A model of miniaturized space-modulated Fourier transform infrared spectrometer (FTIR) is given. The two step mirrors as the key components are designed and a lithography-electroplating technique used to fabricate the small step mirror is proposed. We analyze the effect of the experiment results resulted from fabricating technics on the recovery spectrum in theory, and demonstrate that the lithography-electroplating technique is an effective method to fabricate the step mirror, which make miniaturized FTIR realized. We believe that the performances of FTIR can be better realized by optimizing experimental conditions to make this fabricating method more attractive.

© 2013 OSA

1. K. D. Moeller, “Miniaturized wavefront-dividing interferometers without moving parts for field and space applications,” Proc. SPIE1992, 130–139 (1993). [CrossRef]
2. K. D. Möller, “Wave-front-dividing array interferometers without moving parts for real-time spectroscopy from the IR to the UV,” Appl. Opt.34(9), 1493–1501 (1995). [CrossRef] [PubMed]
3. F. Brachet, P. J. Hébert, E. Cansot, C. Buil, A. Lacan, L. Roucayrol, E. Courau, F. Bernard, C. Casteras, J. Loesel, and C. Pierangelo, “Static Fourier transform spectroscopy breadboards for atmospheric chemistry and climate,” Proc. SPIE7100, 710019, 710019-11 (2008). [CrossRef]
4. A. Lacan, F. M. Bréon, A. Rosak, F. Brachet, L. Roucayrol, P. Etcheto, C. Casteras, and Y. Salaün, “A static Fourier transform spectrometer for atmospheric sounding: concept and experimental implementation,” Opt. Express18(8), 8311–8331 (2010). [CrossRef] [PubMed]
5. E. V. Ivanov, “Static Fourier transform spectroscopy with enhanced resolving power,” J. Opt A. Pure Appl. Opt.2(6), 519–528 (2000). [CrossRef]
6. Y. M. Kong, J. Q. Liang, Z. Z. Liang, B. Wang, and J. Zhang, “Micro assembled Fourier transform spectrometer,” Proc. SPIE7283, 728304, 728304-5 (2009). [CrossRef]
7. B. Wang, Z. Z. Liang, Y. M. Kong, J. Q. Liang, J. G. Fu, Y. Zheng, W. B. Zhu, J. G. Lv, W. B. Wang, P. Shu, and Z. Jun, “Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer,” Acta Phys. Sin.59, 907–912 (2010).
8. C. Feng, B. Wang, Z. Z. Liang, and J. Q. Liang, “Miniaturization of step mirrors in a static Fourier transform spectrometer theory and simulation,” J. Opt. Soc. Am. B28(1), 128–133 (2011). [CrossRef]
9. C. Feng, J. Q. Liang, and Z. Z. Liang, “Spectrum constructing with nonuniform samples using least-squares approximation by cosine polynomials,” Appl. Opt.50, 6377–6383 (2011). [CrossRef] [PubMed]
10. B. K. Avrit, E. W. Maxwell, L. M. Huynh, and E. S. Capsuto, “Characterization of an Ultra-Thick Positive Photoresist for Electroplating Applications,” Proc. SPIE5376, 929–938 (2004). [CrossRef]

Acta Phys. Sin.

• B. Wang, Z. Z. Liang, Y. M. Kong, J. Q. Liang, J. G. Fu, Y. Zheng, W. B. Zhu, J. G. Lv, W. B. Wang, P. Shu, and Z. Jun, “Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer,” Acta Phys. Sin.59, 907–912 (2010).

Appl. Opt.

• K. D. Möller, “Wave-front-dividing array interferometers without moving parts for real-time spectroscopy from the IR to the UV,” Appl. Opt.34(9), 1493–1501 (1995). [CrossRef] [PubMed]
• C. Feng, J. Q. Liang, and Z. Z. Liang, “Spectrum constructing with nonuniform samples using least-squares approximation by cosine polynomials,” Appl. Opt.50, 6377–6383 (2011). [CrossRef] [PubMed]

J. Opt A. Pure Appl. Opt.

• E. V. Ivanov, “Static Fourier transform spectroscopy with enhanced resolving power,” J. Opt A. Pure Appl. Opt.2(6), 519–528 (2000). [CrossRef]

J. Opt. Soc. Am. B

• C. Feng, B. Wang, Z. Z. Liang, and J. Q. Liang, “Miniaturization of step mirrors in a static Fourier transform spectrometer theory and simulation,” J. Opt. Soc. Am. B28(1), 128–133 (2011). [CrossRef]

Opt. Express

• A. Lacan, F. M. Bréon, A. Rosak, F. Brachet, L. Roucayrol, P. Etcheto, C. Casteras, and Y. Salaün, “A static Fourier transform spectrometer for atmospheric sounding: concept and experimental implementation,” Opt. Express18(8), 8311–8331 (2010). [CrossRef] [PubMed]

Proc. SPIE

• K. D. Moeller, “Miniaturized wavefront-dividing interferometers without moving parts for field and space applications,” Proc. SPIE1992, 130–139 (1993). [CrossRef]
• F. Brachet, P. J. Hébert, E. Cansot, C. Buil, A. Lacan, L. Roucayrol, E. Courau, F. Bernard, C. Casteras, J. Loesel, and C. Pierangelo, “Static Fourier transform spectroscopy breadboards for atmospheric chemistry and climate,” Proc. SPIE7100, 710019, 710019-11 (2008). [CrossRef]
• Y. M. Kong, J. Q. Liang, Z. Z. Liang, B. Wang, and J. Zhang, “Micro assembled Fourier transform spectrometer,” Proc. SPIE7283, 728304, 728304-5 (2009). [CrossRef]
• B. K. Avrit, E. W. Maxwell, L. M. Huynh, and E. S. Capsuto, “Characterization of an Ultra-Thick Positive Photoresist for Electroplating Applications,” Proc. SPIE5376, 929–938 (2004). [CrossRef]

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