OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 1 — Jan. 14, 2013
  • pp: 544–555

Silicon on ultra-low-loss waveguide photonic integration platform

Jared F. Bauters, Michael L. Davenport, Martijn J. R. Heck, J. K. Doylend, Arnold Chen, Alexander W. Fang, and John E. Bowers  »View Author Affiliations

Optics Express, Vol. 21, Issue 1, pp. 544-555 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (1446 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We demonstrate a novel integrated silicon and ultra-low-loss Si3N4 waveguide platform. Coupling between layers is achieved with (0.4 ± 0.2) dB of loss per transition and a 20 nm 3-dB bandwidth for one tapered coupler design and with (0.8 ± 0.2) dB of loss per transition and a 100 nm 3-dB bandwidth for another. The minimum propagation loss measured in the ultra-low-loss waveguides is 1.2 dB/m in the 1590 nm wavelength regime.

© 2013 OSA

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.7390) Optical devices : Waveguides, planar

ToC Category:
Integrated Optics

Original Manuscript: September 26, 2012
Revised Manuscript: November 3, 2012
Manuscript Accepted: November 5, 2012
Published: January 7, 2013

Jared F. Bauters, Michael L. Davenport, Martijn J. R. Heck, J. K. Doylend, Arnold Chen, Alexander W. Fang, and John E. Bowers, "Silicon on ultra-low-loss waveguide photonic integration platform," Opt. Express 21, 544-555 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. D. T. Spencer, Y. Tang, J. F. Bauters, M. J. R. Heck, and J. E. Bowers, “Integrated Si3N4/SiO2 ultra high q ring resonators,” in Proceedings of IEEE Photonics Conference (IEEE, 2012) 141–142.
  2. F. Vollmer, D. Braun, A. Libchaber, M. Khoshsima, I. Teraoka, and S. Arnold, “Protein detection by optical shift of a resonant microcavity,” Appl. Phys. Lett.80(21), 4057–4059 (2002). [CrossRef]
  3. C. Ciminelli, F. Dell’Olio, C. E. Campanella, and M. N. Armenise, “Photonic technologies for angular velocity sensing,” Adv. Opt Photon.2(3), 370–404 (2010). [CrossRef]
  4. K. Horikawa, I. Ogawa, T. Kitoh, and H. Ogawa, “Silica-based integrated planar lightwave true-time-delay network for microwave antenna applications,” in Proceedings of the Optical Fiber Communication Conference2, 100–101 (1996).
  5. X. S. Yao and L. Maleki, “Optoelectronic microwave oscillator,” J. Opt. Soc. Am. B13(8), 1725–1735 (1996). [CrossRef]
  6. D. Liang and J. E. Bowers, “integrated optoelectronic devices on silicon,” in MRS Proceedings1396, (2012).
  7. T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R. Kou, H. Shinojima, and S. Itabashi, “Monolithic integration of silicon-, germanium-, and silica-based optical devices for telecommunications applications,” IEEE Journ. of Sel. Top. in Quant. Elec.17, 516–525 (2011).
  8. L. Agazzi, J. D. B. Bradley, M. Dijkstra, F. Ay, G. Roelkens, R. Baets, K. Wörhoff, and M. Pollnau, “Monolithic integration of erbium-doped amplifiers with silicon-on-insulator waveguides,” Opt. Express18(26), 27703–27711 (2010). [CrossRef] [PubMed]
  9. L. Chen, C. R. Doerr, and Y. Chen, “Polarization-Diversified DWDM Receiver on silicon free of polarization-dependent wavelength shift,” in Proceedings of OFC, (Optical Society of America, 2012), paper OWG3.7.
  10. J. F. Bauters, M. J. R. Heck, D. D. John, J. S. Barton, C. M. Bruinink, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding,” Opt. Express19(24), 24090–24101 (2011). [CrossRef] [PubMed]
  11. A. M. Agarwal, L. Liao, J. S. Foresi, M. R. Black, X. Duan, and L. C. Kimerling, “Low-loss polycrystalline silicon waveguides for silicon photonics,” J. Appl. Phys.80(11), 6120–6123 (1996). [CrossRef]
  12. J. F. Bauters, M. J. R. Heck, D. John, D. Dai, M. C. Tien, J. S. Barton, A. Leinse, R. G. Heideman, D. J. Blumenthal, and J. E. Bowers, “Ultra-low-loss high-aspect-ratio Si3N4 waveguides,” Opt. Express19(4), 3163–3174 (2011). [CrossRef] [PubMed]
  13. J. F. Bauters, M. J. R. Heck, D. Dai, D. D. John, J. S. Barton, D. J. Blumenthal, and J. E. Bowers, “High Extinction, Broadband, and Low Loss Planar Waveguide Polarizers,” in Proceedings of IPR, (Optical Society of America, 2012), paper ITu2B.2.
  14. A. Yariv, Optical Electronics in Modern Communications Fifth Edition 526–531 (Oxford University Press, 1997).
  15. G. Roelkens, P. Dumon, W. Bogaerts, D. V. Thourhout, and R. Baets, “Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography,” Phot. Tech. Lett.17(12), 1–3 (2005). [CrossRef]
  16. M. G. F. Wilson and G. A. Teh, “Tapered optical directional coupler,” IEEE Trans. on Micr. Theory and Tech.23(1), 85–92 (1975). [CrossRef]
  17. D. Dai, Y. Tang, and J. E. Bowers, “Mode conversion in tapered submicron silicon ridge optical waveguides,” Opt. Express20(12), 13425–13439 (2012). [CrossRef] [PubMed]
  18. H. Lee, T. Chen, J. Li, O. Painter, and K. J. Vahala, “Ultra-low-loss optical delay line on a silicon chip,” Nat. Comm.3, 1–7 (2012). [CrossRef]
  19. J. W. Nicholson, A. D. Yablon, S. Ramachandran, and S. Ghalmi, “Spatially and spectrally resolved imaging of modal content in large-mode-area fibers,” Opt. Express16(10), 7233–7243 (2008). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited