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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 11 — Jun. 3, 2013
  • pp: 13800–13809

Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

Jae-Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, and Olav Solgaard  »View Author Affiliations

Optics Express, Vol. 21, Issue 11, pp. 13800-13809 (2013)

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We present a two-axis electrostatic MEMS scanner with high-reflectivity monolithic single-crystal-silicon photonic crystal (PC) mirrors suitable for applications in harsh environments. The reflective surfaces of the MEMS scanner are transfer-printed PC mirrors with low polarization dependence, low angular dependence, and reflectivity over 85% in the wavelength range of 1490nm~1505nm and above 90% over the wavelength band of 1550~1570nm. In static mode, the scanner has total scan range of 10.2° on one rotation axis and 7.8° on the other. Dynamic operation on resonance increase the scan range to 21° at 608Hz around the outer rotation axis and 9.5° at 1.73kHz about the inner rotation axis.

© 2013 OSA

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(230.4685) Optical devices : Optical microelectromechanical devices
(230.5298) Optical devices : Photonic crystals

ToC Category:
Optical Devices

Original Manuscript: April 3, 2013
Revised Manuscript: May 24, 2013
Manuscript Accepted: May 24, 2013
Published: May 31, 2013

Jae-Woong Jeong, Bryan Park, Hohyun Keum, Seok Kim, John A. Rogers, and Olav Solgaard, "Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors," Opt. Express 21, 13800-13809 (2013)

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