OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 12 — Jun. 17, 2013
  • pp: 14139–14145

Accurate post-fabrication trimming of ultra-compact resonators on silicon

Amir H. Atabaki, Ali. A. Eftekhar, Murtaza Askari, and Ali Adibi  »View Author Affiliations


Optics Express, Vol. 21, Issue 12, pp. 14139-14145 (2013)
http://dx.doi.org/10.1364/OE.21.014139


View Full Text Article

Enhanced HTML    Acrobat PDF (1620 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

One of the challenges of the high refractive index contrast of silicon photonics platform is the high sensitivity of the resonance wavelength of resonators to dimensional variations caused by fabrication process variations. In this work, we have experimentally demonstrated an accurate post-fabrication trimming technique for optical devices that is robust to process variations. Using this technique, we have reduced the random variation of the resonance wavelength of 4 µm diameter resonators by a factor of 6 to below 50 pm. The level of accuracy achieved in this work is adequate for most of the RF-photonic, interconnect, and optical signal processing applications. We also discuss the throughput of this technique and its viability for wafer-scale post-fabrication trimming of silicon photonic chips.

© 2013 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

ToC Category:
Integrated Optics

History
Original Manuscript: April 26, 2013
Revised Manuscript: May 30, 2013
Manuscript Accepted: May 31, 2013
Published: June 6, 2013

Citation
Amir H. Atabaki, Ali. A. Eftekhar, Murtaza Askari, and Ali Adibi, "Accurate post-fabrication trimming of ultra-compact resonators on silicon," Opt. Express 21, 14139-14145 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-12-14139


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. A. B. Miller, “Device requirements for optical interconnects to silicon chips,” Proc. IEEE97(7), 1166–1185 (2009). [CrossRef]
  2. R. Soref, “The past, present, and future of silicon photonics,” IEEE J. Sel. Top. Quantum Electron.12(6), 1678–1687 (2006). [CrossRef]
  3. M. Soltani, Q. Li, S. Yegnanarayanan, and A. Adibi, “Toward ultimate miniaturization of high Q silicon traveling-wave microresonators,” Opt. Express18(19), 19541–19557 (2010). [CrossRef] [PubMed]
  4. M. R. Watts, W. A. Zortman, D. C. Trotter, G. N. Nielson, D. L. Luck, and R. W. Young, “Adiabatic Resonant Microrings (ARMs) with Directly Integrated Thermal Microphotonics,” in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper CPDB10. [CrossRef]
  5. A. H. Atabaki, A. A. Eftekhar, S. Yegnanarayanan, and A. Adibi, “Novel Micro-Heater Structure for Low-Power and Fast Photonic Reconfiguration,” in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optical Society of America, 2010), paper JThE44. [CrossRef]
  6. M. R. Watts, W. A. Zortman, D. C. Trotter, R. W. Young, and A. L. Lentine, “Vertical junction silicon microdisk modulators and switches,” Opt. Express19(22), 21989–22003 (2011). [CrossRef] [PubMed]
  7. W. A. Zortman, D. C. Trotter, and M. R. Watts, “Silicon photonics manufacturing,” Opt. Express18(23), 23598–23607 (2010). [CrossRef] [PubMed]
  8. J. Schrauwen, D. Van Thourhout, and R. Baets, “Trimming of silicon ring resonator by electron beam induced compaction and strain,” Opt. Express16(6), 3738–3743 (2008). [CrossRef] [PubMed]
  9. H. Haeiwa, T. Naganawa, and Y. Kokubun, “Wide range center wavelength trimming of vertically coupled microring resonator filter by direct UV irradiation to SiN ring core,” IEEE Photon. Technol. Lett.16(1), 135–137 (2004). [CrossRef]
  10. D. K. Sparacin, C. Y. Hong, L. C. Kimerling, J. Michel, J. P. Lock, and K. K. Gleason, “Trimming of microring resonators by photo-oxidation of a plasma-polymerized organosilane cladding material,” Opt. Lett.30(17), 2251–2253 (2005). [CrossRef] [PubMed]
  11. A. Canciamilla, F. Morichetti, S. Grillanda, P. Velha, M. Sorel, V. Singh, A. Agarwal, L. C. Kimerling, and A. Melloni, “Photo-induced trimming of chalcogenide-assisted silicon waveguides,” Opt. Express20(14), 15807–15817 (2012). [CrossRef] [PubMed]
  12. L. Zhou, K. Okamoto, and S. J. B. Yoo, “Athermalizing and Trimming of Slotted Silicon Microring Resonators With UV-Sensitive PMMA Upper-Cladding,” IEEE Photon. Technol. Lett.21(17), 1175–1177 (2009). [CrossRef]
  13. S. Lambert, W. De Cort, J. Beeckman, K. Neyts, and R. Baets, “Trimming of silicon-on-insulator ring resonators with a polymerizable liquid crystal cladding,” Opt. Lett.37(9), 1475–1477 (2012). [CrossRef] [PubMed]
  14. S. Prorok, A. Y. Petrov, M. Eich, J. Luo, and A. K. Jen, “Trimming of high-Q-factor silicon ring resonators by electron beam bleaching,” Opt. Lett.37(15), 3114–3116 (2012). [CrossRef] [PubMed]
  15. Y. Shen, I. Divliansky, D. Basov, and S. Mookherjea, “Perfect set-and-forget alignment of silicon photonic resonators and interferometers,” in Optical Fiber Communication Conference, OSA Technical Digest (CD) (Optical Society of America, 2011), paper PDPC3.
  16. C. B. Norris and E. P. Eernisse, “Ionization dilatation effects in fused silica from 2 to 18-Kev electron-irradiation,” J. Appl. Phys.45(9), 3876–3882 (1974). [CrossRef]
  17. C. G. Robertson and G. L. Wilkes, “Refractive index: A probe for monitoring volume relaxation during physical aging of glassy polymers,” Polymer (Guildf.)39(11), 2129–2133 (1998). [CrossRef]
  18. Z. Xia, A. A. Eftekhar, M. Soltani, B. Momeni, Q. Li, M. Chamanzar, S. Yegnanarayanan, and A. Adibi, “High resolution on-chip spectroscopy based on miniaturized microdonut resonators,” Opt. Express19(13), 12356–12364 (2011). [CrossRef] [PubMed]
  19. Q. Li, M. Soltani, S. Yegnanarayanan, and A. Adibi, “Design and demonstration of compact, wide bandwidth coupled-resonator filters on a silicon-on- insulator platform,” Opt. Express17(4), 2247–2254 (2009). [CrossRef] [PubMed]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4 Fig. 5
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited