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Enhanced broadband and omni-directional performance of polycrystalline Si solar cells by using discrete multilayer antireflection coatingsSeung Jae Oh, Sameer Chhajed, David J. Poxson, Jaehee Cho, E. Fred Schubert, Sung Ju Tark, Donghwan Kim, and Jong Kyu Kim »View Author Affiliations
Seung Jae Oh,1
Sameer Chhajed,1
David J. Poxson,2
Jaehee Cho,2
E. Fred Schubert,2
Sung Ju Tark,3
Donghwan Kim,3
and Jong Kyu Kim1,*
1Department of Materials and Engineering, Pohang University of Science and Technology (POSTECH), Pohang, 790-784, South Korea 2Future Chips Constellation, Department of Electrical, Computer, and Systems Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180, USA 3Department of Materials Science and Engineering, Korea University, Seoul 136-713, South Korea *Corresponding author: kimjk@postech.ac.kr |
Optics Express, Vol. 21, Issue S1, pp. A157-A166 (2013)
http://dx.doi.org/10.1364/OE.21.00A157
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Abstract
The performance enhancement of polycrystalline Si solar cells by using an optimized discrete multilayer anti-reflection (AR) coating with broadband and omni-directional characteristics is presented. Discrete multilayer AR coatings are optimized by a genetic algorithm, and experimentally demonstrated by refractive-index tunable SiO2 nano-helix arrays and co-sputtered (SiO2)x(TiO2)1-x thin film layers. The optimized multilayer AR coating shows a reduced total reflection, leading to the high incident-photon-to-electron conversion efficiency over a correspondingly wide range of wavelengths and incident angles, offering a very promising way to harvest more solar energy by virtually any type of solar cells for a longer time of a day.
© 2012 OSA
OCIS Codes
(040.5350) Detectors : Photovoltaic
(310.1210) Thin films : Antireflection coatings
(310.4165) Thin films : Multilayer design
(310.6628) Thin films : Subwavelength structures, nanostructures
ToC Category:
Photovoltaics
History
Original Manuscript: July 31, 2012
Revised Manuscript: November 29, 2012
Manuscript Accepted: November 29, 2012
Published: December 17, 2012
Citation
Seung Jae Oh, Sameer Chhajed, David J. Poxson, Jaehee Cho, E. Fred Schubert, Sung Ju Tark, Donghwan Kim, and Jong Kyu Kim, "Enhanced broadband and omni-directional performance of polycrystalline Si solar cells by using discrete multilayer antireflection coatings," Opt. Express 21, A157-A166 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-S1-A157
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References
- J. Zhao and M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar cells,” IEEE Trans. Electron. Dev.38(8), 1925–1934 (1991). [CrossRef]
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- J. S. Rayleigh, “On reflection of vibrations at the confines of two media between which the transition is gradual,” Proc. Lond. Math. Soc.S11(1), 51–56 (1879). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- C. C. Striemer and P. M. Fauchet, “Dynamic etching of silicon for broadband antireflection applications,” Appl. Phys. Lett.81(16), 2980–2982 (2002). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- Y. Kanamori, M. Sasaki, and K. Hane, “Broadband antireflection gratings fabricated upon silicon substrates,” Opt. Lett.24(20), 1422–1424 (1999). [CrossRef] [PubMed]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
- D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen,” Annalen der Physik416(7), 636–664 (1935). [CrossRef]
- A. M. Goodman, “Optical interference method for the approximate determination of refractive index and thickness of a transparent layer,” Appl. Opt.17(17), 2779–2787 (1978). [CrossRef] [PubMed]
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
- L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
- D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen,” Annalen der Physik416(7), 636–664 (1935). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- C. C. Striemer and P. M. Fauchet, “Dynamic etching of silicon for broadband antireflection applications,” Appl. Phys. Lett.81(16), 2980–2982 (2002). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- J. Zhao and M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar cells,” IEEE Trans. Electron. Dev.38(8), 1925–1934 (1991). [CrossRef]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- J. S. Rayleigh, “On reflection of vibrations at the confines of two media between which the transition is gradual,” Proc. Lond. Math. Soc.S11(1), 51–56 (1879). [CrossRef]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- C. C. Striemer and P. M. Fauchet, “Dynamic etching of silicon for broadband antireflection applications,” Appl. Phys. Lett.81(16), 2980–2982 (2002). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- J. Zhao and M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar cells,” IEEE Trans. Electron. Dev.38(8), 1925–1934 (1991). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
Adv. Mater. (Deerfield Beach Fla.)
