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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 15 — Jul. 29, 2013
  • pp: 17602–17614

Fabrication imperfection analysis and statistics generation using precision and reliability optimization method

Dilip K. Prasad  »View Author Affiliations

Optics Express, Vol. 21, Issue 15, pp. 17602-17614 (2013)

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This paper applies a recently proposed dominant point detection method – precision and reliability optimization (PRO) – for representing shapes in the microscopy images of fabricated structures. This method uses both the local and the global nature of fit for dominant point detection. A smaller value of its control parameter better represents the local curvature properties of the shape while a larger value better indicates the global curvature properties. The applicability of this method to a wide range of microscopy images is demonstrated using four microscopy examples of brightness enhancement films, electromagnetic and photonic band gap materials, and aspherical mirror alignments. It is shown that PRO can clearly highlight several image effects and imperfections which may not be easily identifiable by human eye or may be difficult to analyze and assess. Further, for large scale arrays, it can be used to generate useful fabrication accuracy statistics and detect features with low fidelity or more imperfections.

© 2013 OSA

OCIS Codes
(000.4430) General : Numerical approximation and analysis
(100.2000) Image processing : Digital image processing
(100.2960) Image processing : Image analysis
(100.5010) Image processing : Pattern recognition

ToC Category:
Image Processing

Original Manuscript: February 21, 2013
Revised Manuscript: June 28, 2013
Manuscript Accepted: July 6, 2013
Published: July 16, 2013

Dilip K. Prasad, "Fabrication imperfection analysis and statistics generation using precision and reliability optimization method," Opt. Express 21, 17602-17614 (2013)

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