OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 18 — Sep. 9, 2013
  • pp: 20730–20737

Inhomogeneity measurement at oblique incidence by phase measuring interferometers

Luan Zhu  »View Author Affiliations

Optics Express, Vol. 21, Issue 18, pp. 20730-20737 (2013)

View Full Text Article

Enhanced HTML    Acrobat PDF (1613 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



The huge power solid-state lasers require large optical materials with high quality. The inhomogeneity must be required to be measured. Inhomogeneity measurement is often done at normal incidence by interferometer, while the size of large blanks is limited to the interferometer aperture. A five-step method to measure refractive index inhomogeneity over the interferometer aperture is proposed in this paper. The variation of the refractive index inhomogeneity of the glass blank is directly calculated using five interferograms measured at oblique incidence. The high repeatability of the results is given. The reliability of the method is further verified by comparing the same part measured at normal incidence.

© 2013 OSA

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: June 3, 2013
Revised Manuscript: August 12, 2013
Manuscript Accepted: August 20, 2013
Published: August 28, 2013

Luan Zhu, "Inhomogeneity measurement at oblique incidence by phase measuring interferometers," Opt. Express 21, 20730-20737 (2013)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. J. H. Campbell, R. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. Whitman, J. Yu, M. Runkel, M. Riley, M. Feit, and R. Hackel, “NIF Optical materials and fabrication technologies: an overview,” Proc. SPIE5341, 84–101 (2004). [CrossRef]
  2. W. H. Williams, “NIF Large optics metrology software: description and algorithms,” UCRL-MA-137950-REV-1(2002).
  3. F. Twyman and J. W. Perry, “The determination of Poisson’s ratio and of the absolute stress-variation of refractive index,” Proc. Phys. Soc. Lond.34(1), 151–154 (1921). [CrossRef]
  4. F. E. Roberts and P. Langenbeck, “Homogeneity evaluation of very large disks,” Appl. Opt.8(11), 2311–2314 (1969). [CrossRef] [PubMed]
  5. J. Schwider, R. Burow, K.-E. Elssner, R. Spolaczyk, and J. Grzanna, “Homogeneity testing by phase sampling interferometry,” Appl. Opt.24(18), 3059–3061 (1985). [CrossRef] [PubMed]
  6. L. L. Deck, “Multiple surface phase shifting interferometry,” Proc. SPIE4451, 424–431 (2001). [CrossRef]
  7. J. Park, L. Chen, Q. Wang, and U. Griesmann, “Modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers,” Opt. Express20(18), 20078–20089 (2012). [CrossRef] [PubMed]
  8. D. Schönfeld, T. Reuter, R. Takke, and S. Thomas, “Stitching oil-on interferometry of large fused silica blanks,” Proc. SPIE5965, 59650V, 59650V-8 (2005). [CrossRef]
  9. R. Jedamzik, J. Hengst, F. Elsmann, C. Lemke, T. Döhring, and P. Hartmann, “Optical materials for astronomy from SCHOTT: the quality of large components,” Proc. SPIE7018, 70180O, 70180O-10 (2008). [CrossRef]
  10. D. M. Aikens, “Origin and evolution of the optics specifications for the National Ignition Facility,” Proc. SPIE2536, 2–12 (1995). [CrossRef]
  11. SCHOTT Technical Information: TIE-26 - Homogeneity of optical glass, 6 (2004).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited