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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 12 — Jun. 17, 2013
  • pp: 13958–13968

CMOS-compatible, athermal silicon ring modulators clad with titanium dioxide

Stevan S. Djordjevic, Kuanping Shang, Binbin Guan, Stanley T. S. Cheung, Ling Liao, Juthika Basak, Hai-Feng Liu, and S. J. B. Yoo  »View Author Affiliations


Optics Express, Vol. 21, Issue 12, pp. 13958-13968 (2013)
http://dx.doi.org/10.1364/OE.21.013958


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Abstract

We present the design, fabrication and characterization of athermal nano-photonic silicon ring modulators. The athermalization method employs compensation of the silicon core thermo-optic contribution with that from the amorphous titanium dioxide (a-TiO2) overcladding with a negative thermo-optic coefficient. We developed a new CMOS-compatible fabrication process involving low temperature RF magnetron sputtering of high-density and low-loss a-TiO2 that can withstand subsequent elevated-temperature CMOS processes. Silicon ring resonators with 275 nm wide rib waveguide clad with a-TiO2 showed near complete athermalization and moderate optical losses. Small-signal testing of the micro-resonator modulators showed high extinction ratio and gigahertz bandwidth.

© 2013 OSA

OCIS Codes
(160.3130) Materials : Integrated optics materials
(230.0230) Optical devices : Optical devices
(230.4110) Optical devices : Modulators

ToC Category:
Integrated Optics

History
Original Manuscript: April 15, 2013
Revised Manuscript: May 24, 2013
Manuscript Accepted: May 29, 2013
Published: June 3, 2013

Citation
Stevan S. Djordjevic, Kuanping Shang, Binbin Guan, Stanley T. S. Cheung, Ling Liao, Juthika Basak, Hai-Feng Liu, and S. J. B. Yoo, "CMOS-compatible, athermal silicon ring modulators clad with titanium dioxide," Opt. Express 21, 13958-13968 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-12-13958


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