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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 14 — Jul. 15, 2013
  • pp: 16882–16887

High Q SiC microresonators

Jaime Cardenas, Mian Zhang, Christopher T. Phare, Shreyas Y. Shah, Carl B. Poitras, Biswajeet Guha, and Michal Lipson  »View Author Affiliations

Optics Express, Vol. 21, Issue 14, pp. 16882-16887 (2013)

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We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a 20 μm radius suspended microring resonator with Q=14,100 fabricated on commercially available SiC-on-silicon substrates.

© 2013 OSA

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(140.3945) Lasers and laser optics : Microcavities

ToC Category:
Optical Devices

Original Manuscript: April 8, 2013
Revised Manuscript: June 21, 2013
Manuscript Accepted: June 24, 2013
Published: July 8, 2013

Jaime Cardenas, Mian Zhang, Christopher T. Phare, Shreyas Y. Shah, Carl B. Poitras, Biswajeet Guha, and Michal Lipson, "High Q SiC microresonators," Opt. Express 21, 16882-16887 (2013)

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