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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 13 — Jul. 1, 2013
  • pp: 15888–15895

Enhanced white photoluminescence in silicon-rich oxide/SiO2 superlattices by low-energy ion-beam treatment

Chuan-Feng Shih, Chu-Yun Hsiao, and Kuan-Wei Su  »View Author Affiliations

Optics Express, Vol. 21, Issue 13, pp. 15888-15895 (2013)

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This study presents the crystalline and luminescence properties of silicon-rich oxide (SRO)/SiO2 superlattices in which the SRO layers were prepared with a low-energy (<60 eV) argon ion-beam treatment. Experimental results evidenced that density of the Si nanocrystals (NCs) in the SRO layer was increased by ion-beam treatment after annealing, increasing the surface roughness. The stoichiometry of the as-prepared SRO layer was unchanged but the phase separation of the annealed SRO layer was enhanced by the ion-beam treatment, yielding visible white photoluminescence from the E’ centers and Si NCs.

© 2013 OSA

OCIS Codes
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Thin Films

Original Manuscript: May 10, 2013
Revised Manuscript: June 13, 2013
Manuscript Accepted: June 19, 2013
Published: June 25, 2013

Chuan-Feng Shih, Chu-Yun Hsiao, and Kuan-Wei Su, "Enhanced white photoluminescence in silicon-rich oxide/SiO2 superlattices by low-energy ion-beam treatment," Opt. Express 21, 15888-15895 (2013)

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