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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 11 — Jun. 3, 2013
  • pp: 13322–13332

Heterodyne common-path grating interferometer with Littrow configuration

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, and Yan-Zou Chen  »View Author Affiliations

Optics Express, Vol. 21, Issue 11, pp. 13322-13332 (2013)

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This paper presents a heterodyne common-path grating interferometer with Littrow configuration (HCGIL). The HCGIL can effectively overcome environmental disturbance effect and the DC offset and the amplitude variation of the measurement signals. Experimental results match well with the HP5529A results for long-range measurements. Results also show that the estimated measurement resolution is 0.15 ± 0.027 nm. The stability of the HCGIL is −0.41 ± 0.23 nm. Therefore, the HCGIL has potential for subnanometer resolution and long-range applications.

© 2013 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 7, 2013
Revised Manuscript: May 15, 2013
Manuscript Accepted: May 17, 2013
Published: May 24, 2013

Chyan-Chyi Wu, Cheng-Chih Hsu, Ju-Yi Lee, and Yan-Zou Chen, "Heterodyne common-path grating interferometer with Littrow configuration," Opt. Express 21, 13322-13332 (2013)

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