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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 16 — Aug. 12, 2013
  • pp: 19311–19323

Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate

F. Döring, A.L. Robisch, C. Eberl, M. Osterhoff, A. Ruhlandt, T. Liese, F. Schlenkrich, S. Hoffmann, M. Bartels, T. Salditt, and H.U. Krebs  »View Author Affiliations

Optics Express, Vol. 21, Issue 16, pp. 19311-19323 (2013)

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Compound optics such as lens systems can overcome the limitations concerning resolution, efficiency, or aberrations which fabrication constraints would impose on any single optical element. In this work we demonstrate unprecedented sub-5 nm point focusing of hard x-rays, based on the combination of a high gain Kirkpatrick-Baez (KB) mirror system and a high resolution W/Si multilayer zone plate (MZP) for ultra-short focal length f. The pre-focusing allows limiting the MZP radius to below 2 μm, compatible with the required 5 nm structure width and essentially unlimited aspect ratios, provided by enabling fabrication technology based on pulsed laser deposition (PLD) and focused ion beam (FIB).

© 2013 OSA

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(340.0340) X-ray optics : X-ray optics

ToC Category:
X-ray Optics

Original Manuscript: June 11, 2013
Revised Manuscript: July 29, 2013
Manuscript Accepted: July 29, 2013
Published: August 7, 2013

F. Döring, A.L. Robisch, C. Eberl, M. Osterhoff, A. Ruhlandt, T. Liese, F. Schlenkrich, S. Hoffmann, M. Bartels, T. Salditt, and H.U. Krebs, "Sub-5 nm hard x-ray point focusing by a combined Kirkpatrick-Baez mirror and multilayer zone plate," Opt. Express 21, 19311-19323 (2013)

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