760–2762 (2009). [CrossRef] [PubMed]
J. Kennedy and R. Eberhart, “Particle swarm optimization,” Proc. IEEE Intern. Conf. Neural Networks (1995).
J. Robinson and Y. Rahmat-Samii, “Particle swarm optimization in electromagnectis,” IEEE Trans. Antenn. Propag.52(2), 397–407 (2004). [CrossRef]
http://www.lumerical.com/tcad-products/fdtd/ .
A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011). [CrossRef]
S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crysal circuits in silicon-on-insulator using 193 nm optical lithography,” J. Lightwave Technol.27(18), 4076–4083 (2009). [CrossRef]
W. A. Zortman, D. C. Trotter, and M. R. Watts, “Silicon photonics manufacturing,” Opt. Express18(23), 23598–23607 (2010). [CrossRef] [PubMed]
A. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photonics J.3(3), 567–579 (2011). [CrossRef]

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[1] R. E. Camacho-Aguilera, Y. Cai, N. Patel, J. T. Bessette, M. Romagnoli, L. C. Kimerling, and J. Michel, “An electrically pumped germanium laser,” Opt. Express20(10), 11316–11320 (2012). [CrossRef] [PubMed]

[2] G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010). [CrossRef]

[3] J. Michel, J. Liu, and L. C. Kimerling, “High-performance Ge-on-Si photodetectors,” Nat. Photonics4(8), 527–534 (2010). [CrossRef]

[4] M. Hochberg and T. Baehr-Jones, “Towards fabless silicon photonics,” Nat. Photonics4(8), 492–494 (2010). [CrossRef]

[5] http://www.opsisfoundry.org, http://www.epixfab.eu .

[6] T. Baehr-Jones, T. Pinguet, P. Lo Guo-Qiang, S. Danziger, D. Prather, and M. Hochberg, “Myths and rumours in silicon photonics,” Nature6, 207–208 (2012).

[7] T. Baehr-Jones, R. Ding, Y. Liu, A. Ayazi, T. Pinguet, N. C. Harris, M. Streshinsky, P. Lee, Y. Zhang, A. E. Lim, T. Y. Liow, S. H. Teo, G. Q. Lo, and M. Hochberg, “Ultralow drive voltage silicon traveling-wave modulator,” Opt. Express20(11), 12014–12020 (2012). [CrossRef] [PubMed]

[8] A. Sakai, T. Fukazawa, and T. Baba, “Low loss ultra-small branches in a silicon photonic wire waveguide,” IEICE Trans. Electron.E85-C, 1033–1038 (2002).

[9] D. Van Thourhout, W. Bogaerts, P. Dumon, G. Roelkens, J. Van Campenhout, and R. Baets, “Functional silicon wire waveguides,” Proc. Integrated Photonics Research and Applications (2006).

[10] Z. Wang, Z. Fan, J. Xia, S. Chen, and J. Yu, “1 x 8 cascaded multimode interference splitter in silicon-on-insulator,” Jpn. J. Appl. Phys.43(8A), 5085–5087 (2004). [CrossRef]

[11] S. H. Tao, Q. Fang, J. F. Song, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Cascade wide-angle Y-junction 1 x 16 optical power splitter based on silicon wire waveguides on silicon-on-insulator,” Opt. Express16(26), 21456–21461 (2008). [CrossRef] [PubMed]

[12] L. H. Frandsen, P. I. Borel, Y. X. Zhuang, A. Harpøth, M. Thorhauge, M. Kristensen, W. Bogaerts, P. Dumon, R. Baets, V. Wiaux, J. Wouters, and S. Beckx, “Ultralow-loss 3-dB photonic crystal waveguide splitter,” Opt. Lett.29(14), 1623–1625 (2004). [CrossRef] [PubMed]

[13] H. Yamada, T. Chu, S. Ishida, and Y. Arakawa, “Optical directional coupler based on Si-wire waveguides,” IEEE Photon. Technol. Lett.17(3), 585–587 (2005). [CrossRef]

[14] H. C. Nguyen, S. Hashimoto, M. Shinkawa, and T. Baba, “Compact and fast photonic crystal silicon optical modulators,” Opt. Express20(20), 22465–22474 (2012). [CrossRef] [PubMed]

[15] P. Sanchis, P. Villalba, F. Cuesta, A. Håkansson, A. Griol, J. V. Galán, A. Brimont, and J. Martí, “Highly efficient crossing structure for silicon-on-insulator waveguides,” Opt. Lett.34(18), 2760–2762 (2009). [CrossRef] [PubMed]

[16] J. Kennedy and R. Eberhart, “Particle swarm optimization,” Proc. IEEE Intern. Conf. Neural Networks (1995).

[17] J. Robinson and Y. Rahmat-Samii, “Particle swarm optimization in electromagnectis,” IEEE Trans. Antenn. Propag.52(2), 397–407 (2004). [CrossRef]

[18] http://www.lumerical.com/tcad-products/fdtd/ .

[19] A. Mekis, S. Gloeckner, G. Masini, A. Narasimha, T. Pinguet, S. Sahni, and P. De Dobbelaere, “A grating-coupler-enabled CMOS photonics platform,” IEEE J. Sel. Top. Quantum Electron.17(3), 597–608 (2011). [CrossRef]

[20] S. K. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, “Fabrication of photonic wire and crysal circuits in silicon-on-insulator using 193 nm optical lithography,” J. Lightwave Technol.27(18), 4076–4083 (2009). [CrossRef]

[21] W. A. Zortman, D. C. Trotter, and M. R. Watts, “Silicon photonics manufacturing,” Opt. Express18(23), 23598–23607 (2010). [CrossRef] [PubMed]

[22] A. Krishnamoorthy, X. Zheng, G. Li, J. Yao, T. Pinguet, A. Mekis, H. Thacker, I. Shubin, Y. Luo, K. Raj, and J. E. Cunningham, “Exploiting CMOS manufacturing to reduce tuning requirements for resonant optical devices,” IEEE Photonics J.3(3), 567–579 (2011). [CrossRef]

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A compact and low loss Y-junction for submicron silicon waveguide