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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 10 — May. 20, 2013
  • pp: 11659–11669

Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8μm

M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens  »View Author Affiliations


Optics Express, Vol. 21, Issue 10, pp. 11659-11669 (2013)
http://dx.doi.org/10.1364/OE.21.011659


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Abstract

The design and characterization of silicon-on-insulator mid-infrared spectrometers operating at 3.8μm is reported. The devices are fabricated on 200mm SOI wafers in a CMOS pilot line. Both arrayed waveguide grating structures and planar concave grating structures were designed and tested. Low insertion loss (1.5-2.5dB) and good crosstalk characteristics (15-20dB) are demonstrated, together with waveguide propagation losses in the range of 3 to 6dB/cm.

© 2013 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(300.6190) Spectroscopy : Spectrometers

ToC Category:
Integrated Optics

History
Original Manuscript: March 6, 2013
Revised Manuscript: April 19, 2013
Manuscript Accepted: April 24, 2013
Published: May 6, 2013

Citation
M. Muneeb, X. Chen, P. Verheyen, G. Lepage, S. Pathak, E. Ryckeboer, A. Malik, B. Kuyken, M. Nedeljkovic, J. Van Campenhout, G. Z. Mashanovich, and G. Roelkens, "Demonstration of Silicon-on-insulator mid-infrared spectrometers operating at 3.8μm," Opt. Express 21, 11659-11669 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-10-11659


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References

  1. E. Hallynck and P. Bienstman, “Integrated optical pressure sensors in silicon-on-insulator,” IEEE Photon. J.4(2), 443–450 (2012). [CrossRef]
  2. M. C. Estevez, M. Alvarez, and L. M. Lechuga, “Integrated optical devices for lab-on-a-chip biosensing applications,” Laser Photon. Rev.6(4), 463–487 (2012). [CrossRef]
  3. K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express15(12), 7610–7615 (2007). [CrossRef] [PubMed]
  4. G. Roelkens, W. M. J. Green, B. Kuyken, X. Liu, N. Hattasan, A. Gassenq, L. Cerutti, J. B. Rodriguez, R. M. Osgood, E. Tournie, and R. Baets, “III-V/silicon photonics for short-wave infrared spectroscopy,” J. Quantum Electron.48(2), 292–298 (2012). [CrossRef]
  5. X. Liu, B. Kuyken, G. Roelkens, R. Baets, R. M. Osgood, and W. M. J. Green, “Bridging the Mid-Infrared-to-Telecom Gap with Silicon Nanophotonic Spectral Translation,” Nat. Photonics6(10), 667–671 (2012). [CrossRef]
  6. R. Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics4(8), 495–497 (2010). [CrossRef]
  7. R. A. Soref, S. J. Emelett, and W. R. Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt.8(10), 840–848 (2006). [CrossRef]
  8. http://www.epixfab.eu/
  9. G. Z. Mashanovich, M. M. Milošević, M. Nedeljkovic, N. Owens, B. Xiong, E. J. Teo, and Y. Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express19(8), 7112–7119 (2011). [CrossRef] [PubMed]
  10. M. M. Milosevic, M. Nedeljkovic, T. B. Masaud, E. Jaberansary, H. M. H. Chong, N. G. Emerson, G. T. Reed, and G. Z. Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett.101(12), 121105 (2012). [CrossRef]
  11. C. Reimer, M. Nedeljkovic, D. J. M. Stothard, M. O. S. Esnault, C. Reardon, L. O’Faolain, M. Dunn, G. Z. Mashanovich, and T. F. Krauss, “Mid-infrared photonic crystal waveguides in silicon,” Opt. Express20(28), 29361–29368 (2012). [CrossRef] [PubMed]
  12. http://www.photond.com/products/fimmwave.htm
  13. K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, and F. Cerrina, “Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction,” Opt. Lett.26(23), 1888–1890 (2001). [CrossRef] [PubMed]
  14. Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, “Low Loss (~6.45dB/cm) Sub-Micron Polycrystalline Silicon Waveguide Integrated with Efficient SiON Waveguide Coupler,” Opt. Express16(9), 6425–6432 (2008). [CrossRef] [PubMed]
  15. M. K. Smit and C. Van Dam, “Phasar-based wdm-devices: Principles, design and applications,” IEEE J. Sel. Top. Quantum Electron.2(2), 236–250 (1996). [CrossRef]
  16. W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, and R. Baets, “Compact wavelength selective functions in silicon-on-insulator photonic wires,” IEEE J. Sel. Top. Quantum Electron.12(6), 1394–1401 (2006). [CrossRef]
  17. W. Bogaerts, S. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, “Silicon-on-Insulator Spectral Filters Fabricated with CMOS Technology,” IEEE J. Sel. Top. Quantum Electron.16(1), 33–44 (2010). [CrossRef]
  18. R. Marz, Integrated Optics, Design and Modeling. (Artech House Inc., 1994)
  19. J. Brouckaert, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, “Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform,” J. Lightwave Technol.25(5), 1269–1275 (2007). [CrossRef]

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