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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 12 — Jun. 17, 2013
  • pp: 14139–14145

Accurate post-fabrication trimming of ultra-compact resonators on silicon

Amir H. Atabaki, Ali. A. Eftekhar, Murtaza Askari, and Ali Adibi  »View Author Affiliations

Optics Express, Vol. 21, Issue 12, pp. 14139-14145 (2013)

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One of the challenges of the high refractive index contrast of silicon photonics platform is the high sensitivity of the resonance wavelength of resonators to dimensional variations caused by fabrication process variations. In this work, we have experimentally demonstrated an accurate post-fabrication trimming technique for optical devices that is robust to process variations. Using this technique, we have reduced the random variation of the resonance wavelength of 4 µm diameter resonators by a factor of 6 to below 50 pm. The level of accuracy achieved in this work is adequate for most of the RF-photonic, interconnect, and optical signal processing applications. We also discuss the throughput of this technique and its viability for wafer-scale post-fabrication trimming of silicon photonic chips.

© 2013 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

Original Manuscript: April 26, 2013
Revised Manuscript: May 30, 2013
Manuscript Accepted: May 31, 2013
Published: June 6, 2013

Amir H. Atabaki, Ali. A. Eftekhar, Murtaza Askari, and Ali Adibi, "Accurate post-fabrication trimming of ultra-compact resonators on silicon," Opt. Express 21, 14139-14145 (2013)

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