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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 13 — Jul. 1, 2013
  • pp: 15664–15675

Measuring nanoparticle size using optical surface profilers

Douglas J. Little and Deb M. Kane  »View Author Affiliations


Optics Express, Vol. 21, Issue 13, pp. 15664-15675 (2013)
http://dx.doi.org/10.1364/OE.21.015664


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Abstract

Optical surface profilers are state-of-the-art instruments for measuring surface height profiles. They are not conventionally applied to nanoparticle measurements due to the presence of diffraction artifacts. Here we use a theoretical model based on wave-optics to account for diffraction-based artifacts in optical surface profilers. This then enables accurate measurement of nanoparticles size of a known geometry. The model is developed for both phase shifting interferometry and vertical scanning interferometry modes of operation. It is demonstrated that nanosphere radii as small as 12 nm, and nano-cylinder radii as small as 10-15 nm can be measured from a standard profile measurement using phase shifted interferometry interpreted using the wave-optics approach.

© 2013 OSA

OCIS Codes
(110.4850) Imaging systems : Optical transfer functions
(120.3940) Instrumentation, measurement, and metrology : Metrology
(180.3170) Microscopy : Interference microscopy
(110.3175) Imaging systems : Interferometric imaging

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 5, 2013
Manuscript Accepted: June 10, 2013
Published: June 21, 2013

Citation
Douglas J. Little and Deb M. Kane, "Measuring nanoparticle size using optical surface profilers," Opt. Express 21, 15664-15675 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-13-15664


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