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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 1 — Jan. 14, 2013
  • pp: 626–630

Sub-wavelength pattern generation by laser direct writing via repeated irradiation

Jan-Hendrik Klein-Wiele and Peter Simon  »View Author Affiliations


Optics Express, Vol. 21, Issue 1, pp. 626-630 (2013)
http://dx.doi.org/10.1364/OE.21.000626


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Abstract

A simple technique is presented allowing the fabrication of high density periodic patterns via direct laser ablation. Applying fluence control for reducing the ablated feature sizes combined with lateral translation of an interference pattern between two (or more) irradiation cycles, sub-wavelength period patterns (< 200 nm) are created. Variation of the amount and direction of translation and the applied intensities during subsequent irradiation steps leads to variable pattern design as demonstrated for polymeric and silicon samples.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Laser Microfabrication

History
Original Manuscript: November 8, 2012
Revised Manuscript: December 13, 2012
Manuscript Accepted: December 19, 2012
Published: January 7, 2013

Citation
Jan-Hendrik Klein-Wiele and Peter Simon, "Sub-wavelength pattern generation by laser direct writing via repeated irradiation," Opt. Express 21, 626-630 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-1-626


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References

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