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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 18 — Sep. 9, 2013
  • pp: 21530–21541

Predictive control of thermally induced wavefront aberrations

A. Haber, A. Polo, I. Maj, S.F. Pereira, H.P. Urbach, and M. Verhaegen  »View Author Affiliations


Optics Express, Vol. 21, Issue 18, pp. 21530-21541 (2013)
http://dx.doi.org/10.1364/OE.21.021530


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Abstract

In this paper we experimentally demonstrate the proof of concept for predictive control of thermally induced wavefront aberrations in optical systems. On the basis of the model of thermally induced wavefront aberrations and using only past wavefront measurements, the proposed adaptive optics controller is able to predict and to compensate the future aberrations. Furthermore, the proposed controller is able to correct wavefront aberrations even when some parameters of the prediction model are unknown. The proposed control strategy can be used in high power optical systems, such as optical lithography machines, where the predictive correction of thermally induced wavefront aberrations is a crucial issue.

© 2013 OSA

OCIS Codes
(110.5220) Imaging systems : Photolithography
(220.1000) Optical design and fabrication : Aberration compensation
(350.6830) Other areas of optics : Thermal lensing
(110.1080) Imaging systems : Active or adaptive optics

ToC Category:
Adaptive Optics

History
Original Manuscript: July 22, 2013
Manuscript Accepted: August 19, 2013
Published: September 5, 2013

Citation
A. Haber, A. Polo, I. Maj, S.F. Pereira, H.P. Urbach, and M. Verhaegen, "Predictive control of thermally induced wavefront aberrations," Opt. Express 21, 21530-21541 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-18-21530


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