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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 16 — Aug. 12, 2013
  • pp: 18872–18883

Common-path laser planar encoder

Chyan-Chyi Wu, Yan-Zou Chen, and Chia-Huang Liao  »View Author Affiliations


Optics Express, Vol. 21, Issue 16, pp. 18872-18883 (2013)
http://dx.doi.org/10.1364/OE.21.018872


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Abstract

This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X - and Y - axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X - and Y - axes and also presents high system stabilities of −0.59 ± 0.43 nm/h and −0.63 ± 0.47 nm/h respectively in the X - and Y - axes. The CLPE has promising potential for nanometer resolution and large-range applications.

© 2013 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: June 5, 2013
Revised Manuscript: July 4, 2013
Manuscript Accepted: July 5, 2013
Published: August 1, 2013

Citation
Chyan-Chyi Wu, Yan-Zou Chen, and Chia-Huang Liao, "Common-path laser planar encoder," Opt. Express 21, 18872-18883 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-16-18872


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