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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 15 — Jul. 29, 2013
  • pp: 18255–18260

Vibration modulated subaperture stitching interferometry

Chao-Wen Liang, Hung-Sheng Chang, Po-Chih Lin, Cheng-Chung Lee, and Yi-Chun Chen  »View Author Affiliations

Optics Express, Vol. 21, Issue 15, pp. 18255-18260 (2013)

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A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.

© 2013 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 20, 2013
Revised Manuscript: July 13, 2013
Manuscript Accepted: July 18, 2013
Published: July 23, 2013

Chao-Wen Liang, Hung-Sheng Chang, Po-Chih Lin, Cheng-Chung Lee, and Yi-Chun Chen, "Vibration modulated subaperture stitching interferometry," Opt. Express 21, 18255-18260 (2013)

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