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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 1 — Jan. 14, 2013
  • pp: 960–967

Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition

Chun Guo, Mingdong Kong, Dawei Lin, Cunding Liu, and Bincheng Li  »View Author Affiliations


Optics Express, Vol. 21, Issue 1, pp. 960-967 (2013)
http://dx.doi.org/10.1364/OE.21.000960


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Abstract

Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth.

© 2013 OSA

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

History
Original Manuscript: November 6, 2012
Revised Manuscript: December 17, 2012
Manuscript Accepted: December 19, 2012
Published: January 9, 2013

Citation
Chun Guo, Mingdong Kong, Dawei Lin, Cunding Liu, and Bincheng Li, "Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition," Opt. Express 21, 960-967 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-1-960


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References

  1. M. C. Liu, C. C. Lee, M. Kaneko, K. Nakahira, and Y. Takano, “Microstructure of magnesium fluoride films deposited by boat evaporation at 193 nm,” Appl. Opt.45(28), 7319–7324 (2006). [CrossRef] [PubMed]
  2. K. Iwahori, M. Furuta, Y. Taki, T. Yamamura, and A. Tanaka, “Optical properties of fluoride thin films deposited by RF magnetron sputtering,” Appl. Opt.45(19), 4598–4602 (2006). [CrossRef] [PubMed]
  3. M. Bischoff, M. Sode, D. Gäbler, H. Bernitzki, C. Zaczek, N. Kaiser, and A. Tünnermann, “Metal fluoride coatings prepared by ion-assisted deposition,” Proc. SPIE7101, 71010L, 71010L-10 (2008). [CrossRef]
  4. T. Yoshida, K. Nishimoto, K. Sekine, and K. Etoh, “Fluoride antireflection coatings for deep ultraviolet optics deposited by ion-beam sputtering,” Appl. Opt.45(7), 1375–1379 (2006). [CrossRef] [PubMed]
  5. T. Murata, H. Isgizawa, I. Motoyama, and A. Tanaka, “Investigations of MgF2 optical thin films prepared from autoclaved sol,” J. Sol-Gel Sci. Technol.32(1-3), 161–165 (2004). [CrossRef]
  6. P. Kelkar, B. Tirri, R. Wilklow, and D. Peterson, “Deposition and characterization of challenging DUV coatings,” Proc. SPIE7067, 706708, 706708-8 (2008). [CrossRef]
  7. C. Zaczek, S. Müllender, H. Enkisch, and F. Bijkerk, “Coatings for next generation lithography,” Proc. SPIE7101, 71010X, 71010X-10 (2008). [CrossRef]
  8. C. Zaczek, A. Pazidis, and H. Feldermann, “High-performance optical coating for VUV lithography application,” in Optical Interference Coatings Topic meeting 2007-OSA Technical Digest Series (Optical Society of America, 2007), paper FA1.
  9. C. C. Jaing, M. C. Liu, C. C. Lee, W. H. Cho, W. T. Shen, C. J. Tang, and B. H. Liao, “Residual stress in obliquely deposited MgF2 thin films,” Appl. Opt.47(13), C266–C270 (2008). [CrossRef] [PubMed]
  10. J. Wang, R. Maier, P. G. Dewa, H. Schreiber, R. A. Bellman, and D. D. Elli, “Nanoporous structure of a GdF(3) thin film evaluated by variable angle spectroscopic ellipsometry,” Appl. Opt.46(16), 3221–3226 (2007). [CrossRef] [PubMed]
  11. C. Guo, M. Kong, W. Gao, and B. Li, “Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements,” Opt. Lett. (to be published).
  12. M. F. Al-Kuhaili, E. E. Khawaja, and S. M. A. Durrani, “Determination of the optical constants (n and k) of inhomogeneous thin films with linear index profiles,” Appl. Opt.45(19), 4591–4597 (2006). [CrossRef] [PubMed]
  13. C. K. Carniglia and D. G. Jensen, “Single-layer model for surface roughness,” Appl. Opt.41(16), 3167–3171 (2002). [CrossRef] [PubMed]
  14. E. D. Palik, Handbook of optical constants of solids II, (Academic Press, Boston, 1991).
  15. M. Vijayakumar, S. Selvasekarapandian, T. Gnanasekaran, S. Fujihara, and S. Koji, “Structural and impedance studies on LaF3 thin films prepared by vacuum evaporation,” J. Fluor. Chem.125(7), 1119–1125 (2004). [CrossRef]
  16. N. Kaiser, “Review of the fundamentals of thin-film growth,” Appl. Opt.41(16), 3053–3060 (2002). [CrossRef] [PubMed]
  17. L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
  18. I. Hodgkinson, Q. H. Wu, and J. Hazel, “Empirical equations for the principal refractive indices and column angle of obliquely deposited films of tantalum oxide, titanium oxide, and zirconium oxide,” Appl. Opt.37(13), 2653–2659 (1998). [CrossRef] [PubMed]
  19. R. N. Tait, T. Smy, and M. J. Brett, “Modeling and characterization of columnar growth in evaporated films,” Thin Solid Films226(2), 196–201 (1993). [CrossRef]

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