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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 18 — Sep. 9, 2013
  • pp: 21508–21522

Quality control of oblique incidence optical coatings based on normal incidence measurement data

Tatiana V. Amotchkina, Michael K. Trubetskov, Alexander V. Tikhonravov, Sebastian Schlichting, Henrik Ehlers, Detlev Ristau, David Death, Robert J. Francis, and Vladimir Pervak  »View Author Affiliations


Optics Express, Vol. 21, Issue 18, pp. 21508-21522 (2013)
http://dx.doi.org/10.1364/OE.21.021508


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Abstract

We demonstrate selection of reliable approaches for post-production characterization of oblique incidence multilayer optical coatings. The approaches include choice of input information, selection of adequate coating model, corresponding numerical characterization algorithm, and verification of the results. Applications of the approaches are illustrated with post-production characterization of oblique incidence edge filter, oblique incidence beam splitter and oblique incidence 43-layer quarter-wave mirror.

© 2013 OSA

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.4165) Thin films : Multilayer design
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

History
Original Manuscript: July 15, 2013
Revised Manuscript: August 29, 2013
Manuscript Accepted: August 29, 2013
Published: September 5, 2013

Citation
Tatiana V. Amotchkina, Michael K. Trubetskov, Alexander V. Tikhonravov, Sebastian Schlichting, Henrik Ehlers, Detlev Ristau, David Death, Robert J. Francis, and Vladimir Pervak, "Quality control of oblique incidence optical coatings based on normal incidence measurement data," Opt. Express 21, 21508-21522 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-18-21508


