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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 14 — Jul. 15, 2013
  • pp: 16901–16907

Stroboscopic white-light interferometry of vibrating microstructures

Igor Shavrin, Lauri Lipiäinen, Kimmo Kokkonen, Steffen Novotny, Matti Kaivola, and Hanne Ludvigsen  »View Author Affiliations

Optics Express, Vol. 21, Issue 14, pp. 16901-16907 (2013)

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We describe a LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz. The data analysis, which is performed entirely in the frequency domain, makes use of the high resolution available in the measured interferometric phase data. For demonstration, we image the surface vibration fields in a square-plate silicon MEMS resonator for three vibration modes ranging in frequency between 3 and 14 MHz. The minimum detectable vibration amplitude in this case was less than 100 pm.

© 2013 OSA

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.3170) Microscopy : Interference microscopy
(110.3175) Imaging systems : Interferometric imaging
(240.6648) Optics at surfaces : Surface dynamics

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 23, 2013
Revised Manuscript: June 27, 2013
Manuscript Accepted: June 27, 2013
Published: July 8, 2013

Virtual Issues
Vol. 8, Iss. 8 Virtual Journal for Biomedical Optics

Igor Shavrin, Lauri Lipiäinen, Kimmo Kokkonen, Steffen Novotny, Matti Kaivola, and Hanne Ludvigsen, "Stroboscopic white-light interferometry of vibrating microstructures," Opt. Express 21, 16901-16907 (2013)

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