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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 11 — Jun. 3, 2013
  • pp: 13342–13350

Homodyne laser Doppler vibrometer on silicon-on-insulator with integrated 90 degree optical hybrids

Yanlu Li and Roel Baets  »View Author Affiliations

Optics Express, Vol. 21, Issue 11, pp. 13342-13350 (2013)

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A miniaturized homodyne laser Doppler vibrometer (LDV) with a compact 90° optical hybrid is experimentally demonstrated on a CMOS compatible silicon-on-insulator (SOI) platform. Optical components on this platform usually have inadequate suppressions of spurious reflections, which significantly influence the performance of the LDV. Numerical compensation methods are implemented to effectively decrease the impact of these spurious reflections. With the help of these compensation methods, measurements for both super-half-wavelength and sub-half-wavelength vibrations are demonstrated. Results show that the minimal detectable velocity is around 1.2 μm/s.

© 2013 OSA

OCIS Codes
(130.6750) Integrated optics : Systems
(280.3340) Remote sensing and sensors : Laser Doppler velocimetry

ToC Category:
Integrated Optics

Original Manuscript: March 21, 2013
Revised Manuscript: May 14, 2013
Manuscript Accepted: May 16, 2013
Published: May 24, 2013

Yanlu Li and Roel Baets, "Homodyne laser Doppler vibrometer on silicon-on-insulator with integrated 90 degree optical hybrids," Opt. Express 21, 13342-13350 (2013)

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