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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 17 — Aug. 26, 2013
  • pp: 19900–19921

Heterodyne interferometer for absolute amplitude vibration measurements with femtometer sensitivity

Erlend Leirset, Helge E. Engan, and Astrid Aksnes  »View Author Affiliations


Optics Express, Vol. 21, Issue 17, pp. 19900-19921 (2013)
http://dx.doi.org/10.1364/OE.21.019900


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Abstract

A heterodyne interferometer for highly sensitive vibration measurements in the range 100kHz − 1.3GHz is presented. The interferometer measures absolute amplitude and phase. The signal processing of the setup is analyzed and described in detail to optimize noise suppression. A noise floor of 7.1fm/Hz1/2 at 21MHz was achieved experimentally where the bandwidth is the inverse of all time needed for filter settling and signal sampling. To demonstrate the interferometer, measurements up to 220MHz were performed on arrays of capacitive micromachined ultrasonic transducers (CMUTs). The measurements provided detailed information e.g. about the frequency response, vibration patterns and array uniformity. Such measurements are highly valuable in the design process of ultrasonic transducers.

© 2013 OSA

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 23, 2013
Revised Manuscript: June 27, 2013
Manuscript Accepted: June 27, 2013
Published: August 16, 2013

Citation
Erlend Leirset, Helge E. Engan, and Astrid Aksnes, "Heterodyne interferometer for absolute amplitude vibration measurements with femtometer sensitivity," Opt. Express 21, 19900-19921 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-17-19900


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