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
Annalen der Physik
- D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen,” Annalen der Physik416(7), 636–664 (1935). [CrossRef]
Appl. Opt.
- A. M. Goodman, “Optical interference method for the approximate determination of refractive index and thickness of a transparent layer,” Appl. Opt.17(17), 2779–2787 (1978). [CrossRef] [PubMed]
Appl. Phys. Express
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
Appl. Phys. Lett.
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- C. C. Striemer and P. M. Fauchet, “Dynamic etching of silicon for broadband antireflection applications,” Appl. Phys. Lett.81(16), 2980–2982 (2002). [CrossRef]
Energy and Environ. Sci.
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
IEEE Trans. Electron. Dev.
- J. Zhao and M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar cells,” IEEE Trans. Electron. Dev.38(8), 1925–1934 (1991). [CrossRef]
J. Mater. Chem.
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
J. Vac. Sci. Technol. B
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
MRS Bull.
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
Nano Lett.
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
Nanotechnology
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
Nat. Nanotechnol.
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
Nat. Photonics
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
Opt. Express
- M. F. Schubert, F. W. Mont, S. Chhajed, D. J. Poxson, J. K. Kim, and E. F. Schubert, “Design of multilayer antireflection coatings made from co-sputtered and low-refractive-index materials by genetic algorithm,” Opt. Express16(8), 5290–5298 (2008). [CrossRef] [PubMed]
Opt. Lett.
- Y. Kanamori, M. Sasaki, and K. Hane, “Broadband antireflection gratings fabricated upon silicon substrates,” Opt. Lett.24(20), 1422–1424 (1999). [CrossRef] [PubMed]
- D. J. Poxson, M. F. Schubert, F. W. Mont, E. F. Schubert, and J. K. Kim, “Broadband omnidirectional antireflection coatings optimized by genetic algorithm,” Opt. Lett.34(6), 728–730 (2009). [CrossRef] [PubMed]
Phys. Status Solidi., C Curr. Top. Solid State Phys.
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
Proc. Lond. Math. Soc.
- J. S. Rayleigh, “On reflection of vibrations at the confines of two media between which the transition is gradual,” Proc. Lond. Math. Soc.S11(1), 51–56 (1879). [CrossRef]
Thin Solid Films
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
2011, Hyun Lee, Appl. Phys. Lett.
- S. Hyun Lee, G. Earle Jellison, C. E. Duty, and J. Xu, “Light confinement-induced antireflection of ZnO nanocones,” Appl. Phys. Lett.99(15), 153113 (2011). [CrossRef]
- Y.-C. Chao, C.-Y. Chen, C.-A. Lin, and J.-H. He, “Light scattering by nanostructured anti-reflection coatings,” Energy and Environ. Sci.4(9), 3436–3441 (2011). [CrossRef]
- S. Chhajed, D. J. Poxson, X. Yan, J. Cho, E. F. Schubert, R. E. Welser, A. K. Sood, and J. K. Kim, “Nanostructured multilayer tailored-refractive-index antireflection coating for glass with broadband and omnidirectional characteristics,” Appl. Phys. Express4(5), 052503 (2011). [CrossRef]
- D. J. Poxson, M.-L. Kuo, F. W. Mont, Y.-S. Kim, X. Yan, R. E. Welser, A. K. Sood, J. Cho, S.-Y. Lin, and E. F. Schubert, “High-performance antireflection coatings utilizing nanoporous layers,” MRS Bull.36(06), 434–438 (2011). [CrossRef]
- M. F. Schubert, D. J. Poxson, F. W. Mont, J. K. Kim, and E. F. Schubert, “Performance of antireflection coatings consisting of multiple discrete layers and comparison with continuously graded antireflection coatings,” Appl. Phys. Express3(8), 082502 (2010). [CrossRef]
- Y.-A. Dai, H.-C. Chang, K.-Y. Lai, C.-A. Lin, R.-J. Chung, G.-R. Lin, and J.-H. He, “Subwavelength Si nanowire arrays for self-cleaning antireflection coatings,” J. Mater. Chem.20(48), 10924–10930 (2010). [CrossRef]
- J. Zhu, Z. Yu, G. F. Burkhard, C.-M. Hsu, S. T. Connor, Y. Xu, Q. Wang, M. McGehee, S. Fan, and Y. Cui, “Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays,” Nano Lett.9(1), 279–282 (2009). [CrossRef] [PubMed]
- P. Yu, C.-H. Chang, C.-H. Chiu, C.-S. Yang, J.-C. Yu, H.-C. Kuo, S.-H. Hsu, and Y.-C. Chang, “Efficiency enhancement of GaAs photovoltaics employing antireflective indium tin oxide nanocolumns,” Adv. Mater. (Deerfield Beach Fla.)21(16), 1618–1621 (2009). [CrossRef]
- J. K. Kim, S. Chhajed, M. F. Schubert, E. F. Schubert, A. J. Fischer, M. H. Crawford, J. Cho, H. Kim, and C. Sone, “Light-extraction enhancement of GaInN light-emitting diodes by graded-refractive-index indium tin oxide anti-reflection contact,” Adv. Mater. (Deerfield Beach Fla.)20(4), 801–804 (2008). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett.93(25), 251108 (2008). [CrossRef]
- Y. J. Lee, D. S. Ruby, D. W. Peters, B. B. McKenzie, and J. W. P. Hsu, “ZnO nanostructures as efficient antireflection layers in solar cells,” Nano Lett.8(5), 1501–1505 (2008). [CrossRef] [PubMed]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics1, 176–179 (2007).
- Y. F. Huang, S. Chattopadhyay, Y. J. Jen, C. Y. Peng, T. A. Liu, Y. K. Hsu, C. L. Pan, H. C. Lo, C. H. Hsu, Y. H. Chang, C. S. Lee, K. H. Chen, and L. C. Chen, “Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures,” Nat. Nanotechnol.2(12), 770–774 (2007). [CrossRef] [PubMed]
- M. Khardani, M. Bouaïcha, and B. Bessaïs, “Bruggeman effective medium approach for modelling optical properties of porous silicon: comparison with experiment,” Phys. Status Solidi., C Curr. Top. Solid State Phys.4(6), 1986–1990 (2007).
- J. Q. Xi, M. Ojha, J. L. Plawsky, W. N. Gill, J. K. Kim, and E. F. Schubert, “Internal high-reflectivity omni-directional reflectors,” Appl. Phys. Lett.87(3), 031111 (2005). [CrossRef]
- C. Lee, S. Y. Bae, S. Mobasser, and H. Manohara, “A Novel Silicon Nanotips Antireflection Surface for the Micro Sun Sensor,” Nano Lett.5(12), 2438–2442 (2005). [CrossRef] [PubMed]
- C. C. Striemer and P. M. Fauchet, “Dynamic etching of silicon for broadband antireflection applications,” Appl. Phys. Lett.81(16), 2980–2982 (2002). [CrossRef]
- K. Hadobás, S. Kirsch, A. Carl, M. Acet, and E. F. Wassermann, “Reflection properties of nanostructure-arrayed silicon surfaces,” Nanotechnology11(3), 161–164 (2000). [CrossRef]
- S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, W. N. Gill, and J. L. Plawsky, “Surface modified spin on xerogel films as interlayer dielectrics,” J. Vac. Sci. Technol. B17(1), 205–212 (1999). [CrossRef]
- L. Abelmann and C. Lodder, “Oblique evaporation and surface diffusion,” Thin Solid Films305(1-2), 1–21 (1997). [CrossRef]
- L. Schirone, G. Sotgiu, and F. P. Califano, “Chemically etched porous silicon as an anti-reflection coating for high efficiency solar cells,” Thin Solid Films297(1-2), 296–298 (1997). [CrossRef]
- J. Zhao and M. A. Green, “Optimized antireflection coatings for high-efficiency silicon solar cells,” IEEE Trans. Electron. Dev.38(8), 1925–1934 (1991). [CrossRef]
- D. A. G. Bruggeman, “Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen Substanzen,” Annalen der Physik416(7), 636–664 (1935). [CrossRef]
- J. S. Rayleigh, “On reflection of vibrations at the confines of two media between which the transition is gradual,” Proc. Lond. Math. Soc.S11(1), 51–56 (1879). [CrossRef]
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