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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 15 — Jul. 29, 2013
  • pp: 18424–18433

Super-resolution complex amplitude reconstruction of nanostructured binary data using an interference microscope with pattern matching

Shinji Ishikawa and Yoshio Hayasaki  »View Author Affiliations


Optics Express, Vol. 21, Issue 15, pp. 18424-18433 (2013)
http://dx.doi.org/10.1364/OE.21.018424


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Abstract

We propose a new method of optically reconstructing binary data formed by nanostructures with an elemental size several tens of nanometers smaller than the diffraction limit, implemented with an interference microscope and a complex-amplitude image pattern matching method. We examine the size dependency of the data reconstruction capacity using a light propagation simulation based on the finite-difference time-domain (FDTD) method and the Fourier spatial frequency filtering method. We demonstrated that the readable size of the binary nanostructure depends on the magnitude of noise.

© 2013 OSA

OCIS Codes
(100.5010) Image processing : Pattern recognition
(100.6640) Image processing : Superresolution
(180.3170) Microscopy : Interference microscopy
(100.3175) Image processing : Interferometric imaging

ToC Category:
Image Processing

History
Original Manuscript: May 1, 2013
Revised Manuscript: June 16, 2013
Manuscript Accepted: June 19, 2013
Published: July 24, 2013

Citation
Shinji Ishikawa and Yoshio Hayasaki, "Super-resolution complex amplitude reconstruction of nanostructured binary data using an interference microscope with pattern matching," Opt. Express 21, 18424-18433 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-15-18424


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