OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 10 — May. 20, 2013
  • pp: 12776–12782

50-Gb/s silicon optical modulator with traveling-wave electrodes

Xiaoguang Tu, Tsung-Yang Liow, Junfeng Song, Xianshu Luo, Qing Fang, Mingbin Yu, and Guo-Qiang Lo  »View Author Affiliations

Optics Express, Vol. 21, Issue 10, pp. 12776-12782 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (1315 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We demonstrate silicon Mach-Zehnder Interferometer (MZI) optical modulator with 50.1-Gb/s data rate and 5.56 dB dynamic extinction ratios. The phase shifter is composed by a 4 mm-long reverse-biased p-n junction with a modulation efficiency (Vπ·Lπ) of ~26.7 V·mm and phase shifter loss of ~1.04 dB/mm at Vbias = −6 V. The measured electro-optic bandwidth reaches 25.6 GHz at Vbias = −5 V. Compensation doping method and low loss traveling-wave electrodes are utilized to improve the modulator performance. Measurement result demonstrates that reasonable choosing of working point and doping profile of the silicon optical modulator is critical in order to match the performance requirement of the real application.

© 2013 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.3990) Optical devices : Micro-optical devices
(230.7370) Optical devices : Waveguides
(250.7360) Optoelectronics : Waveguide modulators

ToC Category:
Integrated Optics

Original Manuscript: December 21, 2012
Revised Manuscript: March 6, 2013
Manuscript Accepted: March 6, 2013
Published: May 16, 2013

Xiaoguang Tu, Tsung-Yang Liow, Junfeng Song, Xianshu Luo, Qing Fang, Mingbin Yu, and Guo-Qiang Lo, "50-Gb/s silicon optical modulator with traveling-wave electrodes," Opt. Express 21, 12776-12782 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y.-K. Chen, T. Conway, D. M. Gill, M. Grove, C.-Y. Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. I. Sparacin, K.-Y. Tu, A. E. White, and C. W. Wong, “Electronic-photonic integrated circuits on the CMOS platform,” Proc. SPIE6125, 612502–1, 612502-10 (2006). [CrossRef]
  2. M. Paniccia, “Integrating silicon photonics,” Nat. Photonics4(8), 498–499 (2010). [CrossRef]
  3. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, “Silicon optical modulators,” Nat. Photonics4(8), 518–526 (2010). [CrossRef]
  4. J. Michel, JF. Liu and L. C. Kimerling, “High-performance Ge-on-Si photo detectors,” Nat. Photonics4, 527–534 (2010).
  5. T. Y. Liow, J. F. Song, X. G. Tu, E. J. Lim, Q. Fang, N. Duan, M. B. Yu, and G. Q. Lo, “Silicon optical interconnect device technologies for 40Gb/s and beyond,” IEEE J. Sel. Top. Quantum. Electron.PP(1)
  6. K. Goi, K. Oda, H. Kusaka, Y. Terada, K. Ogawa, T. Y. Liow, X. G. Tu, G. Q. Lo, and D. L. Kwong, “11-Gb/s 80-km transmission performance of zero-chirp silicon Mach-Zehnder modulator,” Opt. Express20(26), B350–B356 (2012). [CrossRef] [PubMed]
  7. P. Dong, L. Chen, C. J. Xie, L. L. Buhl, and Y. K. Chen, “50-Gb/s silicon quadrature phase-shift keying modulator,” Opt. Express20(19), 21181–21186 (2012). [CrossRef] [PubMed]
  8. L. Chen, C. R. Doerr, P. Dong, and Y. K. Chen, “Monolithic silicon chip with 10 modulator channels at 25 Gbps and 100-GHz spacing,” Opt. Express19(26), B946–B951 (2011). [CrossRef] [PubMed]
  9. P. Dong, C. J. Xie, L. Chen, L. L. Buhl, and Y. K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” Opt. Express20(26), B624–B629 (2012). [CrossRef] [PubMed]
  10. X. Xiao, X. Y. Li, H. Xu, Y. T. Hu, K. Xiong, Z. Y. Li, T. Chu, J. Z. Yu, and Y. D. Yu, “44Gbit/s silicon micro-ring modulators based on zigzag PN junctions,” IEEE Photon. Technol. Lett.24(19), 1712–1714 (2012). [CrossRef]
  11. P. Dong, L. Chen, and Y.-K. Chen, “High-speed low-voltage single-drive push-pull silicon Mach-Zehnder modulators,” Opt. Express20(6), 6163–6169 (2012). [CrossRef] [PubMed]
  12. D. J. Thomson, F. Y. Gardes, J. M. Fedeli, S. Zlatanovic, Y. F. Hu, B. P. P. Kuo, E. Myslivets, N. Alic, S. Radic, G. Z. Mashanovich, and G. T. Reed, “50-Gb/s Silicon Optical Modulator,” IEEE Photon. Technol. Lett.24(4), 234–236 (2012). [CrossRef]
  13. X. G. Tu, T. Y. Liow, J. F. Song, M. B. Yu, and G. Q. Lo, “Fabrication of low loss and high speed silicon optical modulator using doping compensation method,” Opt. Express19(19), 18029–18035 (2011). [CrossRef] [PubMed]
  14. W. R. Eisenstadt and Y. S. Eo, “S-Parameter-Based IC Interconnect transmission line characterization,” IEEE. Trans. Compon. Manufact. Technol.15(4), 483–490 (1992). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited