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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 1 — Jan. 14, 2013
  • pp: 960–967

Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition

Chun Guo, Mingdong Kong, Dawei Lin, Cunding Liu, and Bincheng Li  »View Author Affiliations

Optics Express, Vol. 21, Issue 1, pp. 960-967 (2013)

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Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth.

© 2013 OSA

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication

ToC Category:
Thin Films

Original Manuscript: November 6, 2012
Revised Manuscript: December 17, 2012
Manuscript Accepted: December 19, 2012
Published: January 9, 2013

Chun Guo, Mingdong Kong, Dawei Lin, Cunding Liu, and Bincheng Li, "Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition," Opt. Express 21, 960-967 (2013)

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