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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 13 — Jul. 1, 2013
  • pp: 15734–15746

Novel 3D SEM Moiré method for micro height measurement

Chuanwei Li, Zhanwei Liu, Huimin Xie, and Dan Wu  »View Author Affiliations

Optics Express, Vol. 21, Issue 13, pp. 15734-15746 (2013)

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Abstract: A 3D SEM Moiré Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.

© 2013 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.4120) Instrumentation, measurement, and metrology : Moire' techniques
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 1, 2013
Revised Manuscript: June 11, 2013
Manuscript Accepted: June 11, 2013
Published: June 24, 2013

Chuanwei Li, Zhanwei Liu, Huimin Xie, and Dan Wu, "Novel 3D SEM Moiré method for micro height measurement," Opt. Express 21, 15734-15746 (2013)

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