OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 10 — May. 20, 2013
  • pp: 12831–12842

Emission properties of ns and ps laser-induced soft x-ray sources using pulsed gas jets

Matthias Müller, Frank-Christian Kühl, Peter Großmann, Pavel Vrba, and Klaus Mann  »View Author Affiliations


Optics Express, Vol. 21, Issue 10, pp. 12831-12842 (2013)
http://dx.doi.org/10.1364/OE.21.012831


View Full Text Article

Enhanced HTML    Acrobat PDF (5848 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The influcence of the pulse duration on the emission characteristics of nearly debris-free laser-induced plasmas in the soft x-ray region (λ ≈1-5 nm) was investigated, using six different target gases from a pulsed jet. Compared to ns pulses of the same energy, a ps laser generates a smaller, more strongly ionized plasma, being about 10 times brighter than the ns laser plasma. Moreover, the spectra are considerably shifted towards shorter wavelengths. Electron temperatures and densities of the plasma are obtained by comparing the spectra with model calculations using a magneto-hydrodynamic code.

© 2013 OSA

OCIS Codes
(300.6170) Spectroscopy : Spectra
(350.5400) Other areas of optics : Plasmas
(260.6048) Physical optics : Soft x-rays

ToC Category:
X-ray Optics

History
Original Manuscript: March 22, 2013
Revised Manuscript: May 8, 2013
Manuscript Accepted: May 10, 2013
Published: May 17, 2013

Citation
Matthias Müller, Frank-Christian Kühl, Peter Großmann, Pavel Vrba, and Klaus Mann, "Emission properties of ns and ps laser-induced soft x-ray sources using pulsed gas jets," Opt. Express 21, 12831-12842 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-10-12831


