OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 15 — Jul. 29, 2013
  • pp: 18255–18260

Vibration modulated subaperture stitching interferometry

Chao-Wen Liang, Hung-Sheng Chang, Po-Chih Lin, Cheng-Chung Lee, and Yi-Chun Chen  »View Author Affiliations


Optics Express, Vol. 21, Issue 15, pp. 18255-18260 (2013)
http://dx.doi.org/10.1364/OE.21.018255


View Full Text Article

Enhanced HTML    Acrobat PDF (2546 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.

© 2013 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 20, 2013
Revised Manuscript: July 13, 2013
Manuscript Accepted: July 18, 2013
Published: July 23, 2013

Citation
Chao-Wen Liang, Hung-Sheng Chang, Po-Chih Lin, Cheng-Chung Lee, and Yi-Chun Chen, "Vibration modulated subaperture stitching interferometry," Opt. Express 21, 18255-18260 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-15-18255


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. D. Malacara, Optical shop testing (Wiley-Interscience, 2007).
  2. J. S. Loomis, “Computer-generated holography and optical testing,” Opt. Eng.19(5), 195679 (1980). [CrossRef]
  3. E.-B. Kley, W. Rockstroh, H. Schmidt, A. Drauschke, F. Wyrowski, and L.-C. Wittig, “Investigation of large null-CGH realization,” Proc. SPIE4440, 135–144 (2001). [CrossRef]
  4. W. W. Chow and G. N. Lawrence, “Method for subaperture testing interferogram reduction,” Opt. Lett.8(9), 468–470 (1983). [CrossRef] [PubMed]
  5. M. Otsubo, K. Okada, and J. Tsujiuchi, “Measurement of large plane surface shapes by connecting small-aperture interferograms,” Opt. Eng.33(2), 608–613 (1994). [CrossRef]
  6. J. Fleig, P. Dumas, P. E. Murphy, and G. W. Forbes, “An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces,” Proc. SPIE5188, 296–307 (2003). [CrossRef]
  7. P. Murphy, J. Fleig, G. Forbes, D. Miladinovic, G. DeVries, and S. O'Donohue, “Subaperture stitching interferometry for testing mild aspheres,” Proc. SPIE6293, 62930J (2006). [CrossRef]
  8. Y.-M. Liu, G. N. Lawrence, and C. L. Koliopoulos, “Subaperture testing of aspheres with annular zones,” Appl. Opt.27(21), 4504–4513 (1988). [CrossRef] [PubMed]
  9. M. Melozzi, L. Pezzati, and A. Mazzoni, “Testing aspheric surfaces using multiple annular interferograms,” Opt. Eng.32(5), 1073–1079 (1993). [CrossRef]
  10. J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, “Pixelated phase-mask dynamic interferometer,” Proc. SPIE5531, 304–314 (2004). [CrossRef]
  11. Y.-C. Chen, P.-C. Lin, C.-M. Lee, and C.-W. Liang, “Iterative phase-shifting algorithm immune to random phase shifts and tilts,” Appl. Opt.52(14), 3381–3386 (2013). [CrossRef] [PubMed]
  12. C. Zhao and J. H. Burge, “Stitching of off-axis sub-aperture null measurements of an aspheric surface,” Proc. SPIE7063, 706316 (2008). [CrossRef]
  13. S. Chen, S. Li, and Y. Dai, “Iterative algorithm for subaperture stitching interferometry for general surfaces,” J. Opt. Soc. Am. A22(9), 1929–1936 (2005). [CrossRef] [PubMed]
  14. P. C. Lin, Y. A. Chen, H. S. Chang, C. W. Liang, and Y. C. Chen, “Aberration compensation and position scanning of a subaperture stitching algorithm,” Proc. SPIE8494, 84940L, 84940L-8 (2012). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

Figures

Fig. 1 Fig. 2 Fig. 3
 
Fig. 4
 

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited