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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 10 — May. 20, 2013
  • pp: 11638–11651

Phase errors in high line density CGH used for aspheric testing: beyond scalar approximation

S. Peterhänsel, C. Pruss, and W. Osten  »View Author Affiliations


Optics Express, Vol. 21, Issue 10, pp. 11638-11651 (2013)
http://dx.doi.org/10.1364/OE.21.011638


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Abstract

One common way to measure asphere and freeform surfaces is the interferometric Null test, where a computer generated hologram (CGH) is placed in the object path of the interferometer. If undetected phase errors are present in the CGH, the measurement will show systematic errors. Therefore the absolute phase of this element has to be known. This phase is often calculated using scalar diffraction theory. In this paper we discuss the limitations of this theory for the prediction of the absolute phase generated by different implementations of CGH. Furthermore, for regions where scalar approximation is no longer valid, rigorous simulations are performed to identify phase sensitive structure parameters and evaluate fabrication tolerances for typical gratings.

© 2013 OSA

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(050.1755) Diffraction and gratings : Computational electromagnetic methods

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: February 27, 2013
Revised Manuscript: April 12, 2013
Manuscript Accepted: April 26, 2013
Published: May 6, 2013

Citation
S. Peterhänsel, C. Pruss, and W. Osten, "Phase errors in high line density CGH used for aspheric testing: beyond scalar approximation," Opt. Express 21, 11638-11651 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-10-11638


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