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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 18 — Sep. 9, 2013
  • pp: 20683–20691

Deep sub-wavelength imaging lithography by a reflective plasmonic slab

Changtao Wang, Ping Gao, Zeyu Zhao, Na Yao, Yanqin Wang, Ling Liu, Kaipeng Liu, and Xiangang Luo  »View Author Affiliations

Optics Express, Vol. 21, Issue 18, pp. 20683-20691 (2013)

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By utilizing a reflective plasmonic slab, it is demonstrated numerically and experimentally in this paper deep sub-wavelength imaging lithography for nano characters with about 50nm line width and dense lines with 32nm half pitch resolution (about 1/12 wavelength). Compared with the control experiment without reflective plasmonic slab, resolution and fidelity of imaged resist patterns are remarkably improved especially for isolated nano features. Further numerical simulations show that near field optical proximity corrections help to improve imaging fidelity of two dimensional nano patterns.

© 2013 OSA

OCIS Codes
(100.6640) Image processing : Superresolution
(110.5220) Imaging systems : Photolithography
(240.6680) Optics at surfaces : Surface plasmons
(260.3910) Physical optics : Metal optics

ToC Category:
Imaging Systems

Original Manuscript: June 25, 2013
Revised Manuscript: August 10, 2013
Manuscript Accepted: August 13, 2013
Published: August 27, 2013

Changtao Wang, Ping Gao, Zeyu Zhao, Na Yao, Yanqin Wang, Ling Liu, Kaipeng Liu, and Xiangang Luo, "Deep sub-wavelength imaging lithography by a reflective plasmonic slab," Opt. Express 21, 20683-20691 (2013)

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