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. I. Fomenkov, N. Böwering, D. Brandt, D. Brown, A. Bykanov, A. Ershov, B. La Fontaine, M. Lercel, and D. Myers, “Light sources for EUV lithography at the 22-nm node and beyond,” Proc. SPIE8322, 83222N, 83222N-9 (2012). [CrossRef]
  2. B. Wu and A. Kumar, “Extreme ultraviolet lithography: A review,” J. Vac. Sci. Technol. B25(6), 1743–1761 (2007). [CrossRef]
  3. I. Turcu, C. Mann, S. Moon, R. Allott, N. Lisi, B. J. Maddison, S. E. Huq, and N. S. Kim, “Deep, three dimensional lithography with a laser-plasma x-ray source at 1nm wavelength,” Microelectron. Eng.35(1-4), 541–544 (1997). [CrossRef]
  4. V. Banine, K. Koshelev, and G. Swinkels, “Physical processes in EUV sources for microlithography,” J. Phys. D Appl. Phys.44(25), 253001 (2011). [CrossRef]
  5. M. Banyay and L. Juschkin, “Table-top reflectometer in the extreme ultraviolet for surface sensitive analysis,” Appl. Phys. Lett.94(6), 063507 (2009). [CrossRef]
  6. A. Bayer, F. Barkusky, S. Döring, P. Großmann, and K. Mann, “Applications of compact laser-driven EUV/XUV plasma sources,” X-Ray Opt. Instrum.2010, 1–9 (2010). [CrossRef]
  7. C. Peth, F. Barkusky, and K. Mann, “Near-edge x-ray absorption fine structure measurements using a laboratory-scale XUV source,” J. Phys. D Appl. Phys.41(10), 105202 (2008). [CrossRef]
  8. R. K. Hocking, S. DeBeer George, K. N. Raymond, K. O. Hodgson, B. Hedman, and E. I. Solomon, “Fe L-edge x-ray absorption spectroscopy determination of differential orbital covalency of siderophore model compounds: electronic structure contributions to high stability constants,” J. Am. Chem. Soc.132(11), 4006–4015 (2010). [CrossRef] [PubMed]
  9. W. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft x-ray microscopy at a spatial resolution better than 15 nm,” Nature435(7046), 1210–1213 (2005). [CrossRef] [PubMed]
  10. P. A. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc.226(2), 175–181 (2007). [CrossRef] [PubMed]
  11. M. Benk, K. Bergmann, D. Schäfer, and T. Wilhein, “Compact soft x-ray microscope using a gas-discharge light source,” Opt. Lett.33(20), 2359–2361 (2008). [CrossRef] [PubMed]
  12. U. Vogt, R. Frueke, T. Wilhein, H. Stollberg, P. Jansson, and H. Hertz, “High-resolution spatial characterization of laser produced plasmas at soft x-ray wavelengths,” Appl. Phys. B78(1), 53–58 (2004). [CrossRef]
  13. C. Peth, A. Kalinin, F. Barkusky, K. Mann, J. P. Toennies, and L. Y. Rusin, “XUV laser-plasma source based on solid Ar filament,” Rev. Sci. Instrum.78(10), 103509 (2007). [CrossRef] [PubMed]
  14. T. Higashiguchi, T. Otsuka, N. Yugami, W. Jiang, A. Endo, B. Li, P. Dunne, and G. O’Sullivan, “Feasibility study of broadband efficient “water window” source,” Appl. Phys. Lett.100(1), 014103 (2012). [CrossRef]
  15. H. Fiedorowicz, A. Bartnik, Z. Patron, and P. Parys, “X-ray emission from laser-irradiated gas puff targets,” Appl. Phys. Lett.62(22), 2778–2780 (1993). [CrossRef]
  16. S. Kranzusch and K. Mann, “Spectral characterization of EUV radiation emitted from a laser-irradiated gas puff target,” Opt. Commun.200(1-6), 223–230 (2001). [CrossRef]
  17. G. Kubiak and M. Richardson, US Patent 5,577,092 (1996).
  18. H. Fiedorowicz, A. Bartnik, H. Daido, I. Choi, M. Suzuki, and S. Yamagami, “Strong extreme ultraviolet emission from a double-stream xenon/helium gas puff target irradiated with a Nd:YAG laser,” Opt. Commun.184(1-4), 161–167 (2000). [CrossRef]
  19. T. Mey, M. Rein, P. Großmann, and K. Mann, “Brilliance improvement of laser-produced soft x-ray plasma by a barrel shock,” New J. Phys.14(7), 073045 (2012). [CrossRef]
  20. U. Vogt, H. Stiel, I. Will, P. Nickles, W. Sandner, M. Wieland, and T. Wilhein, “Influence of laser intensity and pulse duration on the extreme ultraviolet yield from a water jet target laser plasma,” Appl. Phys. Lett.79(15), 2336–2338 (2001). [CrossRef]
  21. J. MacFarlane, C. Rettig, P. Wang, I. Golovkin, and P. Woodruff, “Radiation-hydrodynamics, spectral, and atomic physics modeling of laser-produced plasma EUVL light sources,” Proc. SPIE5751, 588–600 (2005). [CrossRef]
  22. S. Kranzusch, C. Peth, and K. Mann, “Spatial characterization of extreme ultraviolet plasmas generated by laser excitation of xenon gas targets,” Rev. Sci. Instrum.74(2), 969–974 (2003). [CrossRef]
  23. D. Proch and T. Trickl, “A high-intensity multi-purpose piezoelectric pulsed molecular beam source,” Rev. Sci. Instrum.60(4), 713–716 (1989). [CrossRef]
  24. Y. Ralchenko, A. E. Kramida, J. Reader, and N. A. Team, NIST Atomic Spectra Database 8 (ver. 4.1.0). http://physics.nist.gov/asd [accessed April 2012].
  25. D. Verner, E. Verner, and G. Ferland, “Atomic Data for Permitted Resonance Lines of Atoms and Ions from H to Si, and S, Ar, Ca, and Fe,” At. Data Nucl. Data Tables64, 1–180 (1996). [CrossRef]
  26. L. Podobedova, J. Fuhr, J. Reader, and W. Wiese“Atomic spectral tables for the Chandra x-ray observatory. Part IV. Ne V – Ne VIII,” J. Phys. Chem. Ref. Data33(2), 525–540 (2004).
  27. J. MacFarlane, I. Golovkin, P. Wang, P. Woodruff, and N. Pereyra, “SPECT3D – A multi-dimensional collisional-radiative code for generating diagnostic signatures based on hydrodynamics and PIC simulation output,” H. Ener. Dens. Phys.3(1-2), 181–190 (2007). [CrossRef]
  28. D. McQuarri, Statistical Mechanics (Harper & Row, 1976).
  29. D. Colombant and G. Tonon, “X-ray emission in laser-produced plasmas,” J. Appl. Phys.44(8), 3524–3537 (1973). [CrossRef]
  30. T. Otsuka, D. Kilbane, J. White, T. Higashiguchi, N. Yugami, T. Yatagai, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “Rare-earth plasma extreme ultraviolet sources at 6.5-6.7 nm,” Appl. Phys. Lett.97(11), 111503 (2010). [CrossRef]
  31. E. Gabl, B. Failor, G. Busch, R. Schroeder, D. Ress, and L. Suter, “Plasma evolution from laser-driven gold disks. I. Experiments and results,” Phys. Fluids B2(10), 2437–2447 (1990). [CrossRef]
  32. H. Fiedorowicz, A. Bartnik, M. Szczurek, H. Daido, N. Sakaya, V. Kmetik, Y. Kato, M. Suzuki, M. Matsumura, J. Tajima, T. Nakayama, and T. Wilhein, “Investigation of soft x-ray emission from a gas puff target irradiated with a Nd:YAG laser,” Opt. Commun.163(1-3), 103–114 (1999). [CrossRef]
  33. Y. Li and R. Fedosejevs, “Density measurements of a high-density pulsed gas jet for laser-plasma interaction studies,” Meas. Sci. Technol.5(10), 1197–1201 (1994). [CrossRef]
  34. R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5 nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B101(4), 773–789 (2010). [CrossRef]
  35. B. Li, T. Higashiguchi, T. Otsuka, W. Jiang, A. Endo, P. Dunne, and G. O’Sullivan, “‘Water window’ sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth,” Appl. Phys. Lett.102(4), 041117 (2013). [CrossRef]
  36. W. Kruer, The physics of Laser Plasma Interaction (Westview Press, 2001).
  37. O. F. Hagena, “Nucleation and growth of clusters in expanding nozzle flows,” Surf. Sci.106(1-3), 101–116 (1981). [CrossRef]
  38. T. Ditmire, R. Smith, R. Marjoribanks, G. Kulcsár, and M. Hutchinson, “X-ray yields from Xe clusters heated by short pulse high intensity lasers,” Appl. Phys. Lett.71(2), 166–168 (1997). [CrossRef]
  39. T. Ditmire, T. Donnelly, R. W. Falcone, and M. D. Perry, “Strong x-ray emission from high-temperature plasmas produced by intense irradiation of clusters,” Phys. Rev. Lett.75(17), 3122–3125 (1995). [CrossRef] [PubMed]
  40. P. Vrba, M. Vrbová, P. Brůža, D. Pánek, F. Krejčí, M. Kroupa, and J. Jakůbek, “XUV radiation from gaseous nitrogen and argon target laser plasmas,” J. Phys. Conf. Ser.370, 012049 (2012). [CrossRef]
  41. B. Henke, E. Gullikson, and J. Davis, “X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92,” At. Data Nucl. Data Tables54, 181–342 (1993). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited