OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 16 — Aug. 12, 2013
  • pp: 18872–18883

Common-path laser planar encoder

Chyan-Chyi Wu, Yan-Zou Chen, and Chia-Huang Liao  »View Author Affiliations

Optics Express, Vol. 21, Issue 16, pp. 18872-18883 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (2287 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X - and Y - axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X - and Y - axes and also presents high system stabilities of −0.59 ± 0.43 nm/h and −0.63 ± 0.47 nm/h respectively in the X - and Y - axes. The CLPE has promising potential for nanometer resolution and large-range applications.

© 2013 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 5, 2013
Revised Manuscript: July 4, 2013
Manuscript Accepted: July 5, 2013
Published: August 1, 2013

Chyan-Chyi Wu, Yan-Zou Chen, and Chia-Huang Liao, "Common-path laser planar encoder," Opt. Express 21, 18872-18883 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. C. C. Wu, J. S. Yang, C. Y. Cheng, and Y. Z. Chen, “Common-path laser encoder,” Sens. Actuat. A189, 86–92 (2013). [CrossRef]
  2. P. L. M. Heydemann, “Determination and correction of quadrature fringe measurement errors in interferometers,” Appl. Opt.20(19), 3382–3384 (1981). [CrossRef] [PubMed]
  3. J. D. Ellis, M. Baas, K.-N. Joo, and J. W. Spronck, “Theoretical analysis of errors in correction algorithms for periodic nonlinearity in displacement measuring interferometers,” Precis. Eng.36(2), 261–269 (2012). [CrossRef]
  4. W.-W. Chiang and C.-K. Lee, “Wavefront reconstruction optics for use in a disk drive position measurement system,” USPTO, ed. (International Bussiness Machines, America, 1995).
  5. V. V. Yashchuk, “Optimal measurement strategies for effective suppression of drift errors,” Rev. Sci. Instrum.80(11), 115101 (2009). [CrossRef] [PubMed]
  6. C.-M. Wu and R. D. Deslattes, “Analytical modeling of the periodic nonlinearity in heterodyne interferometry,” Appl. Opt.37(28), 6696–6700 (1998). [CrossRef] [PubMed]
  7. W. Gao, T. Araki, S. Kiyono, Y. Okazaki, and M. Yamanaka, “Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder,” Precis. Eng.27(3), 289–298 (2003). [CrossRef]
  8. W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono, and Y. Tomita, “A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning,” Precis. Eng.28(3), 329–337 (2004). [CrossRef]
  9. W. Gao, S. Dejima, and S. Kiyono, “A dual-mode surface encoder for position measurement,” Sens. Actuat. A117(1), 95–102 (2005). [CrossRef]
  10. W. Gao and A. Kimura, “A three-axis displacement sensor with nanometric resolution,” CIRP Annals - Manufacturing Technology56(1), 529–532 (2007). [CrossRef]
  11. A. Kimura, W. Gao, A. Yoshikazu, and L. Zeng, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness,” Precis. Eng.34(1), 145–155 (2010). [CrossRef]
  12. A. Kimura, W. Gao, and L. Zeng, “Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder,” Meas. Sci. Technol.21(5), 054005 (2010). [CrossRef]
  13. A. Kimura, W. Gao, W. Kim, K. Hosono, Y. Shimizu, L. Shi, and L. Zeng, “A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement,” Precis. Eng.36(4), 576–585 (2012). [CrossRef]
  14. X. Li, W. Gao, H. Muto, Y. Shimizu, S. Ito, and S. Dian, “A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage,” Precis. Eng.37(3), 771–781 (2013). [CrossRef]
  15. C. F. Kao, S. H. Lu, and M. H. Lu, “High resolution planar encoder by retro-reflection,” Rev. Sci. Instrum.76(8), 085110 (2005). [CrossRef]
  16. Y.-C. Chung, K.-C. Fan, and B.-C. Lee, “Development of a novel planar encoder for 2D displacement measurement in nanometer resolution and accuracy,” in Intelligent Control and Automation (WCICA), 2011 9th World Congress on(2011), pp. 449–453.
  17. H.-L. Hsieh, J.-C. Chen, G. Lerondel, and J.-Y. Lee, “Two-dimensional displacement measurement by quasi-common-optical-path heterodyne grating interferometer,” Opt. Express19(10), 9770–9782 (2011). [CrossRef] [PubMed]
  18. J.-Y. Lee, H.-L. Hsieh, G. Lerondel, R. Deturche, M.-P. Lu, and J.-C. Chen, “Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement,” Appl. Opt.50(9), 1272–1279 (2011). [CrossRef] [PubMed]
  19. K. C. Fan, B. H. Liao, Y. C. Chung, and T. T. Chung, “Displacement measurement of planar stage by diffraction planar encoder in nanometer resolution,” in 2012 IEEE International Conference on Instrumentation and Measurement Technology(2012), pp. 894–897. [CrossRef]
  20. C.-C. Hsu, M.-C. Kao, K.-C. Huang, and C.-C. Wu, “Reflection type displacement sensor with volume hologram for in-plane displacement measurement,” in 2012 International Conference on Measurement, Information and Control (MIC) (2012), pp. 13–16. [CrossRef]
  21. C.-C. Wu, C.-H. Liao, Y.-Z. Chen, and J.-S. Yang, “Common-path Laser Encoder with Littrow Configuration,” Sens. Actuat. A193, 69–78 (2013). [CrossRef]
  22. R. Petit and L. C. Botten, Electromagnetic Theory of Gratings (Springer-Verlag, 1980).
  23. L. E. Drain, The Laser Doppler Technique (John Wiley, 1980).
  24. http://www.newport.com .
  25. C.-F. Kao, C. C. Chang, and M.-H. Lu, “Double-diffraction planar encoder by conjugate optics,” Opt. Eng.44(2), 023603 (2005). [CrossRef]
  26. F. L. Pedrotti, L. M. Pedrotti, and L. S. Pedrotti, Introduction to Optics (Prentice-Hall International, 2006).
  27. http://www.piezosystem.com/home/ .
  28. P. Gregorcic, T. Pozar, and J. Mozina, “Quadrature phase-shift error analysis using a homodyne laser interferometer,” Opt. Express17(18), 16322–16331 (2009). [CrossRef] [PubMed]
  29. Sony Precision Technology, http://www.sonypt.com/ .

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited