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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 20 — Oct. 7, 2013
  • pp: 23556–23567

A compact optical pickup head in blue wavelength with high horizontal stability for laser thermal lithography

Yuan-Chin Lee, Shiuh Chao, Chun-Chieh Huang, and Kuen-Chiuan Cheng  »View Author Affiliations

Optics Express, Vol. 21, Issue 20, pp. 23556-23567 (2013)

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A compact optical pickup head in blue wavelength with a single-axial actuator i.e. focusing, for laser thermal lithography was designed, fabricated, and tested. The numerical aperture of the objective lens was 0.85. The linear range of the focus error signal was 3 μm. A planar spring structure for improving the horizontal stability was designed and incorporated into the actuator. We applied a modified push-pull method together with a static Blu-ray re-writable disc to test the horizontal stability of the pickup head. We found that the in-plane jitter of the pickup head in two orthogonal directions were 0.34 nm and 1.59 nm, respectively. We demonstrated an example of applying the pickup head to write an inorganic photo-resist GeSbSnO film, and well-defined pattern was obtained with ~220 nm spot size.

© 2013 OSA

OCIS Codes
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4880) Optical design and fabrication : Optomechanics

ToC Category:
Imaging Systems

Original Manuscript: July 31, 2013
Revised Manuscript: September 6, 2013
Manuscript Accepted: September 7, 2013
Published: September 26, 2013

Yuan-Chin Lee, Shiuh Chao, Chun-Chieh Huang, and Kuen-Chiuan Cheng, "A compact optical pickup head in blue wavelength with high horizontal stability for laser thermal lithography," Opt. Express 21, 23556-23567 (2013)

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