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References

  1. A. V. Tikhonravov, M. K. Trubetskov, I. V. Kochikov, J. B. Oliver, and D. J. Smith, “Real-time characterization and optimization of E-beam evaporated optical coatings,” in Optical Interference Coatings, OSA Technical Digest Series (2001), ME8.
  2. T. V. Amotchkina, M. K. Trubetskov, V. Pervak, B. Romanov, and A. V. Tikhonravov, “On the reliability of reverse engineering results,” Appl. Opt.51(22), 5543–5551 (2012). [CrossRef] [PubMed]
  3. S. Wilbrandt, O. Stenzel, N. Kaiser, M. K. Trubetskov, and A. V. Tikhonravov, “In situ optical characterization and reengineering of interference coatings,” Appl. Opt.47(13), C49–C54 (2008). [CrossRef] [PubMed]
  4. A. V. Tikhonravov, T. V. Amotchkina, M. K. Trubetskov, R. J. Francis, V. Janicki, J. Sancho-Parramon, H. Zorc, and V. Pervak, “Optical characterization and reverse engineering based on multiangle spectroscopy,” Appl. Opt.51(2), 245–254 (2012). [CrossRef] [PubMed]
  5. T. V. Amotchkina, M. K. Trubetskov, V. Pervak, S. Schlichting, H. Ehlers, D. Ristau, and A. V. Tikhonravov, “Comparison of algorithms used for optical characterization of multilayer optical coatings,” Appl. Opt.50(20), 3389–3395 (2011). [CrossRef] [PubMed]
  6. T. V. Amotchkina, M. K. Trubetskov, A. V. Tikhonravov, and V. Pervak, “Reverse engineering of an output coupler using broadband monitoring data and group delay measurements,” in Optical Interference Coatings, OSA Technical Digest Series (2013), WB.2.
  7. P. A. van Nijnatten, “An automated directional reflectance/transmittance analyser for coating analysis,” Thin Solid Films442(1-2), 74–79 (2003). [CrossRef]
  8. T. V. Amotchkina, S. Schlichting, H. Ehlers, M. K. Trubetskov, A. V. Tikhonravov, and D. Ristau, “Computational manufacturing as a tool for the selection of the most manufacturable design,” Appl. Opt.51(36), 8677–8686 (2012). [CrossRef] [PubMed]
  9. A. V. Tikhonravov and M. K. Trubetskov, “OptiLayer software,” http://www.optilayer.com . [CrossRef]
  10. D. Ristau, H. Ehlers, S. Schlichting, and M. Lappschies, “State of the art in deterministic production of optical thin films,” Proc. SPIE7101, 71010C, 71010C-14 (2008). [CrossRef]
  11. D. Ristau, H. Ehlers, T. Gross, and M. Lappschies, “Optical broadband monitoring of conventional and ion processes,” Appl. Opt.45(7), 1495–1501 (2006). [CrossRef] [PubMed]
  12. H. E. Ehlers, S. S. Schlichting, C. S. Schmitz, and D. R. Ristau, “Adaptive manufacturing of high-precision optics based on virtual deposition and hybrid process control techniques,” Chin. Opt. Lett.8, 62–66 (2010). [CrossRef]
  13. T. V. Amotchkina, S. Schlichting, H. Ehlers, M. K. Trubetskov, A. V. Tikhonravov, and D. Ristau, “Computational manufacturing as a key element in the design-production chain for modern multilayer coatings,” Appl. Opt.51(31), 7604–7615 (2012). [CrossRef] [PubMed]
  14. B. Vidal, A. Fornier, and E. Pelletier, “Wideband optical monitoring of nonquarterwave multilayer filters,” Appl. Opt.18(22), 3851–3856 (1979). [PubMed]
  15. H. A. Macleod, Thin-film Optical Filters, 4th ed, Series in Optics and Optoelectronics (CRC Press/Taylor & Francis, 2010).
  16. A. V. Tikhonravov, M. K. Trubetskov, and T. V. Amotchkina, “Investigation of the error self-compensation effect associated with broadband optical monitoring,” Appl. Opt.50(9), C111–C116 (2011). [CrossRef] [PubMed]
  17. V. Pervak, A. V. Tikhonravov, M. K. Trubetskov, S. Naumov, F. Krausz, and A. Apolonski, “1.5-octave chirped mirror for pulse compression down to sub-3 fs,” Appl. Phys. B87(1), 5–12 (2007). [CrossRef]
  18. V. Pervak, I. Ahmad, J. Fulop, M. K. Trubetskov, and A. V. Tikhonravov, “Comparison of dispersive mirrors based on the time-domain and conventional approaches, for sub-5-fs pulses,” Opt. Express17(4), 2207–2217 (2009). [CrossRef] [PubMed]
  19. V. Pervak, M. K. Trubetskov, and A. V. Tikhonravov, “Robust synthesis of dispersive mirrors,” Opt. Express19(3), 2371–2380 (2011). [CrossRef] [PubMed]
  20. V. Pervak, “Recent development and new ideas in the field of dispersive multilayer optics,” Appl. Opt.50(9), C55–C61 (2011). [CrossRef] [PubMed]
  21. T. V. Amotchkina, M. K. Trubetskov, V. Pervak, and A. V. Tikhonravov, “Design, production, and reverse engineering of two-octave antireflection coatings,” Appl. Opt.50(35), 6468–6475 (2011). [CrossRef] [PubMed]
  22. A. N. Tikhonov and V. I. Arsenin, Solutions of Ill-posed Problems (Winston, 1977).
  23. D. Death, R. J. Francis, C. Bricker, T. Burt, and C. Colley, “The UMA: A new tool for multi-angle photometric spectroscopy,” in Optical Interference Coatings, OSA Technical Digest Series (2013), ThC.3.
  24. S. A. Furman and A. V. Tikhonravov, Basics of Optics of Multilayer Systems (Editions Frontières, 1992).
  25. O. Stenzel, S. Wilbrandt, S. Yulin, N. Kaiser, M. Held, A. Tünnermann, J. Biskupek, and U. Kaiser, “Plasma ion assisted deposition of hafnium dioxide using argon and xenon as process gases,” Opt. Mater. Express1(2), 278–292 (2011). [CrossRef]
  26. P. Baumeister, Optical Coating Technology (SPIE Optical Engineering Press, 2004).

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